• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.128-131
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• 2007

As the minimum feature size decrease, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT. Charged monodisperse particles are generated using scanning mobility particle sizer (SMPS) and deposited on the wafer by electrostatic force. The experimental results agreed with the simulation results well. We calculate the particles loss in pipe flow theoretically and compare with the experimental results.

• Journal of the Korean Applied Science and Technology
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• v.21 no.4
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• pp.380-387
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• 2004

The preparation of $CaSO_4$ nanoparticle by vesicles formed spontaneously in cationic OTAC and anionic ADS mixed surfactant solution whose ratio is 0.3/0.7 is investigated. Added electrolytes for preparing nanoparticles reduce vesicle size about 200-300 nm comparing with that of pure vesicle whose size is 700-800 nm by DLS. The core of vesicles has 200 nm size and acts as nanoreactors which same size of monodisperse $CaSO_4$ nanopaticles are formed. Although $CaSO_4$ particles are formed at the outer of vesicles, they are very large and amorphous. The formed particles are identified with XRD analysis after separation due to coinciding with $CaSO_4$ particles.

• Applied Chemistry for Engineering
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• v.9 no.6
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• pp.846-851
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• 1998

An experimental research on the preparation of zinc oxide fine particles in w/o emulsions was conducted. Precipitation solutions were zinc nitrate aqueous solutions with hexamethylenetetramine(HMTA) as precipitant. The precipitation solutions formed stable w/o emulsions with kerosine in the presence of Span 80. Homogeneous precipitation reaction occurred in the w/o emulsion after the resultant w/o emulsion was heated above the decomposition temperature of HMTA and zinc oxide particles were precipitated. In some case, zinc oxide particles of bi-modal distribution were obtained. However, zinc oxide fine particles of narrow particle size distribution could be obtained, even when the initial zinc concentration of precipitation solution and the conversion to zinc oxide are both higher that those in bulk homogeneous precipitation.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.12
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• pp.1734-1743
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• 2003

Aerosol generator using an electrically heated tube furnace is a stable apparatus to supply nanometer sized aerosols by using the evaporation and condensation processes. Using this method, we can generate highly concentrated polydisperse aerosols with relatively narrow size distribution. In this work, characteristics of particle size distribution, generated from a tube furnace, were experimentally investigated. We evaluated effects of several operation parameters on particle generation: temperature in the tube furnace, air flow rates through the tube, size of boat containing solid sodium chloride(NaCl). As the temperature increased, the geometric mean diameter increased and the total number concentration also increased. Dilution with air affected the size distribution of the particles due to coagulation. A smaller sized boat, which has small surface area to contact with air, brings smaller particles of narrow size distribution in comparison of that of a larger boat. Finally, we changed the electrical mobility diameter of aggregate sodium chloride particles by varying relative humidity of dilution air, and obtained non-aggregate sodium chloride particles, which are easy to generate exact monodisperse particles.

• Journal of the Korean Vacuum Society
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• v.7 no.3
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• pp.261-266
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• 1998

Since the particles are highly charged in process plasmas, the dynamics of the particles are concerned principally with the effect of the charging amount and polarity. In order to investigate the charging effect of the particles in the plasmas, the known sizes of the mono-dispersed particles with 0.05$\mu\textrm{m}$, 0.07$\mu\textrm{m}$, 0.1$\mu\textrm{m}$and 0.2$\mu\textrm{m}$ diameter are introduced into the DC air-plasmas. The characteristics of the charged particles are measured with a Faraday cup. Results show that the particle charging polarity depends on the concentrations and sizes of the particles and the condition of plasma generation, operating pressure, and power. It is also found that the number of charges per a particle is in the ranges of $10^3$~$ 10^5$.

• Particle and aerosol research
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• v.10 no.1
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• pp.27-31
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• 2014

A simple bimodal model has been developed to analyze charged particle coagulation by modifying previously suggested bimdal model for evolution of particle generation and growth. In the present model, two monodisperse modes are used and 40 charge nodes are assigned to each mode to account both change of the particle size and charge distribution. In addition, we also implemented the effect of electrostatic dispersion loss in the present model. Based on the developed model, we analyzed coagulation of asymmetric bipolar charged particles by computing evolutions of particle number concentration, geometric mean diameter of particles, charge asymmetric ratio and geometric standard deviation of particle size distribution for various initial charge asymmetric ratios. The number concentration of asymmetric bipolar charged particles decreases faster than that of neutral particles but that does not give faster growth of particles since the electrostatic dispersion loss overwhelms particle growth by coagulation.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.3
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• pp.315-323
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• 2004

An electrical cascade impactor is a multi-stage impaction device to separate airborne particles into aerodynamic size classes using particle charging and electrical detection techniques. A Faraday cage and an aerosol charger, which are basic components of the electrical cascade impactor, were designed and evaluated in this study. The low-level current response of the Faraday cage was investigated with changing particle size and air flow rate by using sodium chloride (NaCl) particles. The response of the prototype Faraday cage was very similar to that of a commercial aerosol electrometer (TSI model 3068) within ${\pm}$5% for singly-charged particles. The response linearity of the prototype Faraday cage could be extended up to flow rate of 30 L/min. For the performance evaluation of the aerosol charger the monodisperse liquid dioctyl sebacate (DOS) particles, with diameters of 0.1∼0.8$\mu\textrm{m}$, were generated using spraying from an atomizer followed by evaporation-condensation process. Typical performance parameters of the aerosol charger such as P$.$n, wall loss, and elementary charges per particle were evaluated. The performance of the prototype aerosol charger was found to be close to that of the aerosol charger used in an electrical low pressure impactor (ELPI, Dekati).

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.6
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• pp.760-768
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• 2000

Filter efficiency of electrically charged particle in uncharged fibrous filter was measured. In previous studies, the effect of charged particle on filter efficiency was investigated but there was difficulty in measuring of image effect that is appeared at the charged small particle. We could easily measure the image effect with charging small particles by photoelectric charging. The spark discharge aerosol generator and a differential mobility analyzer (DMA) were used to generate sub-micron monodisperse particles (${\leq}200$ nm). The generated particles were charged in photoelectric charging process using ultraviolet lamp and electric field. The filter efficiency of the charged particles, classified by another DMA, was measured in filter tester using a condensation nucleus counter (CNC) as function of particle diameter, particle charge and airflow velocity. It is shown that the filter efficiency increases with increasing charge number of the particle and is affected by particle size and flow velocity. Single fiber filter efficiency mainly depends on image force parameter and peclet number. The peclet number was not considered at previous other papers. We propose a modi fied experimental correlation as function of image force parameter and peclet number.

• Applied Chemistry for Engineering
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• v.21 no.1
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• pp.34-39
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• 2010

Methacryloxypropyltrimethoxysilane (MPTMS) was used for the surface modification of silica nanoparticles in the toluene dispersion system for 8 h (MPSN). Then, methacryloxypropyl-modified silica nanoparticles were successfully prepared by solutioun polymerization in the ethanol solution at $60^{\circ}C$ for 14 h with adding AIBN initiator. The modification of ultra-fine particles (SiOx-PAA nanospheres) was investigated via EA, XPS, FTIR, TGA, SEM and TEM. The mean diameter of the bare silica nanoparticles, MPSN and SiOx-PAA monodisperse nanoparticles was about 25, 30 and 35 nm, respectively.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3168-3172
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• 2007

As the minimum feature size decreases, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT and designed a particle deposition system which consists of scanning mobility particle sizer (SMPS) and deposition chamber. Charged monodisperse particles are generated using SMPS and deposited on the wafer by electrostatic force. The experimental results agreed with the simulation results well in terms of particle number and deposition area according to particle size, flow rate and deposition voltage.