• Journal of the Korean Society for Precision Engineering
• /
• v.25 no.6
• /
• pp.134-142
• /
• 2008

In this paper, we propose a precise linear motion stage supported by magnetically preloaded air bearings. The eight aerostatic bearings with rectangular carbon porous pads were located only one side of vertical direction under the platen where four bearings are in both sides of horizontal direction as wrap-around-design, and this gives simpler configuration than which constrained by air bearings for all direction. Each of the magnetic actuators has a permanent magnet generating static magnetic flux far required preload and a coil to perturb the magnetic farce resulting adjustment of air- bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder was designed and built to verify this design concept. The load capacity, stiffness and preload force were examined and compared with analysis. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed. It was shown that motion control far three DOF motions were linear and independent after calibration of the control gains.

• Transactions of Materials Processing
• /
• v.24 no.3
• /
• pp.155-160
• /
• 2015

One of the most important aspects in multi-stage shape drawing is the proper design of the intermediate dies especially to provide adequate metal distribution. In the current study, a method for designing the intermediate dies has been developed to manufacture hollow linear motion guide rails by multi-stage shape drawing. The design method is based on the modified virtual die method. The effectiveness of the proposed design method was verified by FE-simulations and experiments using Mn55Cr carbon steel. From the results of the FE-simulations and the experiments, the proposed design method led to a drawn product with a sound shape. The dimensional tolerances of the product were within the allowable specified tolerances.

• Journal of the Korean Society for Precision Engineering
• /
• v.29 no.10
• /
• pp.1110-1118
• /
• 2012

In this study, for reducing the residual vibration in high speed motion control stage, an improved 5th order polynomial motion profile was developed. When a stage is moving, the current through the motor coils has the same profile of input motion profile of acceleration, therefore the characteristics of the acceleration input profile directly affect on the performance of the amplifier that includes the current control loop. Commonly low cost amplifier and motor has a narrow current control bandwidth, therefore the proposed algorithm was designed based on this practical constraint. Simulation and experimental results showed that the proposed algorithm clearly has low residual vibration characteristics than conventional 5th order polynomial motion profile on the same drive condition.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2006.10a
• /
• pp.671-672
• /
• 2006

• Proceedings of the KIEE Conference
• /
• 2005.07d
• /
• pp.2809-2811
• /
• 2005

In this paper, we address an active vibration control system, which suppresses the vibration engaged by magnetically levitated stage. The stage system consists of a levitating platen with four permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion via the vertical and horizontal forces. In the stage system, which represents the settling-time critical system, the motion of the platen vibrates mechanically. We designed an active vibration control system for suppressing vibration due to the stage moving. The command feedforward with inertial feedback algorithm is used for solving stage system's critical problems. The components of the active vibration control system are accelerometers for detecting stage tables's vibrations, a digital controller with high precise signal converters, and electromagnetic actuators.

• Journal of the Semiconductor & Display Technology
• /
• v.6 no.4
• /
• pp.23-27
• /
• 2007

Rotary stages in semiconductor, display industry and many other fields require challenging accuracy to perform their functions properly. Especially, Axis of rotation error on rotary system is significant; such as the spindle error motion of the aligner, wire bonder and inspector machine which result in the poor quality products. To evaluate and improve the performance of such precision rotary stage, undesired movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed. In this paper, we have measured the three translations and two tilt motions of the worm gear type spindle with high precision capacitive sensors. To obtain the radial error motion, we have used Donaldson's reversal technique. And the axial components of the spindle tilt error motion can be obtained accurately from the axial direction outputs of sensors by Estler face motion reversal technique. Further more we have designed and developed the sensor mounting jig with standard cylinder for reversal method.

• Journal of Institute of Control, Robotics and Systems
• /
• v.5 no.5
• /
• pp.630-639
• /
• 1999

To achieve fast loading and unloading of containers from a container ship, quick suppression of the remaining sway motion of the container at the end of each trolley stroke is crucial. Due to the pendulum motion of the container and disturbances like sind, residual sway always exists at the end of trolley movement. In this paper, the sway-control problem of a container crane is investigated. A two-stage control is proposed. The first stage is a time optimal controlfor the purpose of fast trolley traveling. The second stage is a nonlinear control for the quick suppression of residual sway, which starts right after the first stage while lowering the container. The nonlinear control is investigated in the perspective of controlling an underatuated mechanical system, which combines partial feedback linearization to account for the known nonlinearities as much as possible, and variable structure control to account for the unmodeled dynamics and disturbances. Simulation and experimental results are provided.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2013.10a
• /
• pp.730-735
• /
• 2013

This paper contains various vibration analysis of multi-stage shaft shape such as the bending, torsional and axial vibration. The shaft system is modeled as Timoshenko beam with the transverse shear and rotary inertia effect and the equation of motion is derived by Hamilton's principle with considering clamped-free boundary condition. Then, eigenvalue problem of discrete equation of motion for multi-stage shaft model is solved and got results of the natural frequency through the numerical analysis. Obtained numerical analysis results through Matlab program were compared with those of FEM analysis to verify the results. This study suggests that design of shaft system be consider torsional and axial vibration as well as bending vibration.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2013.05a
• /
• pp.583-584
• /
• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2013.05a
• /
• pp.679-680
• /
• 2013