• 제목/요약/키워드: microwave surface resistance

검색결과 56건 처리시간 0.019초

EACVD법에 의한 고속도강에의 c-BN박막형성 및 특성에 관하여 (The Characteristics of c-BN Thin Films on High Speed Steel by Electron Assisted Hot Filament C.V.D Systems)

  • 이건영;최진일
    • 한국표면공학회지
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    • 제39권3호
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    • pp.87-92
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    • 2006
  • The characteristic of interface layer and the effect of bias voltage on the microstructure of c-BN films were studied in the microwave plasma hot filament C.V.D process. c-BN films were deposited on a high speed steel(SKH-51) substrate by hot filament CVD technique assisted with a microwave plasma to develop a high performance of resistance coating tool. c-BN films were obtained at a gas pressure of 20 Torr, vias voltage of 300 V and substrate temperature of $800^{\circ}C$ in $B_2H_6-NH_3-H_2$ gas system. It was found that a thin layer of hexagonal boron nitride(h-BN) phase exists at the interface between c-BN layer and substrate.

루타일이 삽입된 유전체 공진기의 두 공진 모드를 이용한 루타일의 유전손실과 $YBa_2Cu_3O_{7-{\delta}}$ 박막의 마이크로파 표면저항 측정 (Simultaneous Measurements of the Loss Tangent of Rutile ($TiO_2$) and the Microwave Surface Resistance of $YBa_2Cu_3O_{7-{\delta}}$ Films using Two Resonant Modes of Rutile -loaded cavity Resonator)

  • 임준;이재훈;김민정;허정;이상영
    • Progress in Superconductivity
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    • 제4권2호
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    • pp.137-143
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    • 2003
  • In measuring the microwave surface resistance of high-Tc superconductor (HTS) films using the dielectric-loaded cavity resonator method, one of the most important factors that limit the measurement sensitivity is the measurement error in the loss tangent ($tan\delta$) of the dielectric rod placed inside the cavity. We have measured the effective surface resistance ( $R_{S}$ $^{eff}$) of$ YBa_2$$_Cu3$$_{7-{\delta}}$ (YBCO) films and the $tan\delta$ of rutile ($TiO_2$) using the 'two-tone'method suggested by Kobayashi et at. [IEEE, MTT-S Digest, 495, (2001)], which enables simultaneous measurements of both the $R_{S}$ $^{eff}$ fof HTS films and the $tan\delta$ of the rutile with high sensitivity. A rutile-loaded cavity resonator with the $TE_{012}$ and $TE_{021}$ resonant frequencies at 13.67 - 14.01 GHz is used for this purpose. At temperatures where the two modes do not couple with other modes, the $R_{S}$ $^{eff}$ of YBCO films and $tan\delta$ of rutile measured by the two-tone method appear to match well with the corresponding values measured using the reported $tan\delta$ values of sapphire within 10 %. Usefulness of the 'two-tone' method for microwave characterization of HTS films and dielectrics is discussed.d.ielectrics is discussed.ussed.

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ITO박막/세라믹유전체 구조의 이동통신 주파수대역용 박형 전파흡수체의 설계 및 제조 (Design and Fabrication of Thin Microwave Absorbers of ITO/Dielectric Structures Used for Mobile Telecommunication Frequency Bands)

  • 윤여춘;김성수
    • 한국재료학회지
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    • 제13권4호
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    • pp.259-265
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    • 2003
  • For the aim of thin microwave absorbers used in mobile telecommunication frequency band, this study proposed a high permittivity dielectrics(λ/4 spacer) coated with ITO thin films of 377 $\Omega$/sq(impedance transformer). High frequency dielectric properties of ferroelectric ceramics, electrical properties of ITO thin films and microwave absorbing properties of ITO/dielectrics were investigated. Ferroelectric materials including $BaTiO_3$(BT), 0.9Pb($Mg_{1}$3/Nb$_{2}$3/)$O_3$-0.1 $PbTiO_3$(PMN-PT), 0.8 Pb (Mg$_{1}$3/$Nb_{2}$3/)$O_3$-0.2 Pb($Zn_{1}$3$_Nb{2}$3/)$O_3$(PMN-PZN) were prepared by ceramic processing for high permittivity dielectrics,. The ferroelectric materials show high dielectric constant and dielectric loss in the microwave frequency range. The microwave absorbance (at 2 ㎓) of BT, 0.9PMN-0.1PT, and 0.8PMN-0.2PZN were found to be 60%(at a thickness of 3.5 mm), 20% (2.5 mm), and 30% (2.5 mm), respectively. By coating the ITO thin films on the ferroelectric substrates with λ/4 thickness, the microwave absorbance is greatly improved. Particularly, when the surface resistance of ITO films is closed of 377 $\Omega$/sq, the reflection loss is reduced to -20 ㏈(99% absorbance). This is attributed to the wave impedance matching controlled by ITO thin films at a given thickness of high permittivity dielectrics of λ/4 (3.5 mm for BT, 2.5 mm for PMN-PT and PMN-PZN at 2 ㎓). It is, therefore, successfully proposed that the ITO/ferroelectric materials with controlled surface resistance and high dielectric constant can be useful as a thin microwave absorbers in mobile telecommunication frequency band.

전기이중층캐패시터에서 마이크로파에 의해 개질된 활성탄소전극의 전기화학적 특성 (Electrochemical Characteristics of the Activated Carbon Electrode Modified with the Microwave Radiation in the Electric Double Layer Capacitor)

  • 선진규;엄의흠;이철태
    • 공업화학
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    • 제21권1호
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    • pp.11-17
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    • 2010
  • 유기용액계 전해질을 갖는 전기이중층캐패서터의 성능향상을 위해 마이크로파 처리를 통하여 활성탄소를 개질하고 이에 따른 전기화학적 특성의 변화를 조사하였다. 대상 시료로 petroleum cokes와 pitch cokes를 사용하여 NaOH 활성화에 의해 제조한 활성탄과 시판용 활성탄 BP-25를 사용하였다. 세 종류의 활성탄 모두 마이크로파 처리를 통해 산소를 포함하는 친수성관능기들이 표면으로부터 제거되었으며, 처리 시간이 증가함에 따라 비표면적과 세공부피는 감소하고, 평균세공직경은 증가하였다. 이러한 영향으로 표면 개질된 활성탄소로 제조한 전기이중층캐패시터는 계면저항이 개질하지 않은 활성탄소를 사용한 전기이중층 캐패서터에 비해 크게 감소하였으며, 비표면적의 감소에도 불구하고 방전용량은 개질하지 않은 경우보다 크게 증가하였다.

Enhanced Electrical Conductivity of Gold Doped Graphene Films by Microwave Treatment

  • Kim, Yoo-Seok;Song, Woo-Seok;Cha, Myoung-Jun;Lee, Su-Il;Cho, Ju-Mi;Kim, Sung-Hwan;Park, Chong-Yun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.188-188
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    • 2012
  • Graphene, with its unique physical and structural properties, has recently become a proving ground for various physical phenomena, and is a promising candidate for a variety of electronic device and flexible display applications. Compared to indium tin oxide (ITO) electrodes, which have a typical sheet resistance of ${\sim}60{\Omega}$/sq and ~85% transmittance in the visible range, the chemical vapor deposition (CVD) synthesized graphene electrodes have a higher transmittance in the visible to IR region and are more robust under bending. Nevertheless, the lowest sheet resistance of the currently available CVD graphene electrodes is higher than that of ITO. In this study, we report a creative strategy, irradiation of microwave at room temperature under vacuum, for obtaining size-homogeneous gold nano-particle doping on graphene. The gold nano-particlization promoted by microwave irradiation was investigated by transmission electron microscopy, electron energy loss spectroscopy elemental mapping. These results clearly revealed that gold nanoparticle with ${\geq}30$ nm in mean size were decorated along the surface of the graphene after microwave irradiation. The fabrication high-performance transparent conducting film with optimized doping condition showed a sheet resistance of ${\geq}100{\Omega}$/sq. at ~90% transmittance. This approach advances the numerous applications of graphene films as transparent conducting electrodes.

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