Modeling and optimal control input tracking using neural network and genetic algorithm in plasma etching process (유전알고리즘과 신경회로망을 이용한 플라즈마 식각공정의 모델링과 최적제어입력탐색)
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- The Transactions of the Korean Institute of Electrical Engineers
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- v.45 no.1
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- pp.113-122
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- 1996