• 멤브레인
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• 제23권3호
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• pp.189-203
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• 2013

과불화질소, 육불화황, 삼불화질소와 같은 불소를 포함한 불화가스는 이산화탄소 온실가스에 비교해 배출량은 적지만 지구온난화지수가 매우 높아 지구온난화에 미치는 영향이 크다. 이러한 불화가스의 주요배출원이 국가 중추산업인 반도체/LCD 산업이나 중전기 산업 등에 집중되어 있어 더욱 심각하다. 따라서 본 논문에서는 불화가스 저감 기술 중 분리막 기반 불화가스 회수 분리 공정을 중심으로 불화가스 저감 기술 개발 현황을 살펴보고자 하였다.

• Bulletin of the Korean Chemical Society
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• 제35권8호
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• pp.2403-2409
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• 2014

Absolute isotope ratio is a critical constituent in determination of atomic weight. To measure the absolute isotope ratio using a mass spectrometer, mass discrimination factor, $f_{MD}$, is needed to convert measured isotope ratio to real isotope ratio of gas molecules. If the $f_{MD}$ could be predicted, absolute isotope ratio of a chemical species would be measureable in absence of its enriched isotope pure materials or isotope references. This work employed gravimetrically prepared isotope mixtures of argon (Ar) to obtain $f_{MD}$ at m/z of 40 in the magnetic sector type gas mass spectrometer (gas/MS). Besides, we compare the nitrogen isotope ratio of nitrogen trifluoride ($NF_3$) with that of nitrogen molecule ($N_2$) decomposed from the same $NF_3$ thermally in order to identify the difference of $f_{MD}$ values in extensive m/z region from 28 to 71. Our result shows that $f_{MD}$ at m/z 40 was $-0.044%{\pm}0.017%$ (k = 1) from measurement of Ar artificial isotope mixtures. The $f_{MD}$ difference in the range of m/z from 28 to 71 is observed $-0.12%{\pm}0.14%$ from $NF_3$ and $N_2$. From combination of this work and reported $f_{MD}$ values by another team, IRMM, if $f_{MD}$ of $-0.16%{\pm}0.14%$ is applied to isotope ratio measurement from $N_2$ to $SF_6$, we can determine absolute isotope ratio within relative uncertainty of 0.2 %.