• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.10a
• /
• pp.1033-1036
• /
• 2002

Wafer bonding methods such as fusion and anodic bonding suffer from high temperature treatment, long processing time, and possible damage to the micro-scale sensor or actuators. In the localized bonding process, beating was conducted locally while the whole wafer is maintained at a relatively low temperature. But previous research of localized heating has some problems, such as non-uniform soldering due to non-uniform heating and micro crack formation on the glass capsule by thermal stress effect. To address this non-uniformity problem, a new heater configuration is being proposed. By keeping several points on the heater strip at calculated and constant potential, more uniform heating, hence more reliable wafer bonding could be achieved. The proposed scheme has been successfully demonstrated, and the result shows that it will be very useful in hermetic packaging. Less than 0.2 ㎫ contact Pressure were used for bonding with 150 ㎃ current input for 50${\mu}{\textrm}{m}$ width, 2${\mu}{\textrm}{m}$ height and 8mm $\times$ 8mm, 5mm$\times$5mm, 3mm $\times$ 3mm sized phosphorus-doped poly-silicon micro heater. The temperature can be raised at the bonding region to 80$0^{\circ}C$, and it was enough to achieve a strong and reliable bonding in 3minutes. The IR camera test results show improved uniformity in heat distribution compared with conventional micro heaters. For gross leak check, IPA (Isopropanol Alcohol) was used. Since IPA has better wetability than water, it can easily penetrate small openings, and is more suitable for gross leak check. The pass ratio of bonded dies was 70%, for conventional localized heating, and 85% for newly developed FP scheme. The bonding strength was more than 30㎫ for FP scheme packaging, which shows that FP scheme can be a good candidate for micro scale hermetic packaging.

• Journal of Mechanical Science and Technology
• /
• v.15 no.3
• /
• pp.291-299
• /
• 2001

Recently, severe wear on the shutdown rod cladding of Ulchin Nuclear Power Plant #1, #2 were observed by the Eddy Current Test(E.C.T.). In particular, the wear at the sixth card location was up to 75%. The test results indicated that the Flow Induced Vibration(F.I.V.) might be the cause of the fretting wear resulting from the contact between Rod Cluster Control Assemblies(RCCAs) and their spacing cards(guide plates) arranged in the guide tube. From reviewing RCCAs fretting wear repots and analyzing the general characteristics of F.I.V. mechanism in the reactor, geometric layout and flow conditions around the control rod, it is concluded that the turbulence excitation is the most probable vibration mechanism of RCCA. To identify the governing mechanism of RCCA vibration, an experiment was performed for a representative rod position in which the most serious fretting wear experienced among the six rod positions. The experimental rig was designed and set up to satisfy the governing nondimensional numbers which are Reynolds number and mass damping parameter. The vibration amplitude measurement by the non-contact laser displacement sensor showed good agreements in the frequency and the maximum wearing(vibration) location with Ulchin E.C.T. results and Framatome report, respectively. The sudden increase in the vibration amplitude was sensed around the 6th guide plate with mass flow rate variation. Comparing the similitude rod behaviour with the idealized response of a cylinder in flow induced vibration, it was found that he dominant mechanism of vibration was transferred from turbulence excitation to periodic shedding at the mass flow ate 90ι/min. Also the critical velocity of the vibration in RCCAs was determined and the vibration can be prevented by reducing the bypass flow rate below the critical velocity.

• Journal of Plant Biotechnology
• /
• v.43 no.1
• /
• pp.21-29
• /
• 2016

Remote Sensing (RS) is a technique to obtain necessary information in a non-contact and non-destructive method by using various sensors on the surface, water or atmospheric phenomena. These techniques combine elements such as sensors, and platform and information communication technology (ICT) for mounting the sensor. ICT has contributed significantly to the success of smart agriculture through quantification and measurement of environmental factors and information such as weather, crop and soil management to distribution and consumption stage, as well as the production stage by the cloud computer. Remote sensing techniques, including non-destructive non-contact bioimaging (remote imaging) is required to measure the plant function. In addition, bioimaging study in plant science is performed at the gene, cellular and individual plant level. Recently, bioimaging technology is considered the latest phenomics that identifies the relationship between the genotype and environment for distinguishing phenotypes. In this review, trends in remote sensing in plants, plants diagnostics and response to environment and status of plants phonemics research were presented.

• Journal of the Korean Magnetics Society
• /
• v.25 no.3
• /
• pp.83-86
• /
• 2015

Nowadays the weapon systems are employed air bursting munition (ABM) as smart programmable 40 mm shells which have been developed in order to hit the target with programmed munition that can be air burst after a set distance in the battlefield. In order to improve the accuracy of such a bursting time, by measuring the speed of the munition from the barrel, weapon systems calculate the exact time of flight to the target and then the time information must be inputted to the munition. In this study, we introduce a device capable of detecting a shot at K4 40 mm automatic grenade. The shot is composed of a rotating copper band to convert linear motion into rotary motion when it passes through the barrel, the steel section is exert the effect of fragment and aluminum section to give fuze information. The aluminum section was used to detect munition using eddy current method. To measure muzzle velocity by means of non-contact method, two eddy current probes separated 10 cm was employed. Time interval between two eddy current probe detection times was used as muzzle velocity. The eddy current probe was fabricated U-shape Mn-Zn ferrite core with enamelled copper wire, and 200 kHz alternating current was used to detect inductance change. Measured muzzle velocity using the developed sensor was compared to the Doppler radar system. The difference was smaller than 1%.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.20 no.2
• /
• pp.306-316
• /
• 2016

In this paper, an NMOS-diode eFuse OTP (One-Time Programmable) memory cell is proposed using a parasitic junction diode formed between a PW (P-Well), a body of an isolated NMOS (N-channel MOSFET) transistor with the small channel width, and an n+ diffusion, a source node, in a DNW (Deep N-Well) instead of an NMOS transistor with the big channel width as a program select device. Blowing of the proposed cell is done through the parasitic junction formed in the NMOS transistor in the program mode. Sensing failures of '0' data are removed because of removed contact voltage drop of a diode since a NMOS transistor is used instead of the junction diode in the read mode. In addition, a problem of being blown for a non-blown eFuse from a read current through the corresponding eFuse OTP cell is solved by limiting the read current to less than $100{\mu}A$ since a voltage is transferred to BL by using an NMOS transistor with the small channel width in the read mode.

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.37C no.9
• /
• pp.802-810
• /
• 2012

This paper describes RFID(Radio Frequency Identification) based target acquisition and docking system. RFID is non-contact identification system, which can send relatively large amount of information using RF signal. Robot employing RFID reader can identify neighboring tag attached objects without any other sensing or supporting systems such as vision sensor. However, the current RFID does not provide spatial information of the identified object, the target docking problem remains in order to execute a task in a real environment. For the problem, the direction sensing RFID reader is developed using a dual-directional antenna. The dual-directional antenna is an antenna set, which is composed of perpendicularly positioned two identical directional antennas. By comparing the received signal strength in each antenna, the robot can know the DOA (Direction of Arrival) of transmitted RF signal. In practice, the DOA estimation poses a significant technical challenge, since the RF signal is easily distorted by the surrounded environmental conditions. Therefore, the robot loses its way to the target in an electromagnetically disturbed environment. For the problem, the g-filter based error correction algorithm is developed in this paper. The algorithm reduces the error using the difference of variances between current estimated and the previously filtered directions. The simulation and experiment results clearly demonstrate that the robot equipped with the developed system can successfully dock to a target tag in obstacles-cluttered environment.