• Title/Summary/Keyword: optical design

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KrF 엑시머 레이저를 이용한 웨이퍼 스텝퍼의 제작 및 성능분석

  • 이종현;최부연;김도훈;장원익;이용일;이진효
    • Korean Journal of Optics and Photonics
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    • v.4 no.1
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    • pp.15-21
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    • 1993
  • This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

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AWG device characteristic dependence on the fabrication error limit (도파폭 공정오차에 따른 광도파 특성변화와 소자성능 저하)

  • 박순룡;오범환
    • Korean Journal of Optics and Photonics
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    • v.10 no.4
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    • pp.342-347
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    • 1999
  • As the waveguide width and the radius of curvature get smaller for the effort of monolithic fabrication of integrated photonic devices, the waveguide characteristics change significantly according to the change of the waveguide width or the radius of curvature. Especially, variation of the waveguide width due to fabrication process errors induces a phase error for each waveguide from the change of the propagation constant. Therefore, it is important to quantify these variation effects on the device characteristics for the design and fabrication of highly integrated photonic devices. Here, we analyze four different types of waveguides to get general characteristics in propagation constant change by utilizing the effective index method and the analytic solution method. Futhermore, the output characteristics of two AWG(Arrayed Waveguide Grating) devices are simulated by a highly-functional computer code. The simulated results have been found to be similar to the realistic device characteristics. The required fabrication error limit for the ridge-type InP-AWG device should be smaller than 0.02 ${\mu}{\textrm}{m}$ to get better channel crosstalk than-25 dB, while the required fabrication error limit for rib-type silica-AWG devices may be allowed up to 0.1 ${\mu}{\textrm}{m}$ to obtain better crosstalk than -30 dB.

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A Basic Study on Sorting of Black Plastics of Waste Electrical and Electronic Equipment (WEEE) (폐가전의 검정색 플라스틱 재질선별에 관한 기초 연구)

  • Park, Eun Kyu;Jung, Bam Bit;Choi, Woo Zin;Oh, Sung Kwun
    • Resources Recycling
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    • v.26 no.1
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    • pp.69-77
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    • 2017
  • Used small household appliances(small e-waste) consists of a variety of complex materials and components. The small e-waste is mainly composed of plastics and an important potential source of waste plastic. The black plastics, particularly are very difficult to separate by resin type and therefore these are mainly recycled in the form of a mixtures. In the present study, the sorting technologies such as gravity and electro static separation, near-infrared ray(NIR) and IR/Raman optical sorting separation on mixture of black plastics were analyzed and their limitations on sorting process were also investigated. The Laser Induced Breakdown Spectroscopy(LIBS) spectrum of each black plastics was used for identification of black plastics by resin type, and after analyzing the normalization operation, Principal Component Analysis(PCA) was carried out. The spectrum data was optimized through PCA process. In order to improve the identification accuracy and sorting efficiency of black plastics, it is necessary to design a classifier with high efficiency and to improve the performance and reliability of the classifier by applying the field of intelligent algorithms.

2D Image Numerical Correction Method for 2D Digital Image Correlation (2차원 DIC 기법 적용을 위한 2D 이미지 보정 수치 해석 기법)

  • Kim, Wonseop;Hong, Seokmoo
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.4
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    • pp.391-397
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    • 2017
  • Recently, digital image correlation (DIC) techniques have been used to measure dynamic deformation during tensile testing. The standard tensile test method measures the average displacement of the relevant specimen to calculate the true stress-strain curve. Therefore, the validity of the true stress curve is restricted to the stress incurred within the uniform stretching interval, i.e., the maximum stress corresponds to the starting point of the necking deformation. Alternatively, if DIC is used, the effective range of the strain and strain rate can be extended to the breaking point of the tensile specimen, because of the feasibility of measuring the local strain over the entire area of interest. Because of these advantages, many optical 3D measurement systems have been introduced and used in research and industry. However, the conventional 3D measurement systems are exceedingly expensive and time consuming. In addition, these systems have the disadvantage of a very large equipment size which makes their transport difficult. In this study, a 2D image correction method employing a 2D DIC measurement method in conjunction with a numerical analysis method is developed using a smartphone. The results of the proposed modified 2D DIC method yielded higher accuracy than that obtained via the 3D measurement equipment. In conclusion, it was demonstrated that the proposed 2D DIC and calibration methods yield accurate measurement results with low time costs.

Dentin bond strength of bonding agents cured with Light Emitting Diode (LIGHT EMITTING DIODE로 광조사한 상아질 접착제의 상아질 전단접착강도와 중합률에 관한 연구)

  • Kim Sun-Young;Lee In-Bog;Cho Byeong-Hoon;Son Ho-Hyun;Kim Mi-Ja;Seok Chang-In;Um Chung-Moon
    • Restorative Dentistry and Endodontics
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    • v.29 no.6
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    • pp.504-514
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    • 2004
  • This study compared the dentin shear bond strengths of currently used dentin bonding agents that were irradiated with an LED (Elipar FreeLight, 3M-ESPE) and a halogen light (VIP, BISCO). The optical characteristics of two light curing units were evaluated. Extracted human third molars were prepared to expose the occlusal dentin and the bonding procedures were performed under the irradiation with each light curing unit. The dentin bonding agents used in this study were Scotchbond Multipurpose (3M ESPE), Single Bond (3M ESPE), One-Step (Bisco), Clearfil SE bond (Kuraray), and Adper Prompt (3M ESPE), The shear test was performed by employing the design of a chisel-on-iris supported with a Teflon wall. The fractured dentin surface was observed with SEM to determine the failure mode. The spectral appearance of the LED light curing unit was different from that of the halogen light curing unit in terms of maximum peak and distribution. The LED LCU (maximum peak in 465 nm) shows a narrower spectral distribution than the halogen LCU (maximum peak in 487 nm). With the exception of the Clearfil SE bond (P < 0.05), each 4 dentin bonding agents showed no significant difference between the halogen light-cured group and the LED light-cured group in the mean shear bond strength (P > 0.05). The results can be explained by the strong correlation between the absorption spectrum of camphoroquinone and the narrow emission spectrum of LED.

Modified Thermal-divergence Model for a High-power Laser Diode (고출력 레이저 다이오드 광원의 열저항 개선을 위한 하부층 두께 의존성 수정 모델)

  • Yong, Hyeon Joong;Baek, Young Jae;Yu, Dong Il;O, Beom Hoan
    • Korean Journal of Optics and Photonics
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    • v.30 no.5
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    • pp.193-196
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    • 2019
  • The design and control of thermal flow is important for the operation of high-power laser diodes (LDs). It is necessary to analyze and improve the thermal bottleneck near the active layer of an LD. As the error in prediction of the thermal resistance of an LD is large, typically due to the hyperbolic increase and saturation to linear increase of the thermal resistance as a function of thickness, it is helpful to use a simple, modified divergence model for the improvement and optimization of thermal resistance. The characteristics of LDs are described quite well, in that the values for simulated thermal resistance curves and the thermal cross section followed are almost the same as the values from the model function. Also, the thermal-cross-section curve obtained by differentiating the thermal resistance is good for identifying thermal bottlenecks intuitively, and is also fitted quite well by the model proposed for both a typical LD structure and an improved LD with thin capping and high thermal conductivity.

Discussions on the Reconstruction of Visual Illusion in Dynamic Images - Take of Paul Sermon as an example (다이나믹 이미지 예술 중 착시의 재구성에 관한 연구 - 폴 셔먼의 을 중심으로)

  • GAO, XIAOYA;Paik, Joonki
    • Journal of the Korea Convergence Society
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    • v.12 no.10
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    • pp.189-201
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    • 2021
  • The art of dynamic images has experienced three development stages, including experimental films, recording art, and new media image. By introducing all kinds of new materials, new media to the art, and the art of dynamic images has created more freedom for art creation. With the development of digital information technology, dynamic image works have put forward an increasingly high requirement of visual art. The combination of dynamic images and visual illusion can give rise to different forms and expression methods, thus endowing artworks with more vigor. This paper provides an overview by sorting out the lineage and development of dynamic images in the background, as well as understanding the application and performance of contrasted visual illusion. Based on the understanding of the characteristics of visual illusion, we discuss the new characteristics of applying the theory of visual illusion to new media dynamic images in relation to the technical approach of dynamic images. Through the analysis of specific works of Telematic Vision, we search for its reasonable combination and find the appropriate technical means of implementation. We discuss how to use digital multimedia technology and spatial optical illusion to make the design more novel and impactful, and consider how the combination of digital dynamic image technology and visual illusion should be interpreted and applied.

The Change of Collected Light According to Changing of Reflectance and Thickness of CdWO4 Scintillator for High Energy X-ray Imaging Detection (고에너지 X-선 영상검출을 위한 CdWO4 섬광체 두께와 반사체의 반사율 변화에 따른 광 수집량의 변화)

  • Lim, Chang Hwy;Park, Jong-Won;Lee, Junghee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.24 no.12
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    • pp.1704-1710
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    • 2020
  • The high-energy X-ray imaging detector used for container inspection uses a thick scintillator to effectively acquire X-rays. X-ray incident on the scintillator is generally up to 9MeV. Therefore, to effectively collect X-ray, it is necessary to use a thick scintillator. To collect the light generated by the reaction between X-ray and scintillator, an optical-sensor must be combined with the scintillator. In this study, a study on the design conditions of the detector using a CdWO4 and a small sensor is described. To calculate the collected light according to the change of the scintillator thickness and the reflectance of surface, MCNP6 and DETECT2000 were used. As a result of calculating, it was confirmed that when the reflectance of the surface was low, it was appropriate to select a scintillator with a thickness of 15 to 20-mm, but as the reflectance increased, it was confirmed that it was appropriate to select a CdWO4 with a thickness of 25 to 30-mm.

Fabrication of removable partial denture on scleroderma patient using 3-dimensional intraoral scanner (전신성 피부경화증 환자에서의 3차원 구강스캐너를 이용한 가철성 국소의치 제작 증례)

  • Kim, Ung-Gyu;Han, Jung-Suk;Yoon, Hyung-In;Yeo, In-Sung Luke
    • The Journal of Korean Academy of Prosthodontics
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    • v.59 no.1
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    • pp.116-125
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    • 2021
  • A three-dimensional (3D) intraoral scanner, which is one of the major developments in digital dentistry, is widely used in fixed prosthodontics. The application of intraoral scanner is now increasing in removable prosthodontics. Sclerotic change induced by scleroderma causes the limitation of mouth opening and multiple loss of the teeth. Conventional prosthodontic procedures are challenging for patients with this disease. This study showed a case of digital approach to the removable prosthodontic treatment of a patient who had the scleroderma and the consequent microstomia. At the provisional stage, the optical impression of patient's oral structures was digitally obtained. Using a 3D printer, the provisional dentures were fabricated. After extraction of hopeless tooth, the definitive digital impression was taken and the metal frameworks were fabricated, based on the data acquired from the impression. The definitive removable partial dentures were completed and delivered to the patient, who was satisfied with the prostheses.

Properties of translucent zirconia and lithium disilicate glass-ceramics: a literature review (반투명 지르코니아와 리튬디실리케이트 결정화유리의 물성에 관한 문헌고찰)

  • Cha, Min-Sang;Kim, Ye-Jin;Ko, Kyung-Ho;Park, Chan-Jin;Cho, Lee-Ra;Huh, Yoon-Hyuk
    • Journal of Dental Rehabilitation and Applied Science
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    • v.38 no.2
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    • pp.71-80
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    • 2022
  • Although low translucency 3 mol% yttria stabilized tetragonal zirconia polycrystal has excellent mechanical properties, it has limited application as a monolithic prosthesis. To improve these optical limitations, translucent zirconia has improved esthetics due to an increase in the cubic phase; however, it is accompanied by a decrease in mechanical properties simultaneously. Lithium disilicate has improved its mechanical properties through crystal size reduction and various heat treatment methods; therefore, its clinical application range is continuously increasing. Translucent zirconia shows a wide distribution of physical properties depending on the yttria content and lithium disilicate according to the size and density of crystal grains. As a result, the indications for translucent zirconia and lithium disilicate are increasing. Therefore, in this literature review, we intend to examine the rationale behind the material selection criteria in clinical situations and considerations for designing fixed dental prostheses including pontic, in particular, by summarizing recent studies.