• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05b
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• pp.74-77
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• 2002

Ferroelectric Random Access Memory(FRAM) and MEMS applications require noble metal or refractory metal oxide electrodes. In this study, Ru thin films were etched using $O_2$+10% $CF_4$ plasma in an inductively coupled plasma(ICP) etching system. The etch rate of Ru thin films was examined as function of rf power, DC bias applied to the substrate. The enhanced etch rate can be obtained not only with increasing rf power and DC bias voltage, but also with small addition $CF_4$ gas. The selectivity of $SiO_2$ over Ru are 1.3. Radical densities of oxygen and fluorine in $CF_4/O_2$ plasma have been investigated by optical emission spectroscopy(OES). The etching profiles of Ru films with an photoresist pattern were measured by a field emission scanning electron microscope (FE-SEM). The additive gas increases the concentration of oxygen radicals, therefore increases the etch rate of the Ru thin films and enhances the etch slope. In $O_2$+10% $CF_4$ plasma, the etch rate of Ru thin films increases up to 10% $CF_4$ but decreases with increasing $CF_4$ mixing ratio.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07a
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• pp.171-174
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• 2005

Experimental measurements are reported and compared with the results of a two-dimensional fluid simulation for the investigation of the discharge characteristics regarding the change of the mixture ratio of Ne-Xe-He noble gases. The increase of Xe contents results in the increases of luminance and luminous efficiency while it also results in the increase of the breakdown voltage and the discharge time lag. The addition of He gas increases the brightness and the luminance efficiency. When Xe partial pressure is low, the luminance efficiency increases with the amount of He at the same total pressure. When Xe partial pressure is high, however, the luminance efficiency has a maximum value when the partial pressure of He is about 10% of the total pressure for a standard AC PDP cell with Xe fraction of $10{\sim}30%$.

• Nuclear Engineering and Technology
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• v.53 no.7
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• pp.2075-2083
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• 2021

The article provides a review of the research results obtained during of more than 20 years concerning using the gaseous radiochemical method (GRCM) for detecting of ionizing radiation. This method based on threshold nuclear reactions with production of radioactive noble gas which does not interact with the materials of gaseous tract. The applications of GRCM in the diagnostics of neutrinos, neutrons, charged particles, thermonuclear plasma thermometry, and the study of the structure and dynamics of astrophysical objects, position-sensitive dosimetry of neutron targets with accelerator driving, spatial distribution of the fast neutron flux density in a nuclear reactor allowing the transformation of longitudinal coordinate of neutron flux distribution into a temporal distribution of the radiochemical gas decay counting rate ("barcode" semblance) and measurement of bombarding particles spectra are described. Experimental testing of the described technologies was made on the neutron target driven with the linear proton accelerator of Institute for Nuclear Research of Russian Academy of Sciences (INR RAS).

• The Journal of Engineering Geology
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• v.21 no.1
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• pp.65-77
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• 2011

Hydrochemical and carbon isotopic (${\delta}^{13}C_{DIC}$) analyses of 11 water samples, and noble gas isotopic analyses of 8 water samples collected in the Kyeoungbuk and Kangwon areas of Korea were performed to determine their hydrochemical characteristics and to interpret the source of noble gases and $CO_2$ gas in the water. The carbonated mineral waters are weakly acidic (PH = 5.59-6.04), and electrical conductivity ranges from 302 to $864\;{\mu}S/cm$. The chemical composition of all the water samples is Ca-$HCO_3$ type. The high contents of Fe and Mn exceed the safe limits for drinking water. The ${\delta}^{13}C_{DIC}$ values of the samples range from -5.30‰ to -2.84‰, indicating that the carbon is supplied mainly from a deep-seated source and to a lesser degree from an inorganic carbonate source. The $^3He/^4He$ ratios of the samples range from $1.51{\times}10^{-6}$ to $6.45{\times}10^{-6}$. The samples plot into three groups on a $^3He/^4He$ versus $^4He/^{20}Ne$ diagram: the deep-seated field (e.g., a mantle source), the atmospheric field, and the air-mantle mixing field. A wide range of $^4He/^{20}Ne$ ratios is observed ($0.036{\times}10^{-6}$ to $1.76{\times}10^{-6}$), indicating that while radiogenic $^4He$ is dominant in these water samples, mantle-origin He is also present. The supply of $CO_2$ gas and noble gases from a deep-seated source to carbonated waters is inferred to be controlled by geological structures such as faults and geological boundaries.

• Economic and Environmental Geology
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• v.41 no.1
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• pp.15-32
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• 2008

The hydrochemical and isotopic (stable isotopes and noble gas isotopes) analyses for hot spring waters, cold groundwaters and surface water samples from the Seokmodo hot spring area of the Ganghwa province were carried out to characterize the hydrogeochemical characteristics of thermal waters and to interpret the source of thermal water and noble gases and the geochemical evolution of hot spring waters in the Seokmodo geothermal system. The hot spring waters and groundwaters show a weakly acidic condition with the pH values ranging from 6.42 to 6.77 and 6.01 to 7.71 respectively. The outflow temperature of the Seokmodo hot spring waters ranges from $43.3^{\circ}C\;to\;68.6^{\circ}C$. Relatively high values of the electrical conductivities which fall between 60,200 and $84,300{\mu}S/cm$ indicate that the hot spring waters were mixed with seawater in the subsurface geothermal system. The chemical compositions of the Seokmodo hot spring waters are characterized by Na-Ca-Cl water type. On the other hand, cold groundwaters and surface waters can be grouped into three types such as the Na(Ca)-$HCO_3$, Na(Ca)-$SO_4$ and Ca-$HCO_3$ types. The ${\delta}^{18}O\;and\;{\delta}D$ values of hot spring waters vary from -4.41 to -4.47%o and -32.0 to -33.5%o, respectively. Cold groundwaters range from -7.07 to -8.55%o in ${\delta}^{18}O$ and from -50.24 to -59.6%o in ${\delta}D$. The oxygen and hydrogen isotopic data indicate that the hot spring waters were originated from the local meteoric water source. The enrichments of heavy isotopes ($^{18}O\;and\;^2H$) in the Seokmodo hot spring waters imply that the thermal water was derived from the diffusion Bone between fresh and salt waters. The ${\delta}^{34}S$ values ranging from 23.1 to 23.5%o of dissolved sulfate are very close to the value of sea water sulfate of ${\delta}^{34}$S=20.2%o in this area, indicating the origin of sulfate in hot springs from sea water. The $^3H/^4He$ ratio of hot spring waters varies from $1.243{\times}10^{-6}\;to\;1.299{\times}10^{-6}cm^3STP/g$, which suggests that He gas in hot spring waters was partly originated from a mantle source. Argon isotopic ratio $(^{40}Ar/^{36}Ar=298{\times}10^{-6}cm^3STP/g)$ in hot spring waters corresponds to the atmospheric value.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.34 no.1
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• pp.30-36
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• 1998

Recently, with rapid increase of gas demand, there occurs much interest their security of safety in the gas storage tanks and pressure vessels etc. In order to solve the problems, the occurrence of corrosion fatigue crack and the propagation behavior must be investigated. Especially the occurrence of corrosion fatigue crack and the propagation behavior in the part which has concentrated stress or defects, must be studied more carefully. In this paper, the high-tensile steel of SPV 50 which is much used for building the LPG storage tanks was tested by the use of a plane bending corrosion fatigue tester under the various marine environments and in the air. These experiments were done to investigate the corrosion fatigue crack propagation behavior, the variation of aspect ratio for part through crack and electro-chemical characteristics of the metal. The main results obtained are as follows ; 1. Comparing the same surface crack length with the crack depth, the crack depth toward the thickness of specimen in air propagated faster than that in corrosion environment. 2. The aspect variation of the half elliptical crack can be estimated as following equation; b/a=i-jb/t where a : surface crack length, b : crack depth, t : specimen thickness, i,j : experimental constants but the slope j is decreased as specific resistance decreases. 3. As the specific resistance of corrosion environment decrease or the corrosion fatigue crack propagates, the corrosion potential become less noble.

• Journal of the Korean Institute of Gas
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• v.6 no.1 s.17
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• pp.92-97
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• 2002

This paper was studied on corrosion characteristics of gas absorption refrigeration & hot water system using $LiBr-H_2O$ working fluids. In the $62\%$ lithium bromide solution at $60^{\circ}C$, polarization test of Cu, $10\%$ cupronickel($90-10\%$ Cu-Ni) and $30\%$ cupronickel($70-30\%$ Cu-Ni) tube was carried out. And polarization behavior, polarization resistance characteristics, open circuit potential, anodic polarization of heat exchanger tube for gas absorption refrigeration & hot water system were considered. The main results are as following: 1) Polarization resistance of heat exchange tubes appears high in order of $30\%$ cupronickel tube > $10\%$ cupronickel tube > Cu tube. B) Open circuit potential of cupronickel tube is more noble than that of Cu tube, and corrosion current density of cupronickel is controlled than Cu tube. 3) Potential of passive region of $30\%$ cupronickel tube is more wide than that of $10\%$ cupronickel tube, and the passivation critical current of $30\%$ cupronickel tube is lower than that of $10\%$ cupronickel tube.

• The Journal of Engineering Geology
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• v.26 no.4
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• pp.515-529
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• 2016

In this study, geochemical composition, CFCs (Chlorofluorocarbons), ${\delta}^{18}O$, ${\delta}D$, ${\delta}^{13}C$ isotopes and noble gases isotopes (He, Ne) were analyzed to determine their recharge age, source of $CO_2$ gas and noble gases of carbonated hot spring water and carbonated-water samples collected in the Seoqwipo of the Jeju. The pH of the carbonated waters ranges from 6.21 to 6.84, and the high electrical conductivity range ($1,928{\sim}4,720{\mu}S/cm$). Their chemical composition is classified as $Mg(Ca,\;Na)-HCO_3$ and $Na(Ca,\;Mg)-HCO_3$ types. As a result of the calculation of groundwater age using CFCs concentrations as an environmental tracer, the carbonated water and groundwater were estimated to be about 47.5~57.2 years and about 30.3~49.5 years, respectively. The ${\delta}^{13}C$ values of carbonated water range from -1.77 to -7.27‰, and are plotted on thr deep-seated field or the mixing field of the deep-seated and inorganic origin. Noble gases isotopic ($^3He/^4He$, $^4He/^{20}Ne$) ratio shows that helium gas of carbonated hot waters comes from deep-seated magma origin.

• The Journal of Engineering Geology
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• v.19 no.4
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• pp.529-541
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• 2009

Hydrochemical, stable isotopic ($\delta^{18}O$ and dD) and noble gas isotopic analyses of seven hot spring water samples, eleven groundwater samples and six surface water samples collected from the Icheon and Pocheon area were carried out to find out hydrochemical characteristics, and to interpret the source of noble gases and the geochemical evolution of the hot spring waters. The hot spring waters show low temperature type ranging from 21.5 to $31.4^{\circ}C$ and the pH value between 6.69 and 9.21. Electrical conductivity of hot spring waters has the range from 310 to $735\;{\mu}S/cm$. Whereas the hot spring water in the Icheon area shows the geochemical characteristics of neutral pH, the $Ca-HCO_3$(or $Ca(Na)-HCO_3$) chemical type and a high uranium content, the hot spring water in the Pocheon area shows the characteristics of alkaline pH, the $Na-HCO_3$ chemical type and a high fluorine content. These characteristics indicate that the hot spring water in the Icheon area is under the early stage in the geochemical evolution, and that the hot spring water in the Pocheon area has been geochemically evolved. The $\delta^{18}O$ and ${\delta}D$ values of hot spring waters show the range of $-10.1{\sim}-8.69%o$ and from $-72.2{\sim}-60.8%o$, respectively, and these values supply the information of the recharge area of hot spring waters. The $^3He/^4He$ ratios of the hot spring waters range from $0.09\;{\times}\;10^{-6}$ to $0.65\;{\times}\;10^{-6}$ which are plotted above the mixing line between air and crustal components. Whereas the helium gas in the Icheon hot spring water was mainly provided from the atmospheric source mixing with the mantle(or magma) origin, the origin of helium gas in the Pocheon hot spring water shows a dominant crustal source. $^{40}Ar/^{36}Ar$ ratios of hot spring water are in the range of an atmosphere source.

• Journal of electromagnetic engineering and science
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• v.18 no.1
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• pp.63-69
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• 2018

This work demonstrates attenuation effects of plasma on waves propagating in the 26.5-40 GHz range. The effect is investigated via experiments measuring the transmission between two Ka-band horn antennas set 30 cm apart. A dielectric-barrier-discharge (DBD) plasma generator with a size of $200mm{\times}100mm{\times}70mm$ and consisting of 20 layers of electrodes is placed between the two antennas. The DBD generator is placed in a $400mm{\times}300mm{\times}400mm$ acrylic chamber so that the experiments can be performed for plasma generated under various conditions of gas and pressure, for instance, in air, Ar, and He environments at 0.001, 0.05, and 1 atm of pressure. Attenuation is calculated by the difference in the transmission level, with and without plasma, which is generated with a bias voltage of 20 kV in the 0.1-1.4 kHz range. Results show that the attenuation varies from 0.05 dB/m to 9.0 dB/m depending on the environment. Noble gas environments show higher levels of attenuation than air, and He is lossier than Ar. In all gas environments, attenuation increases as pressure increases. Finally, electromagnetic models of plasmas generated in various conditions are provided.