• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.709-713
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• 2004

Characteristics of laser-assisted wet etching of titanium in phosphoric acid were investigated to examine the feasibility of this method for fabrication of high aspect ratio microchannels. Laser power, number of scans, etchant concentration, position of beam waist and scanning speed were taken into consideration as the major process parameters exerting the temperature distribution and the cross sectional profile of etched channels. Experimental results indicated that laser power influences on both etch width and depth while number of scans and scanning speed mainly affect on the etch depth. At a low etchant concentration, the cross sectional profile of an etched channel becomes a U-shape but it gradually turns into a V-shape as the concentration increases. On the other hand, surface of the laser beam focus with respect to the sample surface is found to be a key factor determining the bubble dynamics and thus the process stability. It is demonstrated that metallic microchannels with different cross sectional profiles can be fabricated by properly controlling the process parameters. Microchannels of aspect ratio up to 8 with the width and depth ranges of 8∼32 m and 50∼300 m, respectively, were fabricated.

• 대한기계학회논문집B
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• 제36권1호
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• pp.89-95
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• 2012

본 연구에서는 부피가 다른 두 유체의 효과적인 유동제어를 위하여 Stokes 유동 방정식을 기반으로 설계된 미세채널을 제안한다. 부피가 다른 두 유체가 압력 구동에 의하여 주입구를 통과하는 과정에서, 두 유동이 동시에 만나 주어진 부피비를 유지하며 흘러나간 후에 일시에 끝날 수 있도록 주입구의 폭과 길이를 조절하였다. 디자인된 미세채널은 비압축성, 뉴턴 유체의 과도상태 유동에 대한 전산유체역학 모사를 수행하였다. 또한, 소프트리소그래피를 통해 미세유체칩을 제작하고, 압력 구동에 의한 부피가 다른 두 유체의 유동 특성을 평가하였다.

• 설비공학논문집
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• 제20권12호
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• pp.795-801
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• 2008

An experimental study has been performed on the single phase flow and convective heat transfer in trapezoidal microchannels. The microchannel was about $270{\mu}m$ wide, $800{\mu}m$ deep. and 7 mm long, which might ensure hydrodynamically fully-developed laminar flow at a low Reynolds number. The experiments were conducted with R1l3 and water, with the Reynolds number ranging from approximately 30 to 5000 for friction factor and 30 to 700 for the Nusselt number. Friction factors in laminar are found to be in good agreement with the predictions of existing correlation suggesting that a conventional analysis approach can be employed in predicting flow friction behavior in microchannels. However turbulent friction factors are hardly predictable by the existing correlations. The experimental results show that the Nusselt number is not a constant but increases almost linearly with the Reynolds number even the flow is fully developed (Re < 100). The dependence of the Nusslet number on the Reynolds number is contradictory to the conventional theory. At a Reynolds number greater than 100, the Nusselt number increases slowly with the Reynolds number, where thennally developing flow is responsible for the increase of the Nusselt number with the Reynolds number.

• 대한기계학회논문집B
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• 제36권5호
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• pp.545-551
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• 2012

마이크로 유체구조를 기반으로 하는 약물전달장치는 마이크로 유체 채널형상의 간단한 변형만으로 약물분출량을 쉽게 조절할 수 있는 장점이 있다. 그러나 디바이스 제작에 사용된 생분해성 고분자 85/15poly(lactic-co-glycolic acid) (85/15PLGA)의 소수성 기질 때문에 약물전달 장치내부로의 release medium의 유입이 원활하게 이루어지지 않으며 그 결과, 디바이스의 임플랜트 후 초기의 약물 분출에 영향을 줄 것으로 예상된다. 따라서 surfactant인 polyethylene-glycol600 (PEG600)과 Tween80을 이용하여 micro-channel의 표면처리를 한 디바이스와 surfactant를 사용하지 않은 디바이스를 각각 제작하여 약물 전달 실험을 하였으며, 이를 바탕으로 마이크로 유체 채널의 기하학적 형상에 따른 국소 마취제의 일종인 bupivacaine HCl(BHCl)의 분출속도제어를 입증하였다.

• 대한기계학회논문집B
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• 제35권9호
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• pp.891-896
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• 2011

본 연구에서는 사각 마이크로 채널의 열전달 특성을 연구하기 위한 실험을 수행하였다. 실험에 사용된 시료의 채널 수력직경은 $700{\mu}m$이며, 채널의 개수는 20개이다. 작동유체는 물이며, 작동유체의 입구 온도는 $20^{\circ}C$ 이다. 실험 변수는 Reynolds 수 400 ~ 800 및 열 유속 35 ~ 85 kW/$m^2$ 이다. 결과로, Reynolds 수가 큰 경우일수록 대류 열전달 계수가 증가하는 것으로 나타났으며, 열적으로 완전히 발달 된 영역에 대하여 대류 열전달 계수는 약 4.6 ~ 6.4 kW/$m^2^{\circ}C$로 나타났다. 또한, 사각 마이크로 채널에서의 열적 입구길이는 Reynolds 수가 커지는 경우일수록 길어지는 것을 알 수 있었으나, 열 유속의 변화는 입구길이에 영향을 미치지 않는 것으로 나타났다. 본 연구의 결과로 완전히 발달된 유동영역에 대하여 사각 마이크로 채널의 열적 특성을 나타내기 위한 Nusselt 수 상관식을 제안하였다.

• 대한기계학회논문집B
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• 제32권2호
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• pp.125-132
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• 2008

The bubble dynamics and heat transfer associated with nucleate boiling in parallel microchannels is studied numerically by solving the equations governing conservation of mass, momentum and energy in the liquid and vapor phases. The liquid-vapor interface is tracked by a level set method which is modified to include the effects of phase change at the interface and contact angle at the wall. Also, the reversible flow observed during flow boiling in parallel microchannels has been investigated. Based on the numerical results, the effects of contact angle, wall superheat and the number of channels on the bubble growth and reversible flow are quantified.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2004년도 춘계 학술대회논문집
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• pp.99-105
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• 2004

A kinetic theory analysis is made of low-speed gas flows in microchannels. The Boltzmann equation simplified by a collision model is solved by means of a finite difference approximation with the discrete ordinate method. The method does not suffer from statistical noise which is common in particle based methods and requires much less amount of computational effort. Calculations are made for flows in simple microchannels and a microfluidic system consisting of two microchannels in series. The method is assessed by comparing the results with those from several different methods and available experimental data.

• 대한기계학회논문집B
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• 제33권10호
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• pp.783-788
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• 2009

In this paper, we have performed a parametric study on the characteristics of multiphase laminar flow with density difference in various microchannels. The interface between multiphase fluids is rotated by the gravitational forces induced by density difference. The numerical simulations were carried out via commercial CFD package to study the characteristics of multiphase laminar flow. The results of the numerical simulations in this study were verified by comparing with the previously reported experimental results in the literature. We have also proposed a new dimensionless relationship between dimensionless rotation angle of interface and dimensionless parameters are proposed for square microchannels with various aspect ratios. The dimensionless relationship could be widely applied to the reliable design of various microfluidic devices dealing with multiphase laminar flow.

• 센서학회지
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• 제15권5호
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• pp.357-361
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• 2006

This paper reports a new technology to implement complex PDMS microchannels, which are simply constructed using three-dimensional photoresist structures as mold for PDMS replica process. The process utilizes LOR resist as a sacrificial layer to levitate the structural photoresist and multi-step exposure to control the thicknesses of photoresist structures. Various shapes of photoresist structures were successfully fabricated. Using the PDMS replica method, the three-dimensional photoresist structures are demonstrated to be applicable for implementing complex microchannels in PDMS. In addition, more complex multilevel microchannels are constructed by bonding two PDMS layers with just single PDMS alignment.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.659-660
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• 2006

High-aspect-ratio(max. 12.5) microchannels with excellent surface quality and good shape uniformity have been realized utilizing laser-induced etching technique. Etch width and depth variations depend largely upon process variables such as laser power and etchant concentration. Etchant concentration in association with viscosity also influence on the cross-sectional profile of the channels. The optimum process conditions for the fabrication of high-aspect-ratio microchannels applicable to micro thermal devices are demonstrated.