• Journal of the Semiconductor & Display Technology
• /
• v.23 no.2
• /
• pp.55-59
• /
• 2024

Plasma Enhanced Chemical Vapor Deposition (PE-CVD) is a widely used technology in semiconductor manufacturing for thin film deposition. The implementation of wafer guide rings in PE-CVD processes is crucial for enhancing efficiency and product quality by ensuring uniform deposition around wafer edges and reducing particle generation. On the other hand, to prevent overall temperature non-uniformity and degradation of thin film quality within the chamber, it is essential to consider various parameters comprehensively. In this study, after applying the wafer guide rings, temperature variations and fluid flow changes were simulated. Additionally, by simulating the temperature and flow changes when applied to the PE-CVD chamber, this paper discusses the importance of optimizing variables within the entire chamber.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.26 no.6
• /
• pp.883-892
• /
• 2002

A numerical study has been carried out to investigate the flow and heat transfer from an aluminum foam heat sink in a confined channel. A uniform heat flux is given at the bottom of the aluminum foam heat sink, which is horizontally placed on the heated surface. The channel walls are assumed to be adiabatic. Cold air is supplied from the top opening of the channel and exhausted to the channel outlet. Comprehensive numerical solutions are acquired to the governing Wavier-Stokes and energy equations, using the Brinkman-Forchheimer extended Darcy model and the local thermal non-equilibrium model f3r the region of porous media. Details of flow and thermal fields are examined over wide ranges of the principal parameters; i.e., the Reynolds number Re, the height of heat sink h/H, porosity $\varepsilon$and pore diameter ratio $R_{H}$.

• Korea-Australia Rheology Journal
• /
• v.19 no.4
• /
• pp.201-209
• /
• 2007

The present paper is concerned with non-isothermal spherical Couette flow of Oldroyd-B fluid in the annular region between two concentric spheres. The inner sphere rotates with a uniform angular velocity while the outer sphere is kept at rest. Moreover, the two spherical boundaries are maintained at fixed temperature values. Hence, the fluid is effect by two heat sources; namely, the viscous heating and the temperature gradient between the two spheres. The viscoelasticity of the fluid is assumed to dominate the inertia such that the latter can be neglected. An approximate analytical solution of the energy and momentum equations is obtained through the expansion of the dynamical fields in power series of Nahme number. The analysis show that, the temperature variation due to the external source appears in the zero order solution and its effect extends to the fluid velocity distribution up to present second order. Viscous heating contributes in the first and second order solutions. In contrast to isothermal case, a first order axial velocity and a second order stream function fields has been appeared. Moreover, at higher orders the temperature distribution depends on the gap width between the two spheres. Finally, there exist a thermal distribution of positive and negative values depend on their positions in the domain region between the two spheres.

• Transactions of the Korean Society of Automotive Engineers
• /
• v.16 no.4
• /
• pp.165-172
• /
• 2008

Urea-SCR, the selective catalytic reduction using urea as reducing agent, has been investigated for about 10 years in detail and today is a well established technique for deNOx of stationary diesel engines. In the case of the SCR-catalyst a non-uniform velocity and $NH_3$ profile will cause an inhomogeneous conversion of the reducing agent $NH_3$, resulting in a local breakthrough of $NH_3$ or increasing NOx emissions. Therefore, this work investigates the effect of flow and $NH_3$ non-uniformities on the deNOx performance and $NH_3$ slip in a Urea-SCR exhaust system. From the results of this study, it is found that flow and $NH_3$ distribution within SCR monolith is strongly related with deNOx performance of SCR catalyst. It is also found that multi-hole injector shows better $NH_3$ uniformity at the face of SCR monolith face than one hole injector.

• Journal of Navigation and Port Research
• /
• v.29 no.7
• /
• pp.603-609
• /
• 2005

This paper presents the method for developing an optimum hull form with minimum wave resistance using SQP( sequential quadratic programming) as an optimization technique. The wave resistance is evaluated by a Rankine source panel method with non-linear free surface conditions and the ITTC 1957 friction line is used to predict the frictional resistance coefficient. The geometry of the hull surface is represented and modified using NURBS(Non-Uniform Rational B-Spline) surface patches. To verify the validity of the developed program the numerical calculations for Wigley hull and Series 60 Cb=0.6 hull are performed and the results obtained after the numerical calculations are compared with the initial hulls.

• Nuclear Engineering and Technology
• /
• v.30 no.3
• /
• pp.245-261
• /
• 1998

In order to validate the variable aperture channel model that can deal with the non-uniform How rate in flow domain, migration experiments of conservative tracer were performed in two artificial fractures, a parallel and a wedge-shaped fracture. These different fracture shapes were designed to give different flow pattern. The fractures were made from a transparent acrylic plastic plate and a granite slab with dimensions of 10 $\times$ 61 $\times$ 61 cm. Uranine (Fluorescein sodium salt) was used as a conservative tracer. The volumetric flow rates of uranine feed solution were 30 mL/ hr, giving a mean residence time in the fracture of approximately 24 hours for the parallel fracture and 34 hours for the wedge-shaped fracture. The migration plumes of uranine were photographed to obtain profiles in space and time for movement of a tracer in fractures. The photographed migration plume was greatly affected by the geometric shape of fractures. The variable aperture channel model could have predicted the experimental results for the parallel fracture with a large accuracy. It is expected that the variable aperture channel model would be effective to predict the transport of the contaminant, especially, with the flow rate variation in a fracture.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
• /
• v.20 no.7
• /
• pp.478-485
• /
• 2008

The extreme steam temperature deviation experienced in the superheater of a tangentially fired boiler can seriously affect its economic and safe operation. This temperature deviation is one of the main causes of boiler tube failures. The steam temperature deviation is mainly due to the thermal load deviation in the lateral direction of the superheater. The thermal load deviation consists of several causes. One of the causes is the non-uniform heat flow distribution of burnt gas on the superheater tube system. This distribution is very difficult to measure in situ using direct experimental techniques. So, we need thermal load model to estimate the tube temperature. In this paper, we propose a thermal load distribution model by using CFD analysis and plant data. We successfully predict the tube temperature and the steam flow rate in a final superheater system from the thermal load model and one dimensional heat-flow system analysis. The proposed model and analysis method would be valuable in preventing the frequent tube failure of the final superheater tubes.

• Proceedings of the Korean Society of Propulsion Engineers Conference
• /
• 2011.04a
• /
• pp.253-257
• /
• 2011

Vortex generation mechanism by inhibitor in a solid rocket motor have been investigated by 3D Large Eddy Simulation turbulent model. Most of the result of the present study are in good agreement with experimental data and previous numerical calculation. Vortex generation and breakdown behind inhibitor are periodically observed between inhibitor and nozzle head by flow-acoustic coupling mechanism. Vortex generation frequency is the same as the second-mode frequency in the motor. The roll shape vortex generation behind inhibitor induces non-uniform flow field at the nozzle entrance and its throat.

• International Journal of Automotive Technology
• /
• v.6 no.1
• /
• pp.1-8
• /
• 2005

Recently, the HSDI (High Speed Direct Injection) diesel engine has been spotlighted as a next generation engine because it has a good potential for high thermal efficiency and fuel economy. This study was carried out to investigate the in-cylinder flow characteristics generated in a HSDI diesel engine with a 4-valve type cylinder head. The four kinds of cylinder head were manufactured to elucidate the effect of intake port geometry on the in-cylinder flow characteristics. The steady flow characteristics such as coefficient of flow rate $(C_{f})$, swirl ratio (Rs), and mass flow rate (m,) were measured by the steady flow test rig and the unsteady flow velocity within a cylinder was measured by PIV. In addition, the in-cylinder flow patterns were visualized by the visualization experiment and these results were compared with simulation results calculated by the commercial CFD code. The steady flow test results indicated that the mass flow rate of the cylinder head with a short distance between the two intake ports is $13\%$ more than that of the other head. However, the non-dimensional swirl ratio is decreased by approximately $15\%$. As a result of in-cylinder flow characteristics obtained by PIV and CFD calculation, we found that the swirl center was eccentric from the cylinder center and the position of swirl center was changed with crank angle. As the piston moves to near the TDC, the swirl center corresponded to the cylinder center and the velocity distribution became uniform. In addition, the results of the calculation are in good agreement with the experimental results.

• 한국전산유체공학회:학술대회논문집
• /
• 1998.05a
• /
• pp.15-28
• /
• 1998

As an alternative for solving the incompressible Navier-Stokes equations, we present a vorticity-based integro-differential formulation for vorticity, velocity and pressure variables. One of the most difficult problems encountered in the vorticity-based methods is the introduction of the proper value-value of vorticity or vorticity flux at the solid surface. A practical computational technique toward solving this problem is presented in connection with the coupling between the vorticity and the pressure boundary conditions. Numerical schemes based on an iterative procedure are employed to solve the governing equations with the boundary conditions for the three variables. A finite volume method is implemented to integrate the vorticity transport equation with the dynamic vorticity boundary condition . The velocity field is obtained by using the Biot-Savart integral derived from the mathematical vector identity. Green's scalar identity is used to solve the total pressure in an integral approach similar to the surface panel methods which have been well-established for potential flow analysis. The calculated results with the present mettled for two test problems are compared with data from the literature in order for its validation. The first test problem is one for the two-dimensional square cavity flow driven by shear on the top lid. Two cases are considered here: (i) one driven both by the specified non-uniform shear on the top lid and by the specified body forces acting through the cavity region, for which we find the exact solution, and (ii) one of the classical type (i.e., driven only by uniform shear). Secondly, the present mettled is applied to deal with the early development of the flow around an impulsively started circular cylinder.