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The Fabrication of Megasonic Agitated Module(MAM) for the Improved Characteristics of Wet Etching

  • Park, Tae-Gyu;Yang, Sang-Sik;Han, Dong-Chul
    • Journal of Electrical Engineering and Technology
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    • v.3 no.2
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    • pp.271-275
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    • 2008
  • The MAM(Megasonic Agitated Module) has been fabricated for improving the characteristics of wet etching. The characteristics of the MAM are investigated during the wet etching with and without megasonic agitation in this paper. The adoption of the MAM has improved the characteristics of wet etching, such as the etch rate, etch uniformity, and surface roughness. Especially, the etching uniformity on the entire wafer was less than ${\pm}1%$ in both cases of Si and glass. Generally, the initial root-mean-square roughness($R_{rms}$) of the single crystal silicon was 0.23nm. Roughnesses of 566nm and 66nm have been achieved with magnetic stirring and ultrasonic agitation, respectively, by some researchers. In this paper, the roughness of the etched Si surface is less than 60 nm. Wet etching of silicon with megasonic agitation can maintain nearly the original surface roughness during etching. The results verified that megasonic agitation is an effective way to improve etching characteristics of the etch rate, etch uniformity, and surface roughness and that the developed micromachining system is suitable for the fabrication of devices with complex structures.

Chemical Structure of the Major Color Component from a Korean Pigmented Rice Variety (한국산 유색미에서 분리한 안토시아닌의 화학구조)

  • Cho, Man-Ho;Paik, Young-Sook;Yoon, Hye-Hyun;Hahn, Tae-Ryong
    • Applied Biological Chemistry
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    • v.39 no.4
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    • pp.304-308
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    • 1996
  • The major color component of a Korean pigmented rice (Oeyza sativa var. Suwon 415) was purified with Amberlite XAD-7 column and preparative paper chromatography. The purified pigment was determined as anthocyanin by paper chromatography, UV/Vis and NMR spectroscopy. The $\lambda_{max}$ of the Purified anthocyanin on UV/Vis spectrum were 529 nm and 281 nm. The $A_{440}/A_{529}$ value of the purified anthocyanin was 23% suggesting the presence of 3-glycosidic structure. The aglycone from acid hydrolysis showed bathochromic shift (18 nm) in the presence of $AlCl_3$ indicating that the anthocyanidin contained free adjacent hydroxyl groups such as cyanidin, delphinidin, petunidin or luteolinidin. The sugar moiety obtained from acid hydrolysis was determined as glucose by paper chromatography. The NMR spectra showed that the aglycone was cyanidin and the sugar was ${\beta}-D-glucopyranose$. Thus, the chemical structure of the purified anthocyanin was identified as cyanidin $3-O-{\beta}-D-glucopyranoside$.

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Analyzing Spectral Characteristics of Salt Marsh Vegetation Around Donggumdo Tidal Flat in Ganghwado, Korea (강화도 동검도 주변 조간대 내에 서식하는 염생식물의 분광특성 분석)

  • Lee, Yoon-Kyung;Eom, Jin-Ah;Ryu, Joo-Hyung;Won, Joong-Sun
    • Korean Journal of Remote Sensing
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    • v.23 no.6
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    • pp.575-581
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    • 2007
  • Suaeda japonica is the one of halophyte species which is widely spread in the Ganghwado tidal flat. Halophyte affects to the vertical development of wetland by enhancing the adhesion force of sediments. If demineralization of tidal flat proceeds, the colony of halophyte moves to the seaside where has relatively high salinity content. The change of halophyte zonation can be an environmental indicator to understand the landization of tidal flat. To interpret the spectral characteristics of halophyte, we measured the reflectance of suaeda japonica, reed and sediment around Donggumdo tidal flat in Ganghwado. First and second-derivation analysis was applied to these transformed spectra in order to identify which spectral ranges were distinguished with different coastal wetland vegetation and artificial structures. From the result, red reflectance peak of suaeda japonica were appeared at 600-650nm and greed reflectance peak of reed were appeared at 500-570nm. Spectra of sediments were continuously increased from 350-550nm without any absorption by chlorophyll. These reflectance were easily identified among the spectra of halophyte.

Radioanalytical and Spectroscopic Characterizations of Hydroxo- and Oxalato-Am(III) Complexes (방사분석과 분광학을 이용한 Am(III) 가수분해와 옥살레이트 착물 화학종 연구)

  • Kim, Hee-Kyung;Cho, Hye-Ryun;Jung, Euo Chang;Cha, Wansik
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.16 no.4
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    • pp.397-410
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    • 2018
  • When considering the long-term safety assessment of spent-nuclear fuel management, americium is one of the most radio-toxic actinides. Although spectroscopic methods are widely used for the study of actinide chemistry, application of those methods to americium chemistry has been limited. Herein, we purified $^{241}Am$ to obtain a highly pure stock solution required for spectroscopic studies. Quantitative and qualitative analyses of purified $^{241}Am$ were carried out using liquid scintillation counting, and gamma and alpha radiation spectrometry. Highly sensitive absorption spectrometry coupled with a liquid waveguide capillary cell and time-resolved laser fluorescence spectroscopy were employed for the study of Am(III) hydrolysis and oxalate (Ox) complexation. $Am^{3+}$ ions under acidic conditions exhibit maximum absorbance at 503 nm, with a molar absorption coefficient of $424{\pm}8cm^{-1}{\cdot}M^{-1}$. $Am(OH)_3(s)$ colloidal particles formed under near neutral pH conditions were identified by monitoring the absorbance at around 506-507 nm. The formation of ${Am(Ox)_3}^{3-}$ was detected by red-shifts of the absorption and luminescence spectra of 4 and 5 nm, respectively. In addition, considerable enhancements of the luminescence intensities were observed. The luminescence lifetime of ${Am(Ox)_3}^{3-}$ increased from 23 to 56 ns, which indicates that approximately six water molecules are replaced by carboxylate ligands in the inner-sphere of the Am(III). These results suggest that ${Am(Ox)_3}^{3-}$ is formed through the bidentate coordination of the oxalate ligands.

A Comparative Study of Sulfate and Chloride Intrusion in Mortar Sections: An Approach Using Laser Induced Breakdown Spectroscopy and Ion Exchange Membrane (LIBS와 이온교환막을 활용한 모르타르 단면 침투 황산염과 염화물 분석)

  • Park, Won-Jun
    • Journal of the Korea Institute of Building Construction
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    • v.23 no.3
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    • pp.221-229
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    • 2023
  • This research aimed to conduct an empirical assessment of the penetration of chloride and sulfate ions into mortar sections using an anion exchange membrane(AEM) and laser-induced breakdown spectroscopy(LIBS). The study involved a simultaneous ion chromatography(IC) analysis and LIBS analysis performed on mortars immersed in varying concentrations of chloride and sulfate. The findings revealed that at the wavelengths specific to Chloride(837.59nm) and Sulfur(921.30nm), the LIBS intensity achieved using AEM surpassed that obtained with a paper substrate at equivalent penetration concentrations. A robust correlation was confirmed between LIBS intensity and chloride ion concentration. Furthermore, when juxtaposed with IC analysis concentration outcomes at identical depths, the AEM displayed a higher intensity. The research noted an enhancement in LIBS intensity and a diminution in errors within the low-concentration section when deploying AEM. However, for the Sulfur wavelength of 921.3nm, there remains a need to augment the sensitivity of the LIBS signal within the low-concentration section in future studies. The findings underscore the potential of employing AEM and LIBS for precise analysis of chloride and sulfate ion penetration into mortar sections. This strategy can aid in bolstering assessment precision and mitigating errors, particularly in regions with low concentrations. It is recommended to further research and develop methods to amplify the sensitivity of the LIBS signal for sulfur detection in low-concentration sections. In sum, the study accentuates the significance of employing advanced techniques like AEM and LIBS for efficacious and precise analysis in the domain of mortar section assessment.

Electrical and Optical properties of $Si-SnO_2 $ Heterojunction ($Si-SnO_2 $ Heterojunction의 전기적 광학적 특성)

  • 김화택
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.13 no.2
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    • pp.23-27
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    • 1976
  • $Si{\cdot}SnO_{2}$ heterojunction was prepared by oxidzing at oxygen atmosphere $SnO_{2-X}$ Which made by Flith evaporation of $SnO_{2}$ powder on III surface of p and n type Si single crystals. The energy band Profile of $Si{\cdot}SnO_{2}$ heterojunction was depicted from its physical properties. This heterojunction was very good rectifying junction, very sensitive in spectral response of Photovoltage at from 400nm to 1200nm, and -10$^{18}$sec of time contant. From above properties, this heterojunction was found ps good high speed photovoltaic device and solar cell.

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Growth and Photocurrent Properties of CuGaTe2 Single Crystal Thin Films by Hot Wall Epitaxy (Hot Wall Epitaxy (HWE) 방법에 의한 CuGaTe2 단결정 박막 성장과 광전류 특성)

  • 백승남;홍광준
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.158-158
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    • 2003
  • 수평 전기로에서 CuGaTe2 다결정을 합성하여 HWE 방법으로 CuGaTe2 단결정 박막을 반절연성 GaAs(100) 위에 성장하였다. CuGaTe2 단결정 박막은 증발원과 기판의 온도를 각각 67$0^{\circ}C$, 41$0^{\circ}C$로 성장하였다. 이때 단결정 박막의 결정성이 10K에서 측정한 광발광 스펙트럼은 954.5nm (1.2989eV) 근처에서 exciton emission 스펙트럼이 가장 강하게 나타났으며, 또한 이중결정 X-선 요동곡선(DCRC)의 반폭치(FWHM)도 139arcsec로 가장 작게 측정되어 최적 성장 조건임을 알 수 있었다. Hall 효과는 van der Paw방법에 의해 측정되었으며, 온도에 의존하는 운반자 농도와 이동도는 293K에서 각각 8.72$\times$$10^{23}$개/㎥, 3.42$\times$$10^{-2}$$m^2$/V.s였다. 상온에서 CuGaTe2 단결정 박막의 광흡수 특성으로부터 에너지 띠간격이 1.22 eV였다 Band edge에 해당하는 광전도도peak의 온도 의존성은 Varshni 관계식으로 설명되었으며, Varshni 관계식의 상수값은 Eg(0) = 1.3982 eV, $\alpha$= 4.27$\times$$10^{-4}$ eV/K, $\beta$= 265.5 K로 주어졌다. CuGaTe2 단결정 박막의 광전류 단파장대 봉우리들로부터 10K에서 측정된 $\Delta$cr (crystal Field splitting)은 0.0791eV, $\Delta$s.o (spin orbit coupling)는 0.2463eV였다. 10K에서 광발광 봉우리의 919.8nm (1.3479eV)는 free exciton(Ex), 954.5nm (1.2989eV)는 donor-bound exciton 인 I2(DO,X)와 959.5nm (1.2921eV)는 acceptor-bound exciton 인 I1(AO,X) 이고, 964.6nm(1.2853eV)는 donor-acceptor pair(DAP) 발광, 1341.9nm (0.9239eV)는 self activated(SA)에 기인하는 광발광 봉우리로 고찰되었다.

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Measurement of Grating Pitch Standards using Optical Diffractometry and Uncertainty Analysis (광 회절계를 이용한 격자 피치 표준 시편의 측정 및 불확도 해석)

  • Kim Jong-Ahn;Kim Jae-Wan;Park Byong-Chon;Kang Chu-Shik;Eom Tae-Bong
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.8 s.185
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    • pp.72-79
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    • 2006
  • We measured grating pitch standards using optical diffractometry and analyzed measurement uncertainty. Grating pitch standards have been used widely as a magnification standard for a scanning electron microscope (SEM) and a scanning probe microscope (SPM). Thus, to establish the meter-traceability in nano-metrology using SPM and SEM, it is important to certify grating pitch standards accurately. The optical diffractometer consists of two laser sources, argon ion laser (488 nm) and He-Cd laser (325 nm), optics to make an incident beam, a precision rotary table and a quadrant photo-diode to detect the position of diffraction beam. The precision rotary table incorporates a calibrated angle encoder, enabling the precise and accurate measurement of diffraction angle. Applying the measured diffraction angle to the grating equation, the mean pitch of grating specimen can be obtained very accurately. The pitch and orthogonality of two-dimensional grating pitch standards were measured, and the measurement uncertainty was analyzed according to the Guide to the Expression of Uncertainty in Measurement. The expanded uncertainties (k = 2) in pitch measurement were less than 0.015 nm and 0.03 nm for the specimen with the nominal pitch of 300 nm and 1000 nm. In the case of orthogonality measurement, the expanded uncertainties were less than $0.006^{\circ}$. In the pitch measurement, the main uncertainty source was the variation of measured pitch values according to the diffraction order. The measurement results show that the optical diffractometry can be used as an effective calibration tool for grating pitch standards.