• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.66-71
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• 2023

This paper describes a hybrid cleaning method of silicon wafer combining nano-bubble and ultrasound to remove sub-micron particles and contaminants with minimal damage to the wafer surface. In the megasonic cleaning process of semiconductor manufacturing, the cavitation induced by ultrasound can oscillate and collapse violently often with re-entrant jet formation leading to surface damage. The smaller size of cavitation bubbles leads to more stable oscillations with more thermal and viscous damping, thus to less erosive surface cleaning. In this study, ultrasonic energy was applied to the wafer surface in the DI water to excite nano-bubbles at resonance to remove contaminant particles from the surface. A patented nano-bubble generator was developed for the generation of nano-bubbles with concentration of 1×10⁹ bubbles/ml and nominal nano-bubble diameter of 150 nm. Ultrasonic nano-bubble technology improved a contaminant removal efficiency more than 97% for artificial nano-sized particles of alumina and Latex with significant reduction in cleaning time without damage to the wafer surface.

• Korean Journal of Materials Research
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• v.21 no.12
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• pp.690-696
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• 2011

In this study, nano-sized tin oxide powder with an average particle size of below 50 nm is prepared by the spray pyrolysis process. The influence of air pressure on the properties of the generated powder is examined. Along with the rise of air pressure from $0.1kg/cm^2$ to $3kg/cm^2$, the average size of the droplet-shaped particles decreases, while the particle size distribution becomes more regular. When the air pressure increases from $0.1kg/cm^2$ to $1kg/cm^2$, the average size of the dropletshaped particles, which is around 30-50 nm, shows hardly any change. When the air pressure increases up to $3kg/cm^2$, the average size of the droplet-shaped particles decreases to 30 nm. For the independent generated particles, when the air pressure is at $0.1kg/cm^2$, the average particle size is approximately 100 nm; when the air pressure increases up to $0.5kg/m^2$, the average particle size becomes more than 100 nm, and the surface structure becomes more compact; when the air pressure increases up to $1kg/cm^2$, the surface structure is almost the same as in the case of $0.5kg/cm^2$, and the average particle size is around 80- 100 nm; when the air pressure increases up to $3kg/cm^2$, the surface structure becomes incompact compared to the cases of other air pressures, and the average particle size is around 80-100 nm. Along with the rise of air pressure from $0.1kg/cm^2$ to $0.5kg/cm^2$, the XRD peak intensity slightly decreases, and the specific surface area increases. When the air pressure increases up to $1kg/cm^2$ and $3kg/cm^2$, the XRD peak intensity increases, while the specific surface area also increases.

• Korean Journal of Materials Research
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• v.21 no.6
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• pp.327-333
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• 2011

Nanostructured cobalt materials have recently attracted considerable attention due to their potential applications in high-density data storage, magnetic separation and heterogeneous catalysts. The size as well as the morphology at the nano scale strongly influences the physical and chemical properties of cobalt nano materials. In this study, cobalt nano particles synthesized by a a polyol process, which is a liquid-phase reduction method, were investigated. Cobalt hydroxide ($Co(OH)_2$), as an intermediate reaction product, was synthesized by the reaction between cobalt sulphate heptahydrate ($CoSO_4{\cdot}7H_2O$) used as a precursor and sodium hydroxide (NaOH) dissolved in DI water. As-synthesized $Co(OH)_2$ was washed and filtered several times with DI water, because intermediate reaction products had not only $Co(OH)_2$ but also sodium sulphate ($Na_2SO_4$), as an impurity. Then the cobalt powder was synthesized by diethylene glycol (DEG), as a reduction agent, with various temperatures and times. Polyvinylpyrrolidone (PVP), as a capping agent, was also added to control agglomeration and dispersion of the cobalt nano particles. The optimized synthesis condition was achieved at $220^{\circ}C$ for 4 hours with 0.6 of the PVP/$Co(OH)_2$ molar ratio. Consequently, it was confirmed that the synthesized nano sized cobalt particles had a face centered cubic (fcc) structure and with a size range of 100-200 nm.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1684-1689
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• 2003

Dielectric Barrier Discharges (DBD) in oxygen and air are well established for the production of large quantities of ozone and are more recently being applied to a wider range of after treatment processes for HAPs(Hazardous Air Pollutants). The potential use as a charger for particle collection are not well known. In this work, we measured charge distribution of nanometer or submicron sized particles passing through the dielectric barrier discharge reactor. The bipolar charge characteristics of particles passing DBD reactor were investigated. Fluorometric method using uranine particles and a fluorometer was employed to examine the bipolar charging characteristics of the charged particles by DBD reactor. Finally, the charge distributions of particles were determined from the electrical mobility classification using DMA.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.31.2-31.2
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• 2011

We studied a method of manufacturing an anode to restrict contraction in reducing NiO/YSZ by uniformly mixing. In order to mix Ni and YSZ, a sub-micron Ni core surface was coated at high-speed by a mixture of nano-sized YSZ and a spherical core-shell was subsequently formed. The micron-sized core-shell anode powder was then heat treated at $400{\sim}1,450^{\circ}C$ in an air atmosphere and Ni was extruded and synthesized in nano-size. Subsequently, when the nano-sized mixture of the anode was heat treated and maintained at a temperature of $1,450^{\circ}C$, the anode was manufactured, where Ni and YSZ were uniformly distributed with the nano-structure. According to the nano-sized anode powder synthesis process, Ni particles were oxidized at $400{\sim}500^{\circ}C$ and became spherical by surface tension. In the case of the spherical core Ni powder, the heat treatment temperature rose to $1,250^{\circ}C$ and then a gap between the internal and external pressures occurred due to thermal and tensile stresses. A crack subsequently appeared on the surface, and the heat treatment temperature was increased continuously to increase the pressure gap and then the core Ni extruded as a nano-sized powder, Ni and YSZ uniformly distributed. It was found that the anode of 50~200 nm with a consistent structure obtained in this study has electric conductivity that is approximately 3 times larger than that of a commercial anode.

• Nuclear Engineering and Technology
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• v.53 no.9
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• pp.3051-3057
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• 2021

The concrete is considered as an important radiation shielding material employed widely in nuclear reactors, particle accelerators, laboratory hot cells and other different radiation sources. The present research is dedicated to the shielding properties study of the ordinary concrete reinforced with different weight fractions of lead oxide micro/nano particles. Lead oxide particles were fabricated by chemical synthesis method and their properties including the average size, morphological structure, functional groups and thermal properties were characterized by XRD, FESEM-EDS, FTIR and TGA analysis. The gamma ray mass attenuation coefficient of concrete composites has been calculated and measured by means of the Monte Carlo simulation and experimental methods. The simulation process was based on the use of MCNP Monte Carlo code where the mass attenuation coefficient (μ/ρ) has been calculated as a function of different particle sizes and filler weight fractions. The simulation results showed that the employment of the lead oxide filler particles enhances the mass attenuation coefficient of the ordinary concrete, drastically. On the other hand, there are approximately no differences between micro and nano sized particles. The mass attenuation coefficient was increased by increasing the weight fraction of nanoparticles. However, a semi-saturation effect was observed at concentrations more than 10 wt%. The experimental process was based on the fabrication of concrete slabs filled by different weight fractions of nano lead oxide particles. The mass attenuation coefficients of these slabs were determined at different gamma ray energies using ²²Na, ¹³⁷Cs and ⁶⁰Co sources and NaI (Tl) scintillation detector. The experimental results showed that the HVL parameter of the ordinary concrete reinforced with 5 wt% of nano PbO particles was reduced by 64% at 511 keV and 48% at 1332 keV. Reasonable agreement was obtained between simulation and experimental results and showed that the employment of nano PbO particles is more efficient at low gamma energies up to 1Mev. The proposed concrete is less toxic and could be prepared in block form instead of toxic lead blocks.

• Bulletin of the Korean Chemical Society
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• v.33 no.7
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• pp.2133-2139
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• 2012

A new system using $TiO_2$ (nano-sized, band-gap 3.14 eV)-impregnated spherical ZnS (micro-sized, band-gap 2.73 eV) nano/micro-composites (Ti 0.001, 0.005, 0.01, and 0.05 mol %/ZnS) was developed to enhance the production of hydrogen from methanol/water splitting. The ZnS particles in a spherical morphology with a diameter of about 2-4 mm which can absorb around 455 nm were prepared by hydrothermal method. This material was used as a photocatalyst with loading by nano-sized $TiO_2$ (20-30 nm) for hydrogen production. The evolution of $H_2$ from methanol/water (1:1) photo splitting over the $TiO_2$/ZnS composite in the liquid system was enhanced, compared with that over pure $TiO_2$ and ZnS. In particular, 1.2 mmol of $H_2$ gas was produced after 12 h when 0.005 mol % $TiO_2$/ZnS nano/micro-composite was used. On the basis of cyclic voltammeter (CV) and UV-visible spectrums results, the high photoactivity was attributed to the larger band gap and the lower LUMO in the $TiO_2$/ZnS composite, due to the decreased recombination between the excited electrons and holes.

• Journal of Powder Materials
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• v.11 no.6 s.47
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• pp.467-471
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• 2004

In order to fabricate a high density sintered body of ITO, nano-sized ITO powders were synthesized by coprecipitation methods. Aqueous solutions of indium and tin salts were mixed and coprecipitated by changing their pH. Coprecipitated ITO powders possessed 20-30 nm crystallite size and a relatively high BET value ($35m^2/g$), however, aggregation of particles were occurred. Therefore, a novel recrystallization technique was applied in order to eliminate the aggregates. The recrystallized ITO material consists of a little bit larger needlelike crystals, $20nm{\times}80nm$, and it possesses a higher BET value $(57m^{2}/g)$ compared to the plain coprecipitated material $(35m^{2}/g)$. Metastable phase formation and higher content of aggregated particles were observed in the coprecipitated materials. Densification was 95% to 98% complete after 5 hour sintering at $1500^{\circ}C$ for the recrystallized powders while densities of the coprecipitated powders were below 75%.

• Corrosion Science and Technology
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• v.5 no.1
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• pp.23-26
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• 2006

Recent development of ultrafine grained (UFG) low carbon steels by using equal channel angular pressing (ECAP) and their room temperature tensile properties are reviewed, focusing on the strategies overcoming their inherent mechanical drawbacks. In addition to ferrite grain refinement, when proper post heat treatments are imposed, carbon atom dissolution from pearlitic cementite during ECAP can be utilized for microstructural modification such as uniform distribution of nano-sized cementite particles or microalloying element carbides inside UFG ferrite grains and fabrication of UFG ferrite/martensite dual phase steel. The utilization of nano-sized particles is effective on improving thermal stability of UFG low carbon ferrite/pearlite steel but less effective on improving its tensile properties. By contrast, UFG ferrite/martensite dual phase steel exhibits an excellent combination of ultrahigh strength, large uniform elongation and extensive strain hardenability.

• Korean Journal of Materials Research
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• v.15 no.12
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• pp.818-823
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• 2005

Sub-micron colloidal silica particles coated with nano-sized ceria were prepared by mixing of its silica and cerium salts hydrolysis, and modified by hydrothermal reaction. By using the slurries with and without hydrothermal modification containing above particles, oxide film coated on silicon wafer was polished. The modified slurries had higher polish rate due to increase of ceria fraction to silica through hydrothermal reaction. They revealed higher stability in wide range of pH $2\~10$ than ceria coated silica slurries without its modification.