• 제목/요약/키워드: nondestructive reas-out

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PZT 박막 캐패시터의 2차 고조파 전류특성 (The Second Harmonic Current Characteristic of PZT Thin Film Capacitor)

  • 김동철;박봉태;고중혁;문병무
    • 한국전기전자재료학회논문지
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    • 제11권8호
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    • pp.596-600
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    • 1998
  • A method for the nondestructive read-out of the memory in ferroelectric thin films is demonstrated using the detection second harmonic currents introduced in the ferrolelectric capacitor as a response to an ac signal. The sign and phase of the second harmonic current depends on the polarized state +$P_r or -P_r$, The studied ferroelectric PZT thin film is found to have desirable features for the use as a memory element. This method and material seems as a promising approach for the nonvolatile memory storage.

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