• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.1
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• pp.6-11
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• 2001

We studied the feasibility of optical lithography for the critical layers of 0.12${\mu}{\textrm}{m}$ DRAM assuming ArF excimer laser as a light source. To enhance the fidelity of aerial image and process margin, Phase shift mask (PSM) patterns as well as binary mask patterns are corrected with in-house developed Optical Proximity Correction (OPC) software. As the result, w found that the aerial image of critical layers of DRAM cell with 0.12${\mu}{\textrm}{m}$ design rule could not be reproduced with binary masks. But if we use PSM or optical proximity corrected PSM, the fidelity of aerial image ,resolution and process margin are so much enhanced that they could be processed with optical lithography.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.11a
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• pp.194-197
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• 1995

In this study, we performed a modeling for $K^{+}$ ion-exchanged diffused channel waveguide and waveguide-type optical coupler by WKB(Wentzel-Kramer-Brillouim) dispersion equation, field distribution equation of mode and coupled mode theory, and examined the optical-power-dividing of the optical coupler fabricated by using the modeling condition. The optical-power-dividing was observed at the waveguide-type optical coupler with 3[$\mu\textrm{m}$] line-width, 6[$\mu\textrm{m}$] space between channel waveguides, and 3[mm] interaction length.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.160-163
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• 2002

Silica waveguide for an integrated diffractive optical head system was designed and fabricated. The waveguide was designed to optimize the optical efficiency of red and/or blue laser source, and a lab-made RF magnetron sputter was adopted to deposit silica cladding and core layers on SiO$_2$/Si substrates. The cladding and core layers were formed using commercial targets, and the former was done with ＃7740 and the latter with BK7 and BAK4, respectively The surface roughness of the waveguide layers was measured to be 30.3${\AA}$ for BK7 and 17.8${\AA}$ for BAK4, and the difference of refractive indices between core and cladding layers was 0.9% and 2.5%, respectively. The waveguide fabricated with the core layer of BK7 showed better optical properties when the final diffractive optical probe heads were measured with red laser(650nm) source.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.05a
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• pp.284-287
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• 1996

In this paper, we investigated the optical coupling characteristics for $K^{+}$ ion-exchanged diffused channel waveguide by using coupled-mode equations. In this case, the optical-power-dividing was observed at the waveguide-type optical coupler with 3[$\mu\textrm{m}$] line-width and, 6[$\mu\textrm{m}$] separation between channel waveguides in which interaction lengths were 1 and 3[mm], respectively, On the basis of that we deformed simulation for $Ag^{+}$ ion-exchanged diffused channel waveguide. As a result of simulation, the optical-power-dividing was shown at the waveguide-type optical coupler wish 3[$\mu\textrm{m}$] line-width, 6[$\mu\textrm{m}$] separation between channel waveguides and 0.11[mm] interaction length.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.11
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• pp.1061-1067
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• 2005

The resonant frequency modulation of $YBa_2Cu_3O_{7-x}$ meander lines has been investigated as functions of optical pulse energy and temperature by using a network analyzer. The frequency-domain measurements are performed by controlling both the resonant frequency and the frequency width. The meander lines, configured in a microstrip geometry, are illuminated by optical pulses from an actively mode-locked Nd:YAG laser. The variation of the resonant frequency shows a quadratic dependence on the reduced optical pulse energy $P/P_c$, where $P_c$ is defined as the critical optical pulse energy at which resonance signal has disappeared. As for the dependence on temperature, the results are in good agreement with the previously reported data.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.06a
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• pp.95-96
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• 1998

An optical modulator with CPW electrode on Ti:LiNbO$_3$ optical waveguide was fabricated and chterized. The electrical-optical bandwidth measurement showed an optical response of -3dB at 10 GHz and S11 less than -l0dB unto 20GHz. The typical specifications are . 5.6V of driving voltage, 4.2dB of Insertion loss and 30dB of on/off extinction.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.11
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• pp.901-907
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• 2000

As the minimum feature size for making ULSI approaches the wavelength of light source in optical lithography, the aerial image is so hardly distorted because of the optical proximity effect that the accurate mask image reconstruction on wafer surface is almost impossible. We applied the Optical Proximity Correction(OPC) on isolated patterns assuming Attenuated Phase Shift Mask(APSM) as well as binary mask, to correct the widening of isolated patterns. In this study, we found that applying OPC to APSM shows much better improvement not only in enhancing the resolution and fidelity of t도 images but also in enhancing the process margin than applying OPC to the binary mask. Also, we propose the OPC method of APSM for isolated patterns, the size of which is less than the wavelength of the ArF excimer laser. Finally, we predicted the resolution limit of optical lithography through the aerial image simulation.

• Current Optics and Photonics
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• v.3 no.5
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• pp.429-437
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• 2019

Temperature adaptability is an important metric for evaluating the performance of an optical system. The temperature characteristics of the optical system are closely related to the material and shape of its lens. In this paper, we establish a mathematical model relating the temperature characteristics to the shape and material of the lens. Then a novel assembly structure that can solve the lens constraint and positioning problem is proposed. From those basics, the correctness of the theoretical model and the effectiveness of the assembly structure are verified through simulated analysis of the imaging quality of the optical system, whose operating temperature range is $-60{\sim}100^{\circ}C$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.3
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• pp.209-212
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• 2012

In this paper, we have studied on the optimal design of the optical compensation film for the TN-LCDs. To have wide viewing angle panels, several methods such as multi-domain method, optical path method, and phase compensation method have been proposed. Among these methods, this paper focused on the phase compensation method. In the phase compensation method, the phase retardation generated from the optical birefringence for the off-axis incident is compensated by using optical films with refractive anisotropy. To compensate the phase retardation of the TN-LCDs, we have proposed design concept for the biaxial optical films and analyzed the optical performance for the proposed structures. The calculation of the dynamic motion of the liquid crystals was based on the Ericksen-Leslie theory and the optical performance of the TN-LCD was calculated from the Extended Jones Matrix Method. From the results, we have confirmed that the optical characteristics of the TN-LCDs with the biaxial films have been improved considerably compared with the TN-LCDs compensated by the combination of the uniaxial films.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.8
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• pp.688-693
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• 2000

In this paper an optical voltage sensor and an optical current sensor which can be used for the measurement of impulse voltage and current are implemented. BSO single crystal is utilized as a voltage sensor(Pockels effect cell). An rare earth doped YIG is used as a current sensor(Faraday effect cell). A new signal processing technique is adopted not only to avoid the influences o external optical fiber pertubations of transmitting optical fiber but also to improves the frequency response characteristics of the fiber-optic voltage and current sensors. Experimental results show that optical voltage sensor has maximum 2.5% error within the voltage range from 0V to 500V. and optical current sensor has maximum 2.5% error within the current range and that of optical current sensor is about 1.5% within temperature range from -2$0^{\circ}C$ to 6$0^{\circ}C$. The proposed optical sensors have good frequency response characteristics within the frequency range from DC to 10MHz.