• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.4
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• pp.395-401
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• 2013

In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

• Bulletin of the Korean Chemical Society
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• v.22 no.2
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• pp.154-158
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• 2001

The steps for the generation of very thin GaN films on ultrathin AlN/6H-SiC surface by alternating a pulsative supply (APS) of trimethyl gallium and NH3 gases have been examined by ASED-MO calculations. We postulate that the gallium cul ster was formed with the evaporation of CH4 gases via the decomposition of trimethyl gallium (TMG), dimethyl gallium (DMG), and monomethyl galluim (MMG). During the injection of NH3 gas into the reactor, the atomic hydrogens were produced from the thermal decomposition of NH3 molecule. These hydrogen gases activated the Ga-C bond cleavage. An energetically stable GaN nucleation site was formed via nitrogen incorporation into the layer of gallium cluster. The nitrogen atoms produced from the thermal degradation of NH3 were expected to incorporate into the edge of the gallium cluster since the galliums bind weakly to each other (0.19 eV). The structure was stabilized by 2.08 eV, as an adsorbed N atom incorporated into a tetrahedral site of the Ga cluster. This suggests that the adhesion of the initial layer can be reinforced by the incorporation of nitrogen atom through the formation of large grain boundary GaN crystals at the early stage of GaN film growth.

• Microbiology and Biotechnology Letters
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• v.17 no.6
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• pp.624-628
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• 1989

A study on the citric acid production using Saccharomycopsis lipolytica (NRRL Y7576) was carried out in shake-flasks, air-lift and membrane recycle bioreactors. The cells entrapped in Ca-alginate beads were used in shake-flasks and air-lift reactor. Repeated batch fermentation in shake-flasks was successfully performed for 34 days and resulted in a yield of 54%. Increased yield (63%) was obtained in the air-lift reactor operation using nitrogen deficient medium (NDM). In the membrane recycle bioreactor operation, the maximal dry cell mass concentration was 39 g/1 at a dilution rate of 0.02 h$^{-1}$ and the yield with NDM was higher than that with growth medium. In addition, the yield and volumetric productivity with pure oxygen supply were greatly improved compared with those with air supply.

• Journal of environmental and Sanitary engineering
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• v.7 no.1
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• pp.45-56
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• 1992

The Anaerbic Anoxic/oxic process is one of the biological treatment methods to remove nitrogen and phosphorus effectively which are nutritional elements for eutrophication. Supernatant of primary sediment of Anaerobic digester is used as a carbon source instead of methanol methanol supply in usual A$_{2}$/O process. The efficiency of the following treatment processes are as follow : 1) Changing recycle ratio in the usual A$_{2}$/O process without the stage of Anaerobic digester. 2) Changing recycle ratio in the usual A$_{2}$/O process with the supernatant supply of the Anaerobic digester. In the result of comparison, changing recycle ratio is almost no effect in the removal of phosphorus, however the effect of removal in nitrogenous substance are remarkable, and the effect of Anaerobic digester is not as effective as expected because the BOD removed in the digester partly, the rate of phosphorus to the BOD exceed pertinent range.

• Magazine of the Korean Society of Agricultural Engineers
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• v.43 no.6
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• pp.154-162
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• 2001

This study was performed to examine the rice growth and nutrient change in paddy soil with reclaimed sewage irrigation. Total nitrogen and total phosphorus in the experimental system were analyzed before and after rice culture. The experiment lasted three consecutive years, and this paper presents results of the last year. Additional supply of nutrients to the rice culture by reclaimed sewage irrigation was significant and it increased the yield. Nutrient uptake by rice plant increased with more nutrient supplied, however. there was limit in plant uptake. Nutrient accumulation occurred in the soil and it was more apparent for the phosphorus where most of the remaining quantity was accumulated while substantial amount of nitrogen was lost during the growing season. This study suggested that additional nutrient supply by reclaimed sewage irrigation might be a supplemental benefit to the rice culture, and it can help the fertilization management. However, long term effects of continual reclaimed sewage irrigation should be assessed carefully including nutrient mass balance in the paddy rice culture system.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.49 no.2
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• pp.73-81
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• 2004

Effects of ambient and elevated $\textrm{CO}_2$ and high temperature, and their interactions with zero and applied nitrogen supply (NN-no nitrogen and AN-applied nitrogen) were studied on soybean (Glycine max L.) in 2001. In this experiment, elevated $\textrm{CO}_2$ (650 $\mu\textrm{mol}.\textrm{mol}^{-1}$) and temperature (+$5^{\circ}$) increased total dry mass at final harvest by 125% and 119% and seed weight per plant by 57% and 105% for NN and AN plants, respectively. Although the influence of temperature and temperature x $\textrm{CO}_2$ were not significant, the influences of $\textrm{CO}_2$ concentration and temperature x $\textrm{CO}_2$ concentration were significant on total dry weight and seed weight, respectively. In particular, seed weight per plant was increased, while weight per one hundred seed weight was decreased with elevated $\textrm{CO}_2$ and temperature. The N supply increased biomass and seed weight per soybean plants. The results of this study suggest that the long-term adaptation of soybean growth at an elevated $\textrm{CO}_2$ concentration and high temperature might potentially result in a increase in dry matter production and yield.

• Journal of Korean Society on Water Environment
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• v.16 no.4
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• pp.513-521
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• 2000

Intermittently aerated activated sludge process was applied as a water reuse process of $70m^3/day$ for the upgrade of organic, nitrogen and phosphorus removal efficiency and clarifier performance. After application of the intermittently aeration, removal efficiency of BOD, SS, T-N and T-P were achieved 95%, 90%, 80% and 60%, respectively. Removal efficiencies in intermittently aerated process were considerably increased. comparing to those of continuously aerated activated sludge process. Also sludge rising problem in clarifier was improved. Average concentration of supplied reusing water were BOD 5 mg/L, turbidity 4 NTU and after chlorination, residual chlorine 0.4 mg/L, coliform 0 MPN/100mL. Intermittently aerated activated sludge process could be one of the best alternative process for the retrofit of conventional activated sludge process for the removal of nutrient in water reuse system.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.47 no.2
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• pp.108-115
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• 2002

The effects of long-term fertilization on soil properties and nutrient availability are not well documented for cassava cultivation in Vietnam. In 1990, a field research plots were established with 12 treatments to test the effect of different rates of nitrogen (N), phosphorus (P) and potassium (K) on soil properties in Acrisols at Thai Nguyen University in Northern Vietnam. In 1999, composite soil samples (0 to 20cm depth) were collected from eight selected plots for measurements of nutrient supply rates by ion exchange membrane probes and for growing corn and canola in a growth chamber with and without added lime. Generally, long-term nitrogen (N) fertilization increased available N supply rates but decreased available potassium (K) and magnesium (Mg). Long-term phosphorus(P) applications increased canola N, calcium (Ca) and Mg uptake. Canola P uptake increased with increased P rates only when lime was added. Long-term K applications increased canola N, K, Ca, Mg uptake but only significantly increased corn N uptake. Liming significantly increased uptake of N, P, K, Ca, Mg and S for both corn and canola. However, N $H_{4-}$N, K and Mg soil supply rates were reduced when lime was added, due to competition between Ca from the added lime and other nutrients.

• Korean Journal of Environmental Agriculture
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• v.8 no.2
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• pp.93-102
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• 1989

Water pollution status of the irrigation water, inorganic nutrient contents of rice plant, relationship between water quality of irrigation water and inorganic nutrient contents of rice plant, and nitrogen supply by irrigation water at six sites of pumping stations in Kimhae plain were investigated. The results were as follows : 1. Average values of water components analyzed at all pumping stations were in the range of 6.5-7.0 pH, 0.6-7.7ppm DO, 4.4-63.5ppm BOD, 7.3-73.9ppm COD, 1.84-16.22ppm $NH_4$-N, 1.22-15.49ppm $NO_3$-N and 0.07-1.35ppm $PO_4$-P respectively. 2. Comparatively heavy polluted sites were Sikman, Bongrim and Noksan, and less polluted sites were Daejeo, Myeongje and Jangyou, judging from BOD, COD and $NH_4$-N of the irrigation water. 3. Nitrogen supply by irrigated water for a year were 6.82Kg/10a, 5.98Kg/10a, 6.64Kg/10a, 2.31kg/10a, 6.22Kg/10a and 2.54Kg/10a in Daejeo, Sikman, Bongrim, Myeongji and Noksan area, respectively. 4. Positive correlation was observed between ammonium nitrogen of the water and total nitrogen contents of rice plant. Total nitrogen contents of rice plant were higher in Sikman, Borgim and Noksan area than in the other areas.

• Korean Journal of Organic Agriculture
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• v.25 no.4
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• pp.805-819
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• 2017

The study was carried out to develop a mathematical model for evaluating the effect of organic fertilizers in organic rice production systems. A function to simulate the nitrogen mineralization process in the paddy soil has been developed and integrated into ORYZA2000 crop growth model. Inorganic nitrogen in the soil was estimated by single exponential models, given temperature and C:N ratio of organic amendments. Data collected from the two-year field experiment were used to evaluate the performance of the model. The revised version of ORYZA2000 provided reasonable estimates of key variables for nitrogen dynamics and crop growth in the organic rice production systems. Coefficient of determination between the measured value and simulated value were 0.6613, 0.8938, and 0.8092, respectively for soil inorganic nitrogen, total dry matter production, and rice yield. This means that the model could be used to quantify nitrogen supplying capacity of organic fertilizers relative to chemical fertilizer. Nitrogen dynamics and rice growth simulated by the model would be useful information to make decision for organic fertilization in organic rice production systems.