• 한국생물공학회:학술대회논문집
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• 한국생물공학회 2003년도 생물공학의 동향(XII)
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• pp.74-78
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• 2003

본 논문에서는 금속의 표면 플라즈몬 공명으로 인한 금속-유전체 경계면에서의 국소적 전자기장의 강화 효과를 이용하여 표면 플라즈몬을 유발하는 금 박막을 유리 기판위에 증착하고, 프리즘 커플러를 이용한 소산장의 공명 흡수현상을 이차원 영상 으로 얻었다. 특히 DNA/단백질 칩 등 향후 가능한 다채널 시스템에의 응용을 고려하여11-MUA, 11-MUOH 등 자기조립 단분자막(SAM)을 크롬 마스크와 리토그래피, 그리고 Shadow mask와 광 산화반응을 이용하여 금 표면 위에 패터닝 하였다. 텅스텐-할로겐 램프와 중심파장이 ${\lambda}_0=633$ nm의 대역통과 필터를 사용하여 이 평행광을 프리즘 커플러에 입사시켜 반사되어 나오는 반사광의 이차원 영상을 얻었다. 이와는 별도로 ${\lambda}_0=633$ nm의 레이저를 이용하여 단분자막이 코팅되어 있을 때와 없을 때의 공명각의 변화를 관찰하였다. 얻어진 이차원 영상의 위치에 따른 화소 값의 변화를 단분자 막의 두께의 변화에 따라 보정하고, 알려진 매질의 SPR 특성을 Fresnel 방정식에 따라 이론적으로 계산하면 다채널 표면 영상으로부터 항원-항체 등 단백질의 결합 정도를 정량적으로 측정할 수 있다.

• 센서학회지
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• 제21권6호
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• pp.440-445
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• 2012

Contact-type Linear Encoder-like Capacitive Displacement Sensor (CLECDiS) is a novel displacement sensor which has wide measurable range with high resolution. The sensor, however, is very sensitive to relative rotational alignment between stator and mover of the sensor as well as its displacement. In addition to, there can be some disturbances in the relative rotational alignment, so some noises occur in the sensor's output signal by the disturbances. This negative effect of the high sensitivity may become larger as increasing sensitivity. Therefore, this negative effect of the high sensitivity has to be compensated and reduced to achieve nanometer resolution of the sensor. In this study, a new type capacitive linear encoder with a mechanical guide is presented to reduce the relative rotational alignment problem. The presented method is not only to reduce the alignment problem, but also to assemble the sensor to the stage conveniently. The method is based on a new type CLECDiS that has mechanical guide autonomously. In the presented sensor, when the device is fabricated by micro-machining, the guide-rail is also fabricated on the surface of the sensor. By the direct fabrication of the guide-rail with high precision micro-machining, errors of the guide-rail can be reduced significantly. In addition, a manual yaw alignment is not required to obtain large magnitude of the output signal after the assembly of the sensor and the stage. The sensor movement is going to follow the guide-rail automatically. The prototype sensor was fabricated using the presented method, and we verify the feasibility experimentally.

• 한국정밀공학회지
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• 제26권8호
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• pp.72-78
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• 2009

We developed a line standards measurement system using an optical microscope and measured two kinds of line standards. It consists of three main parts: an optical microscope module including a CCD camera, a stage system with a linear encoder, and a measurement program for a microscopic image processing. The magnification of microscope part was calibrated using one-dimensional gratings and the angular motion of stage was measured to estimate the Abbe error. The threshold level in line width measurement was determined by comparing with certified values of a line width reference specimen, and its validity was proved through the measurement of another line width specimen. The expanded uncertainty (k=2) was about 100 nm in the measurements of $1{\mu}m{\sim}10{\mu}m$ line width. In the comparison results of line spacing measurement, two kinds of values were coincide within the expanded uncertainty, which were obtained by the one-dimensional measuring machine in KRISS and the line standards measurement system. The expanded uncertainty (k=2) in the line spacing measurement was estimated as $\sqrt{(0.098{\mu}m)^2+(1.8{\times}10^{-4}{\times}L)^2}$. Therefore, it will be applied effectively to the calibration of line standards, such as line width and line spacing, with the expanded uncertainty of several hundreds nanometer.

• 한국재료학회지
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• 제22권3호
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• pp.150-154
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• 2012

Ti-6Al-4V ELI (Extra Low Interstitial) alloy have been widely used as alternative to bone due to its excellent biocompatibility, although it still has many problems such as high elastic modulus and toxicity. Therefore, biomaterials with low elastic modulus and non toxic characteristics have to be developed. A novel ${\beta}$ Ti-35wt%Nb-7wt%Zr-Calcium pyrophosphate (CPP) composite that is a biocompatible alloy without elemental Al or V was fabricated by spark plasma sintering (SPS) at $1000^{\circ}C$ under 70 MPa using high energy mechanical milled (HEMM) powder. The microstructure and phases of the milled powders and the sintered specimens were studied using SEM, TEM, and XRD. Ti-35wt%Nb-7wt%Zr alloy was transformed from ${\alpha}$ phase to ${\beta}$ phase in the 4h-milled powder by sintering. The sintered specimen using the 4h-milled powder showed that all the elements were distributed very homogeneously and had higher density and hardness. ${\beta}$ Ti alloy-CPP composite, which has nanometer particles, was fabricated by SPS using HEMMed powder. During the sintering process, $CaTiO_3$, TixOy, and CaO were formed because of the reaction between Ti and CPP. The Vickers hardness of the composites increases with the increase of the milling time and the addition of CPP. The biocompatibility of the Ti-Nb-Zr alloys was improved by addition of CPP.

• 한국재료학회지
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• 제17권1호
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• pp.11-17
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• 2007

Turbulent in-situ mixing process is a new material process technology to get dispersed phase in nanometer size by controlling reaction of liquid/solid, liquid/gas, flow ana solidification speed simultaneously. In this study, mixing which is the key technology to this synthesis method was studied by computational fluid dynamics. For the simulation of mixing of liquid metal, static mixers investigated. Two inlets for different liquid metal meet ana merge like 'Y' shape tube having various shapes and radios of curve. The performance of mixer was evaluated with quantitative analysis with coefficient of variance of mass fraction. Also, detailed plots of intersection were presented to understand effect of mixer shape on mixing. The simulations show that the Reynolds number (Re) is the important factor to mixing and dispersion of $TiB_2$ particles. Mixer was designed according to the simulation, and $Cu-TiB_2$ nano composites were evaluated. $TiB_2$ nano particles were uniformly dispersed when Re was 1000, and cluster formation and reduction in volume fraction of $TiB_2$ were found at higher Re.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.32-32
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• 2009

Silicon carbide (SiC) is a wide-bandgap semiconductor that has materials properties necessary for the high-power, high-frequency, high-temperature, and radiation-hard condition applications, where silicon devices cannot perform. SiC is also the only compound semiconductor material. on which a silicon oxide layer can be thermally grown, and therefore may fabrication processes used in Si-based technology can be adapted to SiC. So far, atomic force microscopy (AFM) has been extensively used to study the surface charges, dielectric constants and electrical potential distribution as well as topography in silicon-based device structures, whereas it has rarely been applied to SiC-based structures. In this work, we investigated that the local oxide growth on SiC under various conditions and demonstrated that an increased (up to ~100 nN) tip loading force (LF) on highly-doped SiC can lead a direct oxide growth (up to few tens of nm) on 4H-SiC. In addition, the surface potential and topography distributions of nano-scale patterned structures on SiC were measured at a nanometer-scale resolution using a scanning kelvin probe force microscopy (SKPM) with a non-contact mode AFM. The measured results were calibrated using a Pt-coated tip. It is assumed that the atomically resolved surface potential difference does not originate from the intrinsic work function of the materials but reflects the local electron density on the surface. It was found that the work function of the nano-scale patterned on SiC was higher than that of original SiC surface. The results confirm the concept of the work function and the barrier heights of oxide structures/SiC structures.

• 한국자기학회지
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• 제18권2호
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• pp.71-74
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• 2008

본 논문에서는 4분할 광 검출기 상에 입사된 광점의 크기에 따른 optical beam deflection방식에서의 변위 측정감도의 변화에 대해 살펴보았다. 3mW의 헬륨-네온 레이저를 사용하여 optical beam deflection방식의 광학적 변위 측정 장치를 제작하였으며 광 검출기에 도달하는 광점의 크기를 변화시켜가며 제작된 변위 측정 장비가 나타내는 변위 측정감도를 관찰하였다. 또한 광 검출기에 도달하는 optical beam power를 원형의 균일한 분포를 지닌 광점으로 설정하여 광점 크기의 변화에 따른 변위 측정감도를 계산하였다. 측정된 결과와 계산을 통하여 검출기 상에 입사하는 광점의 크기가 작을수록 변위 측정감도가 증가함을 알 수 있었으며 이는 나노미터 급의 변위측정 장비 개발에 있어 광 검출기에 도달하는 광점의 크기를 최소화함으로써 변위 측정감도를 최적화 할 수 있음을 나타낸다.

• 한국전기전자재료학회논문지
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• 제26권10호
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• pp.754-759
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• 2013

Aluminum oxide($Al_2O_3$) film deposited by atomic layer deposition (ALD) is known to supply excellent surface passivation properties on crystalline Si surfaces. Since $Al_2O_3$ has fixed negative charge, it forms effective surface passivation by field effect passivation on the rear side in p-type silicon solar cell. However, $Al_2O_3$ layer formed by ALD process needs very long process time, which is not applicable in mass production of silicon solar cells. In this paper, plasma-assisted ALD(PA-ALD) was applied to form $Al_2O_3$ to reduce the process time. $Al_2O_3$ synthesized by ALD on c-Si (100) wafers contains a very thin interfacial $SiO_2$ layer, which was confirmed by FTIR and TEM. To improve passivation quality of $Al_2O_3$ layer, the deposition temperature was changed in range of $150{\sim}350^{\circ}C$, then the annealing temperature and time were varied. As a result, the silicon wafer with aluminum oxide film formed in $250^{\circ}C$, $400^{\circ}C$ and 10 min for the deposition temperature, the annealing temperature and time, respectively, showed the best lifetime of 1.6ms. We also observed blistering with nanometer size during firing of $Al_2O_3$ deposited on p-type silicon.

• 대한기계학회논문집B
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• 제23권11호
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• pp.1379-1389
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• 1999

A new technique for control of size and shape of flame-made particles is Introduced. The characteristic sintering time can be controlled Independently of collision time by heating the particles with irradiation of laser because the sintering time strongly depends on temperature. A coflow oxy-hydrogen diffusion flame burner was used for $SiCl_4$ conversion to silica particle. Nanometer sized aggregates irradiated by a high power CW $CO_2$ laser beam were rapidly heated up to high temperatures and then were sintered to approach volume-equivalent spheres. The sphere collides much slower than the aggregate, which results in reduction of sizes of particles maintaining spherical shape. Light scattering of Ar ion laser and TEM observation using a local sampling device were used to confirm the above effects. When the $CO_2$ laser was irradiated at low position from the burner surface, particle generation due to gas absorption of laser beam occurred and thus scattering intensity increased with $CO_2$ laser power. At high irradiation position, scattering intensity decreased with $CO_2$ laser power and TEM image showed a clear mark of evaporation and recondensation of particles for high $CO_2$ laser power. When the laser was irradiated between the above two positions where small aggregates exist, average size of spherical particles obviously decreased to 58% of those without $CO_2$ laser irradiation with the spherical shape. Even for increased carrier gas flow rate by a factor of three, TEM photograph also revealed considerable reduction of particle size.

• 대한기계학회논문집A
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• 제34권12호
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• pp.1849-1856
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• 2010

유리/레진/유리의 샌드위치 구조는 자동차, 바이오, 디스플레이 산업 등에서 이미 상용화되고 있는 구조이다. 이러한 유리/레진/유리의 샌드위치 구조는 최근 반도체, MEMS분야 등에서 대량생산기술로 관심을 일으키고 있는 임프린트 리소그래피 공정에서도 다루어지고 있다. 나노 임프린트 공정 기술은 몰드의 마이크로, 나노패턴을 기판에 반복적으로 전사함으로써 반도체 제조공정에서 5나노미터(nm) 이하의 선폭까지 구현할 수 있는 기술이다. 이 과정에서 사용되는 레진은 패터닝된 몰드에 의해 변형되고 UV(Ultraviolet rays)에 의해 경화되어 패턴의 전사과정을 거친다. 이 때 몰드와 기판의 이형거동은 나노 단위의 정밀한 정렬과 공정의 생산성과 직결된다. 따라서 본 연구에 서는 4점 굽힘 실험을 통해 유리/레진/유리 구조의 굽힘 강도를 측정하였고, 특히 이 과정에서 계면해방률을 도출함으로써 나노 임프린트 공정 시 몰드와 레진 층의 이형거동을 기계적 측면에서 고찰하였다.