• Title/Summary/Keyword: occupational safety and health (OSH) guide

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Development of a General Occupational Safety and Health (OSH) Guide for Maintenance in Etching, Deposition, and Ion Implantation Facilities (반도체 공정 설비 정비 작업 안전보건 가이드: 증착, 식각, 이온주입)

  • Kyung Ehi Zoh;Taek-hyeon Han;Jae-jin Moon;Ingyun Jung;Yeong Woo Hwang;Seyoung Kwon;Kyung-yoon Ko;Mingun Lee;Jaepil Chang;Dong-Uk Park
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.34 no.2
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    • pp.125-133
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    • 2024
  • Objectives: The aim of this study is to develop a comprehensive Occupational Safety and Health (OSH) guide for maintenance tasks in semiconductor processing, specifically focusing on etching, deposition, and ion implantation processes. Methods: The development of the OSH guide involved a literature review, consultations with industry experts, and field investigations. It concentrates on Maintenance Work (MW) operations in these specialized areas. Results: The result is a detailed OSH guide tailored to MW in etching, deposition, and ion implantation facilities within semiconductor processing. This guide is structured to assist maintenance workers through pre-, during and post-MW phases, ensuring easy comprehension and adherence to safety protocols. It highlights the necessity of safety and health measures throughout the MW process to protect personnel. The guide is enriched with real-life scenarios and visual aids, including cartoons and photographs, to aid in the understanding and implementation of safety and health principles. Conclusions: This OSH guide is designed to enhance the protection of workers engaged in maintenance activities in the electronics sector, particularly in semiconductor manufacturing. It aims to improve compliance with safety and health standards in these high-risk environments.

Development of an Occupational Safety and Health (OSH) Guide for Safely Cleaning Contaminated Machinery, Equipment, and Parts Used in the Electronics Manufacturing Process (전자산업 공정에서 사용한 부품, 기계류 세정(cleaning) 작업 안전보건 가이드)

  • Seunghee Lee;Soyeon Kim;Kyung Ehi Zoh;Yeong Woo Hwang;Kyong-Hui Lee;Kwang Jae Chung;Dong-Uk Park
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.33 no.4
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    • pp.419-426
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    • 2023
  • Objectives: This study aims to develop an Occupational Safety and Health (OSH) guide for the safe cleaning of contaminated machinery, equipment, and parts used in the electronics manufacturing process. Methods: A literature review, field investigations, and discussions were conducted. An initial draft of an OSH guide was developed and reviewed by experts with significant experience in maintenance work in the electronics manufacturing process in order to refine the guide. Results: Workers involved in cleaning processes with chemicals, solvents, and abrasive blasting can face exposure to a wide range of chemicals, abrasives, and noise. Identifying potential risks associated with each cleaning technique was an essential first step toward enhancing safety measures. The OSH guide comprises approximately eleven to twelve sections spanning 20-25 pages. It includes engineering and administrative protocols systematically organized to address the necessary actions before, during, and after cleaning tasks, depending on the technique. It is recommended that airline respirator masks be used in conjunction with an air purification system to ensure adherence to air quality standard "D" for atmosphere level. The use of an oil-free air compressor is advised, preferably a stationary model that does not rely on fuel sources like diesel. Conclusions: This OSH guide is designed to protect workers involved in maintenance activity in the electronics industry and aligns with global standards, such as those from the International Organization for Standardization (ISO) and Semiconductor Equipment and Material International, ensuring a higher level of safety and compliance.

Development of a General Occupational Safety and Health (OSH) Guide for Maintenance Work at Electronics Industry Processing Facilities (전자산업 공정 설비 작업 안전보건가이드 개발)

  • Soyeon Kim;Seunghee Lee;Jeongyeon Park;Taek-hyeon Han;Jae-jin Moon;Ingyun Jung;Kyung Ehi Zoh;Seyoung Kwon;Kwang Jae Chung;Dong-Uk Park
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.34 no.1
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    • pp.18-25
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    • 2024
  • Objectives: The primary aim of this study is to create an Occupational Safety and Health (OSH) guide for high-risk maintenance tasks, specifically one designed for maintenance work (MW) in the electronics industry. Methods: The methodology involved a literature review, field investigations, and discussions. An initial draft of the OSH guide was created and then refined through consultations with experts possessing extensive experience in MW for electronic processes. Results: Specific MW tasks within electronics processing facilities identified as high-risk by the research were selected. A comprehensive OSH guide for these tasks was developed consisting of approximately 11 to 12 components and encompassing about 20-25 pages. Implementing safety and health measures before, during, and after MW is crucial for the protection of maintenance personnel. The guide is enriched with real-case scenarios of industrial accidents and occupational diseases to enhance maintenance workers' comprehension of the OSH principles. For a clearer understanding of and adherence to the safety protocols, the guide incorporates visual aids, including cartoons and photographs. Conclusions: This OSH guide is designed to ensure the protection of workers involved in maintenance activities in the electronics industry. It aligns with global standards set by the International Organization for Standardization (ISO) and Semiconductor Equipment and Material International (SEMI) to ensure a high level of safety and compliance.