• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.125-125
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• 2011

In this study, we investigated the electrical, optical, structural, and surface properties of indium zinc oxide (IZO)/Ag/IZO multilayer electrode grown by specially designed roll-to-roll sputtering system using the flexible substrate. By the continuous roll-to-roll sputtering of the bottom IZO, Ag, and top IZO layers at room temperature, they were able to fabricate a high quality IZO/Ag/IZO multilayer electrode. At optimized conditions, the bottom IZO layer (40 nm) was deposited on a flexible substrate. After deposition of the Bottom IZO layer, Ag layer was deposited onto the bottom IZO film as a function of DC power (200~500 W). Subsequently, the top IZO layer was deposited onto the Ag layer at identical deposition conditions to the bottom IZO layer (40 nm). We investigated the characteristics of IZO/Ag/IZO multilayer electrode as a function of Ag thickness. It was found that the electrical and optical properties of IZO/Ag/IZO multilayer electrode was mainly affected thickness of the Ag layer at optimized condition. In case of IZO/Ag/IZO multilayer electrode with the Ag power (350W), it exhibited a low sheet resistance of 7.1 ohm/square and a high transparency of 86.4%. Furthermore, we fabricated the touch screen panel using the IZO/Ag/IZO multilayer electrode, which demonstrate the possibility of the IZO/Ag/IZO multilayer electrode grown by roll-to-roll sputtering system as a transparent conducting layer in the touch screen panel.

• Transactions on Electrical and Electronic Materials
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• v.17 no.1
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• pp.33-36
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• 2016

In the present work, a Ni-doped indium zinc oxide (NIZO) film and its multilayers with Ag layers were investigated as transparent conducting electrodes for liquid crystal display (LCD) applications, as a substitute for indium tin oxide (ITO) electrodes. By interposing the Ag layer between the NIZO layers, the loss of the optical transmittance occurred; however, the Ag layer brought enhancement of electrical sheet resistance to the NIZO/Ag/NIZO multilayer electrode. The twisted nematic cell based on the NIZO/Ag/NIZO multilayer electrode exhibited superior electro-optical characteristics than those based on single NIZO electrode and was competitive compared to those based on the conventional ITO electrode. An LCD-based NIZO/Ag/NIZO multilayer electrode may allow new approaches to conventional ITO electrodes in display technology.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.1575-1577
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• 2009

We have investigated the characteristics of transparent indium zinc oxide(IZO)/Ag/IZO multilayer electrode grown on polyethylene terephthalate (PET) substrates using a specially designed roll-to-roll sputtering system for use in flexible device are described. By the continuous R2R sputtering of the bottom IZO, Ag, and top IZO layers at room temperature, we were able to fabricate an IZO-Ag-IZO multilayer electrode with a sheet resistance of 6.15 ${\Omega}$/square, optical transmittance of 87.4 %, and figure of merit value of 42.03 10-3 ${\Omega}$-1. In addition, the IZO-Ag-IZO multilayer electrode exhibited superior flexibility to the RTR sputter grown single ITO electrode, due to the existence a ductile Ag layer between the IZO layers. This indicates that the RTR sputtered IZO-Ag-IZO multilayer is a promising flexible electrode that can substitute for the conventional single ITO electrode grown by bath type sputtering for use in low cost flexible device, due to its low resistance, high transparency, superior flexibility and fast preparation by the R2R process.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.1
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• pp.33-38
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• 2000

In this study, multilayer piezoelectric actuators were fabricated with 75 layers by a conventional multi-layer capacitor (MLC) techniques, using 70Ag/30Pd paste as an internal electrode which can be sintered at low temperature and have cost down effect in mass productions. The multilayer piezoelectric actua-tors had no defects such as diffusions of internal electrode to ceramic bodies and shortages of internal electrodes. The multilayer piezoelectric actuators did not show the crack in the ceramics parts and the gapping phenomena in the external eletrodes when Ag paste was used as external electrodes. The multilayer piezoelectric actuators showed a maximum displacement of 4${\mu}{\textrm}{m}$ at 100V dc voltage and kept the maximum displacement constant for 300 seconds. The multilayer piezoelectric actuators showed good matching properties between ceramic bodies and AgPd internal electrodes. We confirmed the possibility of large-scaled production of the multilayer piezoelectric actuators with superior electrical properties and cost down effect using 70Ag/30Pd paste as an internal electrodes.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.11
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• pp.898-903
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• 2001

In this study, we investigated amounts, distributions and sizes of pores of multilayer piezoelectric transformer, and predicted heat emission property and electrical characteristics according to designs of internal electrode. Forming densities of device having MLC, fingered and full filled internal electrode structure were 4.73 g/㎤, 4.80 g/㎤, 4.82 g/㎤ and forming porosities were 17.3737%, 13.1475%, 12.6121%, respectively. And sintered densities of MLC structured, fingered and full filled devices were 7.76 g/㎤, 7.75 g/㎤, 7.84 g/㎤ and sintered porosities were 4.0967%, 2.7132%, 2.5317%, respectively. Therefore, we concluded that fingered and full fi1led internal electrode devices, expecially, fingered internal electrode devices had cost-effective effect and maximum poling effect due to higher sintered density and lower porosity than MLC structured device. Also we can predict that they have an effect on good heat emission and high output properties of multilayer piezoelectric transformer.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.6
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• pp.524-529
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• 2008

In this paper, in order to develop low loss multilayer actuator, piezoelectric properties of PZW-PMN-PZT multilayer actuator sintered at $900^{\circ}C$ low temperature were investigated according to the number of multilayer. The multilayer actuator was fabricated using tape casting method and used pure Ag internal electrode. The density above $8.0\;g/cm^3$ was obtained at all specimens. With increasing number of multilayer, effective electromechanical coupling factor($k_{eff}$) was increased. $k_{eff}$ of multilayer actuator shows the maximum value of 0.283 at 11 layers actuator. However, effective mechanical quality factor(Qm') was decreased according to the increase of number of multilayer. The Qm' of multilayer actuator showed the maximum value of 920 at 5 layers actuator.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.334-334
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• 2010

In order to fabricate the multilayer piezoelectric transformer by tape casting method, we investigated the effect of $TiO_2$ and PZT powder additions on the Ag/Pd electrode. Meanwhile, effects of $TiO_2$ and PZT powder additives on the microstructure and electrical properties of Ag/Pd electrode were investigated in detail. In addition, the multilayer piezoelectric transformers were fabricated and the characteristics with various load resistance were measured at resonance frequency. The voltage step-up ratio was continuously change with increasing input voltage and load resistance, and then output voltage and powers were increased with increasing input voltage at matching impedance. The temperature rise of multilayer piezoelectric transformers were increased with increasing input voltage and load resistance. Meanwhile, multilayer piezoelectric transformers sintered at $1100^{\circ}C$ show the favorable characteristics with a power of 15 W at $100\;{\Omega}$.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.339-339
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• 2013

We study on the optical and electrical properties of indium-free ZTO(ZnSnO)/Ag/ZTO (ZAZ) multilayer electrodes for the low-cost transparent electrode. In the first step, each single layer was deposited using rf magnetron in-line sputter with various working pressure based on $O_2$/$Ar+O_2$ ratio (0~3%) and power at room temperature. Secondly, we studied the optical and electrical properties by analyzing the refractive index, extinction coefficient, transmittance and resistivity of each layer. Finally, we optimized the thickness of each layer using macleod simulation program based on the analyzed optical properties and fabricated the multilayer electrode. As a result, We achieved a low sheet resistance of $11{\Omega}$/sq and anaverage transmittance of 80% in the visible region of light (380~780 nm). This indicates that indium-free ZAZ multilayer electrode is a promising low-cost and low-temperature processing electrode scheme.

• Journal of the Korean Ceramic Society
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• v.35 no.11
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• pp.1121-1129
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• 1998

Reactions between Ag-Pd internal electrode materials and{{{{ { {Bi }_{2 }O }_{3 } }} in multilayer chip varistor were in-vestigated. For more than 1 mol%{{{{ { {Bi }_{2 }O }_{3 } }} in varistor composition internal electrode structure was destroyed due to the reaction between internal electrode and{{{{ { {Bi }_{2 }O }_{3 } }} But for typical varistor compositions (below 1 mol% of{{{{ { {Bi }_{2 }O }_{3 } }} content) microstructural changes around the internal electrode were not observed. However SEM-EDS and TEM-EDS analysis showed the uneven distribution of{{{{ { {Bi }_{2 }O }_{3 } }} in the internal electrode which was due to the migration of{{{{ { {Bi }_{2 }O }_{3 } }} to the electorde during sintering. As a results the nonlinear coefficient of multilayer varistor showed very large distribution as well as the breakdown voltage.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.12
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• pp.1124-1128
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• 2005

New piezoelectric actuator design, which can reduce the number of the stacking layer without lowering the piezoelectric displacement, is suggested in this work. Each layer of the new designed multilayer actuator has the same electrode pattern as the cross-sectioned layer of the existing multilayer actuator has. The piezoelectric displacement was calculated by Finite-Element Method (FEM) analysis. The maximum piezoelectric displacement of the new-designed actuator with 13 layers was calculated to be almost same value (55.9 ${\mu}m$) as that of the existing actuator with 25 layers(60.1 ${\mu}m$).