• Title/Summary/Keyword: multi-layer structure

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Trans-disciplinary Approach to Molecular Modeling and Experiment in PDP Materials

  • Takaba, Hiromitsu;Serizawa, Kazumi;Onuma, Hiroaki;Kikuchi, Hiromi;Suzuki, Ai;Sahnoun, Riadh;Koyama, Michihisa;Tsuboi, Hideyuki;Hatakeyama, Nozomu;Endou, Akira;Carpio, Carlos A. Del;Kubo, Momoji;Kajiyama, Hiroshi;Miyamoto, Akira
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.1441-1444
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    • 2008
  • We developed ultra-accelerated quantum chemical molecular dynamics and spectroscopic characterization simulators for development of PDP materials. By combination of these simulators, realistic structure of PDP materials is drawn on the computer. Furthermore, based on the structures, various properties such as cathode luminescence spectrum and secondary electron emission, is successfully evaluated. The strategy of "Experiment integrated Computational Chemistry" using developed simulators will presented that has the potential in being powerful tool for designing the PDP materials.

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Molecular Beam Epitaxial Growth of Oxide Single Crystal Films

  • Yoon, Dae-Ho;Yoshizawa, Masahito
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1996.06a
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    • pp.508-508
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    • 1996
  • ;The growth of films have considerable interest in the field of superlattice structured multi-layer epitaxy led to realization of new devices concepts. Molecular beam epitaxy (MBE) with in situ observation by reflection high-energy electron diffraction (RHEED) is a key technology for controlled layered growth on the atomic scale in oxide crystal thin films. Also, the combination of radical oxygen source and MBE will certainly accelerate the progress of applications of oxides. In this study, the growth process of single crystal films using by MBE method is discussed taking the oxide materials of Bi-Sr-Ca-Cu family. Oxidation was provided by a flux density of activated oxygen (oxygen radicals) from an rf-excited discharge. Generation of oxygen radicals is obtained in a specially designed radical sources with different types (coil and electrode types). Molecular oxygen was introduced into a quartz tube through a variable leak valve with mass flowmeter. Corresponding to the oxygen flow rate, the pressure of the system ranged from $1{\;}{\times}{\;}10^{-6}{\;}Torr{\;}to{\;}5{\;}{\times}{\;}10^{-5}$ Torr. The base pressure was $1{\;}{\times}{\;}10^{-10}$ Torr. The growth of Bi-oxides was achieved by coevaporation of metal elements and oxygen. In this way a Bi-oxide multilayer structure was prepared on a basal-plane MgO or $SrTiO_3$ substrate. The grown films compiled using RHEED patterns during and after the growth. Futher, the exact observation of oxygen radicals with MBE is an important technology for a approach of growth conditions on stoichiometry and perfection on the atomic scale in oxide. The oxidization degree, which is determined and controlled by the number of activated oxygen when using radical sources of two types, are utilized by voltage locked loop (VLL) method. Coil type is suitable for oxygen radical source than electrode type. The relationship between the flux of oxygen radical and the rf power or oxygen partial pressure estimated. The flux of radicals increases as the rf power increases, and indicates to the frequency change having the the value of about $2{\times}10^{14}{\;}atoms{\;}{\cdots}{\;}cm^{-2}{\;}{\cdots}{\;}S^{-I}$ when the oxygen flow rate of 2.0 seem and rf power 150 W.150 W.

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Effects of Glass Frit Addition on Microstructures and Dielectric Properties of Sintered BaTiO3 Ceramics (Glass Frit의 첨가에 따른 BaTiO3 소결체의 유전 특성 및 미세구조 변화)

  • Woo, Duck-Hyun;Yoon, Man-Soon;Son, Yong-Ho;Ryu, Sung-Lim;Ur, Soon-Chul;Kweon, Soon-Yong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.3
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    • pp.206-210
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    • 2010
  • $BaTiO_3$ dielectric ceramics are widely used to multi-layer ceramic capacitor. The $BaTiO_3$ powder was synthesized at $950^{\circ}C$ by using a solid state reaction and grinded by using a high-energy mill. And then, 2.53 wt% glass frit was added to the synthesized $BaTiO_3$ powders for lowering the sintering temperature. The mixed powders were sintered at various temperatures of $1170^{\circ}C$, $1200^{\circ}C$, $1230^{\circ}C$. Microstructures of the sintered $BaTiO_3$ ceramics were inspected by SEM and crystal structures were analyzed by XRD method. The relative dielectric constant was measured by using a impedance/gain phase analyzer. The synthesized $BaTiO_3$ powder had the tetragonal perovskite structure without secondary phase and the particle size was below 200 nm. The relative densities measured at the samples sintered at the temperature above $1200^{\circ}C$ were about 95%. The relative dielectric constant showed maximum value of 2310, which was measured in the specimen sintered at $1200^{\circ}C$. From these results, we could know that the added glass frit had effects on both lowering the sintering temperature and improving the dielectric property.

MIRIS 우주관측카메라 FM Dewar 설계

  • Cha, Sang-Mok;Mun, Bong-Gon;Jeong, Ung-Seop;Lee, Dae-Hui;Nam, Uk-Won;Park, Yeong-Sik;Lee, Chang-Hui;Park, Seong-Jun;Lee, Deok-Haeng;Ga, Neung-Hyeon;Han, Won-Yong;Park, Jang-Hyeon;Seon, Gwang-Il;Yang, Sun-Cheol;Park, Jong-O;Lee, Seung-U;Lee, Hyung-Mok;Matsumoto, Toshio
    • The Bulletin of The Korean Astronomical Society
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    • v.35 no.1
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    • pp.40.2-40.2
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    • 2010
  • MIRIS 우주관측카메라는 과학기술위성 3호의 주탑재체로서 $0.8{\sim}2.0{\mu}m$의 근적외선영역에서 우주배경복사와 우리은하 평면의 Pa-$\alpha$ survey 관측을 목적으로 한다. 이러한 임무를 수행하기 위해 MIRIS 우주관측카메라에는 MCT(HgCdTe) IR 검출기가 사용되고 6개의 필터를 장착할 수 있는 필터휠이 설계되었으며, 열잡음을 줄이고 원하는 SNR을 얻기 위해 모두 100K 이하로 냉각이 요구된다. 효과적인 냉각 및 저온유지를 위해서 외부의 열을 1차적으로 차단하는 Cryostat 외부용기와 100K 이하로 냉각되는 내부 Cold Box의 이중구조를 가지는 Dewar가 설계 되었다. 내부 Cold Box의 냉각은 소형 stirling cooler로 이루어지고 외부의 열 유입량이 Cooler의 냉각용량을 넘지 않도록 설계하였다. Cryostat 외부용기는 radiation cooling으로 냉각되어 200K 이하의 온도를 유지하며 내부 Cold Box로의 열유입을 최소화하기 위해 GFRP(Glass Fiber Reinforced Plastic) 단열 지지대와 MLI(Multi Layer Insulation)가 사용된다. 또한 100K으로 냉각시 필터고정부와 Cold Box 구조에서 일어날 수 있는 구조적인 피로도를 줄이고 열변형에 의한 문제를 방지하기 위한 고려가 설계에 포함되었다. FM(Flight Model)은 고진공 환경의 우주공간에서 문제가 발생하지 않도록 설계되었다. 또한 EQM 진동시험결과를 토대로 발사환경에서 발생하는 강한 진동을 견딜 수 있도록 FEM(Finite Elements Method) 구조해석을 통하여 필터고정부에 flexible structure 설계와 완충제를 추가하고 필터휠 구동부와 harness 고정부 및 cooler 지지부를 비롯한 전체 구조물에서 충분히 진동을 극복할 수 있도록 설계하였다.

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The Design of 2.4 GHz Band LTCC Bandpass Filter using $\lambda$/4 Hairpin Resonators ($\lambda$/4 Hairpin 공진기를 이용한 2.4 GHz 대역 LTCC 대역통과 필터의 설계)

  • Sung Gyu-Je
    • Journal of the Microelectronics and Packaging Society
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    • v.11 no.4 s.33
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    • pp.7-11
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    • 2004
  • In this paper, a $\lambda$/4 hairpin resonator is applied to reduce the size of planar resonators for a 2.4 GHz Band LTCC MLC bandpass filter. The $\lambda$/4 hairpin resonator operates as stepped impedance resonator (SIR) without changing the width of the planar resonator. It is composed of two sections those are parallel coupled line and transmission line. The characteristic impedance of two sections is different each other. The design formulas of the bandpass filter using the coupling element at the arbitrary position are derived from even and odd-mode analysis. The formulas can take account of the arbitrary coupling of lumped and/or distributed resonators. The advantage of this filter is its abilities to change freely the coupling structure between two resonators. Experimental bandpass filters for 2.4 GHz Band are implemented and their performances are shown.

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Evaluation of Biocompatibility of Anodized and Hydrothermally Treated Pure Niobium Metal (양극산화와 열수처리한 순수 니오비움 금속의 생체활성 평가)

  • Won, Dae-Hee;Choi, Un-Jae;Lee, Min-Ho;Bae, Tae-Sung
    • Journal of Technologic Dentistry
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    • v.27 no.1
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    • pp.79-88
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    • 2005
  • This study was performed to investigate the surface properties of electrochemically oxidized pure niobium by anodic oxide and hydrothermal treatment technique. Niobium specimens of $10\times10mm$ in dimension were polished sequentially from #600, #800, #1000 emery paper. The surface pure niobium specimens were anodized in an electrolytic solution that was dissolved calcium and phosphate in water. The electrolytic voltage was set in the range of 250 V and the current density was 10 $mA/cm^2$. The specimen was hydrothermal treated in high-pressure steam at 300$^{\circ}C$ for 2 hours using an autoclave. Then, specimens were immersed in the Hanks' solution with pH 7.4 at 37$^{\circ}C$ for 30 days. The surface of specimen was characterized by scanning electron microscope(SEM), energy dispersive X-ray microanalysis(EDX), potentiostat/galvanostat test, and cytotoxicity test. The results obtained was summarized as follows; According to the result of measuring corrosion behavior at 0.9% NaCl, corrosion resistance was improved more specimens treated with anodic oxide than in hydrothermal treated ones. The multi-porous oxide layer on surface treated through anodic oxidation showed a structure that fine pores overlap one another, and the early precipitation of apatite was observed on the surface of hydrothermal treated samples. According to the result of EDX after 30 days deposition in Hanks' solution, Ca/P was 1.69 in hydrothermal treated specimens. In MTT test, specimens treated through anodic oxidation and hydrothermal treated ones showed spectrophotometer similar to that of the control group. Thus no significant difference in cytotoxicity was observed (P>0.05).

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A Study on the complementary elements between department-store interior design and architectural planning (백화점의 실내디자인과 건축계획의 상호보완요소에 관한 연구)

  • 박의정;강철민
    • Proceedings of the Korean Institute of Interior Design Conference
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    • 1999.04a
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    • pp.37-44
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    • 1999
  • A number of the retail and traditional market customer is decrease, whereas that of the supermarket in department-store customers in is increase. This case suggests that customers have a preference for much more comfortable and pleasant shopping places And making a resonable purchase in the supermarkets where we can find various goods and price zone, is now garden variety. It is a current course that once the manager ask an architect for multi-functional space design in department-store and then the architect compose a team and start to design. Of course, the team of planner thinking manage give the design team the basic material data such as commerce analysis and the use of each layer in the department store but, the design team solve the assignment by architectural form, functional space plan and the limited architecture law. After establishing general design for architecture, we can ask shopping-mall distribution, products display and interior design of the interior design general design for architecture, we can ask shopping-mall distribution, products display and interior design of the interior design team. so it is inevitable that the interior design team concerning M·D can find lots of complementary factors with architecture design. The purpose of this study is analyzing the differences of architecture design, which has to accept the limited law and interior design concerning M·D, satisfying the structure and the law in the future design for the department-store. Also the purpose of this thesis is suggestion the items architects and interior designers research into together to make the inner space ideally.

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Thermoelastic effect on inter-laminar embedded delamination characteristics in Spar Wingskin Joints made with laminated FRP composites

  • Mishra, P.K.;Pradhan, A.K.;Pandit, M.K.;Panda, S.K.
    • Steel and Composite Structures
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    • v.35 no.3
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    • pp.439-447
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    • 2020
  • This paper presents two sets of full three-dimensional thermoelastic finite element analyses of superimposed thermo-mechanically loaded Spar Wingskin Joints made with laminated Graphite Fiber Reinforced Plastic composites. The study emphasizes the influence of residual thermal stresses and material anisotropy on the inter-laminar delamination behavior of the joint structure. The delamination has been pre-embedded at the most likely location, i.e., in resin layer between the top and next ply of the fiber reinforced plastic laminated wingskin and near the spar overlap end. Multi-Point Constraint finite elements have been made use of at the vicinity of the delamination fronts. This helps in simulating the growth of the embedded delamination at both ends. The inter-laminar thermoelastic peel and shear stresses responsible for causing delamination damage due to a combined thermal and a static loading have been evaluated. Strain energy release rate components corresponding to the Mode I (opening), Mode II (sliding) and Mode III (tearing) of delamination are determined using the principle of Virtual Crack Closure Technique. These are seen to be different and non-self-similar at the two fronts of the embedded delamination. Residual stresses developed due to the thermoelastic anisotropy of the laminae are found to strongly influence the delamination onset and propagation characteristics, which have been reflected by the asymmetries in the nature of energy release rate plots and their significant variation along the delamination front.

Fabrication of Film Bulk Acoustic Wave Filters with Ladder and Stacked Crystal Filter Types (Ladder 형과 SCF 형의 구조를 가지는 FBAR 필터의 제작)

  • ;;Mai Linh
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2003.10a
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    • pp.630-632
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    • 2003
  • In this paper, we present the fabrication and performance of FBAR filters with ladder and stacked crystal filter (SCF) types. The structure of the unit resonator in our work is the solidly mounted resonator (SMR) with W/SiO$_2$ multi-layer reflectors, the return loss of of which show -24dB at resonant frequency of -2.0GHz. The $K^2$eff, Q$_{s}$, and Q$_{p}$, indicating the performance of resonator were 3.24%, 6,363 and 6,749 and were calculated for the resonator with the resonance area of 21200${\mu}{\textrm}{m}$$^2$. Based on this unit resonator, FBAR filters with ladder and SCF types were fabricated and compared. The sizes of filters were 800$\times$2000(${\mu}{\textrm}{m}$$^2$) for the ladder type and 600$\times$500(${\mu}{\textrm}{m}$$^2$) for the SCF type.e..

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V-NAND Flash Memory 제조를 위한 PECVD 박막 두께 가상 계측 알고리즘

  • Jang, Dong-Beom;Yu, Hyeon-Seong;Hong, Sang-Jin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.236.2-236.2
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    • 2014
  • 세계 반도체 시장은 컴퓨터 기능이 더해진 모바일 기기의 수요가 증가함에 따라 메모리반도체의 시장규모가 최근 빠른 속도로 증가했다. 특히 모바일 기기에서 저장장치 역할을 하는 비휘발성 반도체인 NAND Flash Memory는 스마트폰 및 태블릿PC 등 휴대용 기기의 수요 증가, SSD (Solid State Drive)를 탑재한 PC의 수요 확대, 서버용 SSD시장의 활성화 등으로 연평균 18.9%의 성장을 보이고 있다. 이러한 경제적인 배경 속에서 NAND Flash 미세공정 기술의 마지막 단계로 여겨지는 1Xnm 공정이 개발되었다. 그러나 1Xnm Flash Memory의 생산은 새로운 제조설비 구축과 차세대 공정 기술의 적용으로 제조비용이 상승하는 단점이 있다. 이에 따라 제조공정기술을 미세화하지 않고 기존의 수평적 셀구조에서 수직적 셀구조로 설계 구조를 다양화하는 기술이 대두되고 있는데 이 중 Flash Memory의 대용량화와 수명 향상을 동시에 추구할 수 있는 3D NAND 기술이 주목을 받게 되면서 공정기술의 변화도 함께 대두되고 있다. 3D NAND 기술은 기존라인에서 전환하는데 드는 비용이 크지 않으며, 노광장비의 중요도가 축소되는 반면, 증착(Chemical Vapor Deposition) 및 식각공정(Etching)의 기술적 난이도와 스텝수가 증가한다. 이 중 V-NAND 3D 기술에서 사용하는 박막증착 공정의 경우 산화막과 질화막을 번갈아 증착하여 30layer 이상을 하나의 챔버 내에서 연속으로 증착한다. 다층막 증착 공정이 비정상적으로 진행되었을 경우, V-NAND Flash Memory를 제조하기 위한 후속공정에 영향을 미쳐 웨이퍼를 폐기해야 하는 손실을 초래할 수 있다. 본 연구에서는 V-NAND 다층막 증착공정 중에 다층막의 두께를 가상 계측하는 알고리즘을 개발하고자 하였다. 증착공정이 진행될수록 박막의 두께는 증가하여 커패시터 관점에서 변화가 생겨 RF 신호의 진폭과 위상의 변화가 생긴다는 점을 착안하여 증착 공정 중 PECVD 장비 RF matcher와 heater에서 RF 신호의 진폭과 위상을 실시간으로 측정하여 데이터를 수집하고, 박막의 두께와의 상관성을 분석하였다. 이 연구 결과를 토대로 V-NAND Flash memory 제조 품질향상 및 웨이퍼 손실 최소화를 실현하여 제조 시스템을 효율적으로 운영할 수 있는 효과를 기대할 수 있다.

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