• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.218.1-218.1
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• 2014

In order to measure the absolute plasma density, various probes are proposed and investigated and microwave probes are widely used for its advantages (Insensitivity to thin non-conducting material deposited by processing plasmas, High reliability, Simple process for determination of plasma density, no complicate assumptions and so forth). There are representative microwave probes such as the cutoff probe, the hairpin probe, the impedance probe, the absorption probe and the plasma transmission probe. These probes utilize the microwave interactions with the plasma-sheath and inserted structure (probe), but frequency range used by each probe and specific mechanisms for determining the plasma density for each probe are different. In the recent studies, behaviors of each microwave probe with respect to the plasma parameters of the plasma density, the pressure (the collision frequency), and the sheath width is abundant and reasonably investigated, whereas relative diagnostic characteristics of the probes by a comparative study is insufficient in spite of importance for comprehensive applications of the probes. However, experimental comparative study suffers from spatially different plasma characteristics in the same discharge chamber, a low-reproducibility of ignited plasma for an uncertainty in external discharge parameters (the power, the pressure, the flow rate and so forth), impossibility of independently control of the density, the pressure, and the sheath width as well as expensive and complicate experimental setup. In this paper, various microwave probes are simulated by finite-different time-domain simulation and the error between the input plasma density in FDTD simulations and the measured that by the unique microwave spectrums of each probe is obtained under possible conditions of plasma density, pressure, and sheath width for general low-temperature plasmas. This result shows that the each probe has an optimum applicable plasma condition and reliability of plasma density measurement using the microwave probes can be improved by the complementary use of each probe.

• Journal of Korea Water Resources Association
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• v.53 no.12
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• pp.1071-1079
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• 2020

For integrated water management, it is essential to secure basic data such as the amount of agricultural water intake. The river water intake through the intake weir is carried out through the agricultural irrigation canal, and a method for measuring the quantity of water intake is required to suit the characteristics of the measuring points. In this study, the accuracy of the calculated flow data was determined by applying a microwave water surface current meter. The microwave water surface current meter is a method of calculating surface velocity using doppler effect, which is mainly used in high-velocities situations such as flood. Surface velocity is difficult to represent the average velocity of the entire section at low dicharges or high wind speeds, it is considered to be low in continuous utilization throughout the year, and it is necessary to verify whether the measurement using an microwave water surface curren meter is appropriate in agricultural irrigation canal. The data measured with an microwave water surface curren meter were compared with the actual flow data to calculate the intake data in agricultural irrigation canal. In agricultural irrigation canal, the low-level discharge calculated using an microwave water surface current meter at a minimum velocity of about 0.3 m/s and a minimum discharge of about 1.0 m3/s or higher was found to have a high tendency and accuracy compared to the standard discharge, especially when the high discharge was high. Although effective results can be obtained in terms of quantity at low discharge, it is deemed that subsequent studies are needed to calculate the average discharge of the cross section at low discharge, given that the trend of data is unstable. Through this study, it is suggested that it is appropriate to calculate the amount of water intake through the microwave water surface current meter in artificial waterways with a certain discharge or higher, so it is expected to be widely distributed as a method for measuring river water intake.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.152-152
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• 2012

In this work we measured electron temperature and electron density of a microplasma by optical emission spectroscopy. The plasma is generated from a small discharge gap of a microwave parallel stripline resonator (MPSR) in Helium at atmospheric pressure. The microwave power supplied for this plasma source from 0.5 to 5 watts at a frequency close to 800 MHz. The electron temperature and electron density were estimated through Collisional-radiative model combined with Corona-equilibrium model. The results show that the electron density and temperature of this plasma in the case small discharge gap width are higher than that in larger gap width. The diagnostic techniques and associated challenges will be presented and discussed.

• Journal of the Korean Vacuum Society
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• v.10 no.4
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• pp.424-430
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• 2001

An electron Boltzmann equation is solved numerically to calculate the electron energy distribution functions in plasma discharge which is generated by radio-frequency (RF) and microwave frequency electric field. The maintenance field strengths are determined self-consistently by solving the homogeneous electron Boltzmann equation in the Lorentz approximation expressed by 2nd order differential equation and an additional particle balance equation expressed by integro-differential equation. By using this numerical code, the electron energy distribution functions in argon discharge are calculated in the range from RF to microwave frequency. The influence of frequency of the HF electric field on the electron energy distribution functions and ionization rate are investigated.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.492-494
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• 2002

The fundamental principles of the operation of microwave discharges that are used to convert microwave energy to broad spectrum visual light are known. In this paper, emission dependance of microwave discharges in mixture content of sulfur with noble gases was studied. It is shown that the excitation of this gaseous mixture is carried out in two phases: (1) ionization of noble gas atoms by a microwave field and (2) the consequent maintenance of slightly ionized nonequilibrium plasma by the field. These two processes have essentially various thresholds for the microwave pump. The purpose of this work is to investigate spectral properties of the high frequency discharges in a mixture sulfur vapors with noble gases.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.11
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• pp.609-615
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• 2000

A prototype electrodeless sulfur lamp was developed and investigated the spectroscopic characteristics. The emission spectra of $S_2$ in the microwave-discharged eletrodeless sulfur lamp (ESL) were studied at various input power. The emission spectra of the ESL shift to longer wavelength with increasing of the input power. We have shown that this is due to the self reversal effect in the high pressure gas discharge. We also show that the self reversal effect increases as the rotation of the discharged bulb. The spectral distribution of the ESL shifts about 45 nm toward visible region from UV region due to the rotation of the lamp bulb.

• Proceedings of the KIEE Conference
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• 2002.11a
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• pp.109-111
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• 2002

The fundamental principles of the operation of microwave discharges that are used to convert microwave energy to broad spectrum visual light are known. In this paper, emission dependance of microwave discharges in mixture content of sulfur with noble gases was studied. It is shown that the excitation of this gaseous mixture is carried out in two phases; (1) ionization of noble gas atoms by a microwave field and (2) the consequent maintenance of slightly ionized nonequilibrium plasma by the field. These two processes have essentially various thresholds for the microwave pump. The purpose of this work is to investigate spectral properties of the high frequency discharges in a mixture sulfur vapors with noble gases.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.3
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• pp.699-706
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• 2018

The permeation properties of plasma polymer membranes were studied for permanent gases such as He, $H_2$, $O_2$, $N_2$, $CH_4$ and condensable vapors such as $CO_2$, $C_2H_4$, $C_3H_8$. The plasma polymers were prepared by the discharge of microwave or radiofrequency(RF) wave. Hexamethyldisiloxane (HMDS) vapor was used as a monomer for plasma polymerization. In HMDS plasma-polymerized membranes prepared under microwave discharge, the permeability coefficient was dependent of the kinetic molecular diameter of the permeate gases. Additionally the membranes showed higher $O_2/N_2$ permselectivity compared to the plasma polymers from radiofrequency discharge. On the contrary, in the HMDS plasma-polymerized membranes prepared under radiofrequency discharge, the permeability coefficient was dependent of the critical temperature of the permeant gases. The membranes showed high selectivities of $C_2H_4$ and $C_3H_8$ over $N_2$. The permeability coefficient of plasma polymerized membranes prepared under microwave discharge was dependent of the molecular diameter of permeant gases because of high crosslinking density of the membrane. However, the crosslinking density of the plasma polymerized membranes prepared under RF discharge was lower because the energy density of RF wave is weaker than that of microwave. Hence, the permeability of RF plasma polymerized membranes became dependent of the critical temperature rather than molecular diameter of the gases.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.95-95
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• 2010

An apparatus for generating flames and more particularly the microwave plasma burner for generating high-temperature large-volume plasma flame was presented. The plasma burner was composed of micvrowave transmission lines, a field applicator, discharge tube, coal and gas supply systems, and a reactor. The plasma burner is operated by injecting coal powders into a 2.45 GHz microwave plasma torch and by mixing the resultant gaseous hydrogen and carbon compounds with plasma-forming gas. We in this work used air, oxygen, steam, and their mixtures as a discharge gas or oxidant gas. The microwave plasma torch can instantaneously vaporize and decompose the hydrogen and carbon containing fuels. It was observed that the flame volume of the burner was more than 50 times that of the torch plasma. The preliminary experiments were carried out by measuring the temperature profiles of flames along the radial and axial directions. We also investigated the characteristics for coal combustion and gasification by analyzing the byproducts from the exit of reactor. As expected, various byproducts such as hydrogen, carbon monoxide, carbon dioxide, hydrogen sulfide, etc. were detected. It is expected that such burner cab be applied to coal gasification, hydrocarbon reforming, industrial boiler of power plants, etc.

• Journal of Korea Water Resources Association
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• v.30 no.6
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• pp.671-678
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• 1997

Water surface velocity meters with microwave were applied to stream discharge measurements and its practical aspects were evaluted. The rating of the surface velocity meters was performed through a carriage and a water tank for the ship model test. It gave5.5% or less errors of average measured velocities under the vertical tilt ang1e of 20$^{\circ}$, 35$^{\circ}$, or 45$^{\circ}$ . A surface velocity meter was used to measure flood velocities at Yoju bridge from 8:00 a.m. to 10:00 a.m. on August 26, 1995. The results showed that surface velocities ranged from 2 to 4 m/s. With the measured surface velocities multiplied by 0.85, the discharge was computed as 10,500 m$^3$/s. It differed $\pm$2% or less from the value of a stage-discharge curve and that of an unsteady flow simulation. Although the measured data are used sparsely per 40 or 60 meters, the computed discharges do not give large variation. Stream discharge measurements were also performed under the normal condition without floods. With the known values of Taechong Dam releases. the depth averaging factors of velocity were calculated by 0.83~0.87. Although there are errors from wind action and inherent ones in the velocity meters, the research showed that surface velocity meters could be an simple and practical alternative for flood discharge measurements.