• Proceedings of the KIEE Conference
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• 1999.07a
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• pp.34-36
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• 1999

2 phase 8 pole HB type LPM(linear pulse motor) has the suitable structure for it's microstep drive. Hence, if this LPM will be drived by this method, the limited(mechanically) step resolution can be increased further and vibration and noise can be decreased considerably. But, It is difficult that this LPM was analyzed in detail because of it's complex magnetic circuits to be composed the LF(longitudinal flux) and TF(transverse flux.) path. If LPM was analyzed by the approximate 2D model, we could not be obtained satisfactory result. Therefore, It is necessary to be analyzed the 3D model in detail for the more satisfactory results. In this paper, we obtain 3D flux distribution of the mover using by 3D FEM(finite element method)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.343-346
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• 2003

In order to discuss the availability of the hydrostatic guideway driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resulution of 10 nm are used as the feeding system. The experiments are performed on the static stiffness. motion accuracy, positioning accuracy. microstep response and variation of velocity. The guideway has the infinite axial stiffness within 50 N of applied load, and has 0.08 ${\mu}{\textrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error. It also has 0.21 ${\mu}{\textrm}{m}$ of positioning error and 0.09 ${\mu}{\textrm}{m}$ of repeatability, and it shows the stable response against the 10 nm resolution step command. The velocity variation of feeding system is less than 5%. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful for the ultra precision machine tools.