• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.1
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• pp.41-46
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• 2007

Surface potential properties at the interface of pentacene thin films on gold (Au) and aluminum (Al) surfaces were investigated by using a near-field scanning microwave microprobe (NSMM). The surface potential formed across the pentacene film was observed by measuring the microwave reflection coefficient $S_{11}$ and compared with the result of a Kelvin-probe method. The obtained reflection coefficient ${\Delta}S_{11}$ of the pentacene thin films on Al was decreased as the pentacene film thickness increased due to the increased accumulation of negative space charges, while for Au ${\Delta}S_{11}$ was essentially constant.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.147-147
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• 2012

Cutoff probe has been used for measuring a plasma density using the cutoff peak which is located at the plasma frequency in the low pressure plasma. However, research on analysis of low frequency region of transmission microwave frequency (TMF) spectrum does not performed even though important plasma parameters are located in the low frequency region, i.e., ion plasma frequency and collision frequency. In this research, we analyzed the low frequency region of the TMF spectrum. Experimental results reveal the effect of plasma parameters on the low frequency region on the TMF spectrum. Based on the response of TMF spectrum from changing of plasma parameters, deduction of the plasma parameters was tried. This comprehensive analysis of TMF spectrum expands applicable area of cutoff probe.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.64 no.3
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• pp.422-428
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• 2015

A 2.45GHz microwave plasma source with a linear antenna has been developed for low temperature large scale deposition processing. Microwave power is transmitted through WR340 waveguide and a copper rod, linear antenna, is located in a quartz tube. The power matching is effectively achieved by a linear antenna is located at ${\lambda}_g/4$ or $3{\lambda}_g/4$ from the end of WR340 waveguide. The Ar plasma was generated along the surface of quartz tube and a clear standing wave pattern with nearly 10cm wavelength was observed at Ar pressure of 200mTorr and 200W input power. The electron density and electron temperature were investigated by using the electrostatic probe. The electron density and electron temperature were highly measured near the surface of quartz tube. Ar plasma density along the quartz tube is mostly uniform despite standing wave set-up and antenna of long length. A uniform temperature was measured at 10~40cm distance from the end quartz tube and 5cm distance from the surface of quartz tube.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.185.1-185.1
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• 2016

Cutoff probe, diagnostics instrument for plasma density, have been received an extensive attention due to simple, robust and lowest assumption. Although the cutoff probe has a long history, physical model is limited in low density plasma. For that reason, we propose a novel transmission line model of cutoff probe for precise measurement of high density plasma. In addition simplified circuit model can be obtained from transmission line model. It can explain simply physics of cutoff probe in high density plasma.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.7 no.1
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• pp.83-91
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• 1996

The SPICE circuit analysis program has a limited math capability and, in general, cannot be used for RF and microwave simulation because a complex arithmetic is required to compute S-parameters from node voltages. This paper presents two test bench models that can be used to obtain node voltages proportional to incident, reflected, and transmitted signals. From SPICE computed node voltages, S-parameters are computed using the math capability of the PSPICE post processor, PROBE, as an example for a low-pass filter consisting of transmission line sections. The results of this example are compared with another high frequency circuit analysis program, TOUCHSTONE. The difference between the results of these two programs in magnitude was less than 0.003 and in phase was a few tenths of a degree. By using these test benchs to simulate a filter, RF and microwave analysis can be made with the SPICE, which can be a cost-effective and readily available computational tool for educators and practicing engineers.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2004.03a
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• pp.314-317
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• 2004

On 9/5/2003, the planet probe “HAYABUSA” as MUSES-C project was launched by The Institute of Space and Astronautical Science. “HAYABUSA” has microwave discharge ion engines and these engines are characterized by their high efficiency and specific impulse in comparison with chemical engine. A large ion engine can be used as a planet explorer, while a small ion engine can be used as attitude control of small satellite. We have been developing a high thrust density microwave discharge ion engine using “Multi-Monopole Antenna”. The performance of this engine are: ion cost of 344W/A, propellant utilization efficiency of 52% and thrust density of 0.055mN/$\textrm{cm}^2$ for Kr gas flow rate of 2.5sccm, microwave(2.45㎓) power of 32W and acceleration voltage of l.4㎸.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.148-148
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• 2012

A cutoff probe is the novel diagnostic method to get the absolute plasma density with simple system and less assumption. However, high density of ion flux from plasma on probe tip can make the error of plasma density measurement because the dielectric material of probe tip can be damaged by ion flux. We proposed a shielded cutoff probe using the ceramic tube for protection from ion flux. The ceramic tube on probe tip can intercept the ion flux from plasma. The transmitted spectrum using the shielded cutoff probe is good agreement with E/M wave simulation result (CST Microwave Studio) and previous circuit simulation of cutoff probe [1]. From the analysis of the measured transmitted spectrum base on the circuit modeling, the parallel resonance frequency is same as the unshielded cutoff probe case. The obtained results of electron density is presented and discussed in wide range of experimental conditions, together with comparison result with previous cutoff method.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.25 no.12
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• pp.1300-1305
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• 2014

Equivalent circuits for the waveguide probe with H-shaped small aperture, as a key ingredient of near field microwave microscope, is described along with a working principle of the probe. Small rectangular or circular aperture in comparison with the wavelength behaves like the inductive element. So adding the ridged structure (corresponding to capacitive component) to the small aperture allows the transmission resonance to occur. For verification, we represents the equivalent circuit descriptions for the two types, ridged aperture and cavity types. The values of obtained by use of the equivalent circuit approaches are compared with those obtained by use of the available numerical software. The results are also experimentally verified.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.26 no.12
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• pp.1058-1063
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• 2015

In this article, we propose a near field microwave scanning probe structure in which two short conducting rods are attached to the center of the ridged(H-type) aperture, thereby reducing significantly the beam spot area while maintaining the high transmission efficiency through the output coupling H-type(ridged) aperture. Here the two short parallel conducting rods seem to play an important role of concentrating the transmitted electromagnetic energy through the H-type aperture and so reducing the beam area for high resolution. For validation of the proposed theory, the near field waveguide probe is fabricated according to the simulated results and its return loss characteristics versus frequencies are measured. The comparison between theory and experiment is seen to be in good agreements.

• Korean Journal of Remote Sensing
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• v.13 no.2
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• pp.151-163
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• 1997

In this paper, an algorithm for retrieving soil moisture from measurement of microwave reflection at the end of a coaxial canble is presented. Because the wave reflection from the boundary between air and soil layers depends on the dielectric constant of the soil layer, the dielectric constant can be obtained from measured reflection coefficient. At first, an equivalent circuit for the coaxial probe contaced on the soil surface was chosen with two unknown circuit elements. Then, the unknown circuit elements are obtained experrmentally by measuring the reflection constants of 20 soil samples, and consequently, an empirical formula for computing the dielectric constant from the reflection coefficient is obtained. The dielectric constant is mainly influenced by the soil moisture, and the soil moisture can be computed from the dielecfic constant using an existing empirical formula. HP Network Analyzer 8510C was used to measure the magnitude and the phase of the reflection coeffcient at 4.65 GHz, and the measured data set were used to obtain an empirical formula for computing the dielectric constant. The empirical formula obtained in this study was proven by other soil samples.