• 제목/요약/키워드: multilayer thin films

검색결과 222건 처리시간 0.041초

$La_{2/3}Sr_{1/3}MnO_3/BaFe_{12}O_{19}/SiO_2/Si(001)$ 입상형 다층박막 구조에서 강자성 $BaFe_{12}O_{19}$ 중간층이 저 자장 터널형 자기저항 특성에 미치는 영향 (The Influence of Ferromagnetic $BaFe_{12}O_{19}$ Layer for Low-Field Tunnel-Type Magnetoresistance on $La_{2/3}Sr_{1/3}MnO_3/BaFe_{12}O_{19}/SiO_2/Si(001)$ Granular-Type Multilayer Thin Films)

  • 심인보;안성용;이희민;유홍주;김철성;최세영
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2001년도 추계연구발표회 논문개요집
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    • pp.48-49
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    • 2001
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Bias voltgae에 따른 TiCrAlSiN 코팅막의 미세구조 분석 (Microstructural Characterization of TiCrAlSiN Thin Films Deposited with Various Bias Voltages)

  • 이재욱;이정용;;김선규
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2007년도 춘계학술발표회 초록집
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    • pp.122-123
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    • 2007
  • Bias voltage를 달리하여 cathodic arc plasma 방법으로 Si 기판 위에 성장시킨 TiCrAlSiN 코팅막의 미세구조를 투과전자현미경으로 관찰하였다. -200 V에서 0 V로 bias voltage가 변화함에 따라 'nano-multilayered' 구조가 무너지면서 '주상형(columnar)'구조로 코팅막의 미세구조가 변함을 알 수 있었고, EDS line scan을 통해 multilayer의 화학적 조성 변화를 확인하였다.

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전착법으로 제작한 ZnO 다층박막 제작과 특성 분석 (Characteristics of ZnO Multi-Layer Film Fabricated by Electrodeposition Method)

  • 이행자;박경희;김종민;장상목
    • 한국전기전자재료학회논문지
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    • 제30권11호
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    • pp.705-709
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    • 2017
  • Effective surface area and morphology of a sensitive thin film are important factors for its applications in sensor systems for the analysis of physical properties. In this study, we investigated the morphologies, electrochemical properties, and applicability of zinc oxide multilayer thin films fabricated by electrodeposition and annealing. The microstructure and electrochemical properties of the zinc oxide films were dependent on temperature and applied voltage. The best characteristics were obtained at an applied voltage of -1.4 V and a temperature of $50^{\circ}C$. The morphologies also changed upon annealing. The results suggest that the zinc oxide films fabricated by electrodeposition and annealing can be applied as various sensor materials.

Fractal Dimension of Magnetic Domain Walls in CoFe/Pt Multilayers

  • Lee, Kang-Soo;Kim, Dong-Hyun;Choe, Sug-Bong
    • Journal of Magnetics
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    • 제15권3호
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    • pp.99-102
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    • 2010
  • We present the fractal properties of the magnetic domain walls in $(5-{\AA}\;Co_{90}Fe_{10}/10-{\AA}\;Pt)_n$ multilayer films with perpendicular magnetic anisotropy for the number of repeats n (1 to 5). In these films, the magnetization reversed due to the domain wall propagation throughout the films with rare nucleations. As n increased, it was observed that the jaggedness of the domain walls increased noticeably, which is possibly due to the accumulation of irregularities at the layer interfaces. The jaggedness of the domain walls was analyzed in terms of the fractal dimension by use of the ruler method, and it was revealed that the fractal dimension significantly changed from $1.0{\pm}0.002$ to $1.3{\pm}0.05$ as n increased from 1 to 5.

Effect of Ni Interlayer on the Methanol Gas Sensitivity of ITO Thin Films

  • Lee, Y.J.;Huh, S.B.;Lee, H.M.;Shin, C.H.;Jeong, C.W.;Chae, J.H.;Kim, Y.S.;Kim, Daeil
    • 열처리공학회지
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    • 제23권5호
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    • pp.245-248
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    • 2010
  • Sn doped $In_2O_3$ (ITO) and ITO/Ni/ITO (INI) multilayer films were deposited on the glass substrates with a reactive magnetron sputtering system without intentional substrate heating and then the influence of the Ni interlayer on the methanol gas sensitivity of ITO and INI film sensors were investigated. Although both ITO and INI film sensors have the same thickness of 100 nm, INI sensors have a sandwich structure of ITO 50 nm/Ni 5 nm/ITO 45 nm. The changes in the gas sensitivity of the film sensors caused by methanol gas ranging from 100 to 1000 ppm were measured. It is observed that the INI film sensors show the higher sensitivity than that of the ITO single layer sensors. Finally, it can be concluded that the INI film sensor have the potential to be used as improved methanol gas sensors.

FeCo/Pd 초격자 다층박막의 자기 및 자기광학적 특성 (Magnetic and Magneto-Optical Properties of FeCo/Pd Multilayers)

  • 김진홍;신성철
    • 한국자기학회지
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    • 제3권1호
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    • pp.56-60
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    • 1993
  • FeCo/Pd 초격자 다층박막의 FeCo 와 Pd sublayer 두께를 각각 $2.5\;{\AA}$$10.5\;{\AA}$으로 유지시키면서 FeCo sublayer 의 Fe 조성이 0에서 100% 까지 변화함에따른 포화자화값, 수직 자기이방성에너지, 보자력 및 Kerr 회전각의 파장 의존성을 조사 하였다. 포화자화값은 Fe 조성이 48 at.%부근에서 최 고치를 보였고, 수직 자기이방성에너 및 조자력은 Fe조성의 증가에따라 단조감소 하였다. Kerr 회전각은 Fe 조성의 증가에따라 감소하였는데 그 크기 및 변화의 폭은 단파장으로 갈수록 증가하였다.

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반도체 산업용 나노기공 함유 유기실리카 박막

  • 차국헌;윤도영;이진규;이희우
    • 한국결정학회:학술대회논문집
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    • 한국결정학회 2002년도 정기총회 및 추계학술연구발표회
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    • pp.48-48
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    • 2002
  • It is generally accepted that ultra low dielectric interlayer dielectric materials (k < 2.2) will be necessary for ULSI advanced microelectronic devices after 2003, according to the International Technology Roadmap for Semiconductors (ITRS) 2000. A continuous reduction of dielectric constant is believed to be possible only by incorporating nanopores filled with air (k = 1.0) into electrically insulating matrices such as poly(methyl silsesquioxane) (PMSSQ). The nanopo.ous low dielectric films should have excellent material properties to survive severe mechanical stress conditions imposed during the advanced semiconductor processes such as chemical mechanical planarization process and multilayer fabrication. When air is incorporated into the films for lowering k, their mechanical strength has inevitably to be sacrificed. To minimize this effect, the nanopores are controlled to exist in the film as closed cells. The micromechanical properties of the nanoporous thin films are considered more seriously than ever, particularly for ultra low dielectric applications. In this study, three approaches were made to design and develop nanoporous low dielectric films with improved micromechanical properties: 1) wall density increase of nanoporous organosilicate film by copolymerization of carbon bridged comonomers; 2) incorporation of sacrificial phases with good miscibility; 3) selective surface modification by plasma treatment. Nanoporous low-k films were prepared with copolymerized PMSSQ and star-shaped sacrificial organic molecules, both of which were synthesized to control molecular weight and functionality. The nanoporous structures of the films were observed using field emission scanning electron microscopy, cross-sectional transmission electron microscopy, atomic force microscopy, and positronium annihilation lifetime spectroscopy(PALS). Micromechanical characterization was performed using a nanoindentor to measure hardness and modulus of the films.

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