• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.12
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• pp.1639-1645
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• 2002

Micro engine that includes Micro scale combustor is fabricated. Design target was focused on the observation of combustion driven actuation in MEMS scale. Combustor design parameters are somewhat less than the size recommended by feasibility test. The engine structure is fabricated by isotropic etching of the photosensitive glass wafers. Electrode formed by electroplating of the Nickel. Photosensitive glass can be etched isotropically with almost vertical angle. Bonding and assembly of structured photosensitive glass wafer form the engine. Combustor size was determined to be 1 mm scale. Movable piston is engraved inside the wafer. Ignition was done by nickel spark plug which was electroplated with thickness of 40 ${\mu}{\textrm}{m}$. The wafers were bonded by epoxy that resists high temperature. In firing test due to the bonding method and design tolerance pressure buildup by reaction was not confirmed. But ignition, flame propagation and actuation of micro structure from the reaction was observed. From the result basement of design and fabrication technology was obtained.

• 한국가시화정보학회:학술대회논문집
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• 2002.04a
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• pp.79-84
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• 2002

Most microfluidic devices such as heat sinks for cooling micro-chips, DNA chip, Lab-On-Chip, and micro pumps etc. have microchannels of various size. Therefore, the design of practical microfluidics demands detail information on flow structure inside the microchannels. However, detail velocity field measurements are rare and difficult to carry out. In addition, as the microfluidics expands, accurate understanding of microscale transport phenomena becomes very important. In this research, micro-PIV system was employed to measure the velocity fields of flow inside a micro-channel. We carried out PIV measurements for several microchannels with varying channels width, inlet and outlet shape, filters, CCD camera and ICCD camera, etc. For effective composition of micro-PIV system, first of all, it is essential to understand optics related with micro-imaging of particles and the particle dynamics encountered in micro-scale channel flows. In addition, it is necessary to find the optimal condition for given experimental environment and? micro-scale flow to be investigated. The problems encountered in measuring velocity field of micro-channel flows are discussed in this paper.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.15 no.1
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• pp.19-24
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• 2003

The objectives of this paper are to develop a new method of wettability mea-surement and to study the effect of surface roughness on the wettability in a $H_2O$/LiBr falling film absorber. Two absorber tubes with micro-scale roughness and a bare tube are tested in a falling film absorber installed in a test rig. Inlet solution temperature, concentration and mass flow rate are considered as key parameters. A new method is proposed to estimate the wettability of a tube by measuring a minimum mass flow rate to wet the tube completely. The wettability for the structured surfaces was higher than that for the bare tube. The wettability decreased linearly along the vertical location. The wettability increased with increasing the solution temperature and the solution mass flow rate. The experimental correlations of the wettability for the bare and the micro-hatched tubes were developed with error bands of$\pm20%\;and\;\pm10%$, respectively. This work can be used in the design of absorbers with micro-scale roughness.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.5
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• pp.578-584
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• 2011

In mechanical cutting process, burr was generated at workpiece by cutting tool generally. It is working disturbance during manufacturing process. Besides burr was taken shape relatively large size more micro scale machining than macro scale machining. Many researches have been studied to remove micro burr(de-burring), because it was negative effect for accuracy of machining shape. However, micro de-burring was constrained by burr height, micro feature and so on. In this paper, experimental research was carried out to compare de-burring characteristics of $Al_2O_3$ abrasive and polymer.

• Advances in materials Research
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• v.8 no.3
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• pp.219-235
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• 2019

This research is devoted to analyzing mechanical-thermal post-buckling behavior of a micro-size beam reinforced with graphene platelets (GPLs) based on geometric imperfection effects. Graphene platelets have three types of dispersion within the structure including uniform-type, linear-type and nonlinear-type. The micro-size beam is considered to be perfect (ideal) or imperfect. Buckling mode shape of the micro-size beam has been assumed as geometric imperfection. Modified couple stress theory has been used for describing scale-dependent character of the beam having micro dimension. Via an analytical procedure, post-buckling path of the micro-size beam has been derived. It will be demonstrated that nonlinear buckling characteristics of the micro-size beam are dependent on geometric imperfection amplitude, thermal loading, graphene distribution and couple stress effects.

• 한국연소학회:학술대회논문집
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• 2001.11a
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• pp.57-62
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• 2001

The effect of micro scale turbulence on flame structure and stability were experimentally investigated by changing the area of micro turbulence generator(MTG) and air velocity in terms of low NOx and high efficiency combustion. NOx and CO concentration were also measured for different MTG areas to investigate whether a vane swirler having MTG has a possibility of using as part for low NOx combustor. From the obtained results, it is shown that flame stability region increases and flame size becomes small as MTG area increases since MTG in itself makes small scale recirculation flow and swirler does large scale recirculation one. It is also shown that low NOx concentration(about 20${\sim}$30ppm@$O_2$ 11%) is achieved for all MTG areas without any increase in CO concentration regardless of air velocity range tested in this study when the equivalence ratio is 0.7. The results obtained in this study can give basic guideline for the design of compact low NOx high efficiency combustor using a vane swirler having MTG.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.10
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• pp.2180-2186
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• 2002

In a micro-scale contact, capillary force and van der Waals interaction significantly influence the contact between asperities of rough surfaces. Little is, however, known about the variation of these surface forces as a function of chemical property of the surface (wet angle), relative humidity and deformation of asperities in the real area of contact. A better understanding of these surface forces is of great necessity in order to find a solution for reducing friction and adhesion of micro surfaces. The objective of this study is to investigate the surface forces in micro-scale rough surface contact. We proposed an effective method to analyze capillary and van der Waals forces in micro-scale contact. In this method, Winkler spring model was employed to analyze the contact of rough surfaces that were obtained from atomic force microscopy (AFM) height images. Self-mated contact of DLC(diamond like carbon) coatings was analyzed, as an example, by the proposed model. It was shown that the capillary force was significantly influenced by relative humidity and wet angle of the DLC surface. The deformation of asperities to a critical magnitude by external loading led to a considerable increase of both capillary and van der Waals forces.

• Tribology and Lubricants
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• v.20 no.5
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• pp.266-271
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• 2004

The aim of this paper is to investigate the effect of surface texturing on reduction friction and to understand the potential of friction reduction through micro-scale dimple to fabricate by photolithography on pin-on-disk test using flat-on-flat contact geometry. It was verify that the friction property with respect to the same pitch has been influence on the size of dimple under lubricated sliding contact. Also, we can recognize from Stribeck curve that the friction property has a connection with the size of dimple. It can explain a relationship between the friction coefficient and a dimensionless parameter for lubrication condition. The friction property has been an effect on the size of surface texture on reduction friction, not only because the density of dimple, but also because the ratio of diameter/pitch. This ratio of approximately 0.5 recommend under the tested friction condition. It suggested that the ratio of d/p is an important parameter for surface texture design.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.1231-1235
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• 2004

The needs of micro scale thermal detecting technique are increasing in biology and chemical industry. For example, Thermal finger print, Micro PCR(polymer chain reaction), ${\mu}TAS$ and so on. To satisfy these needs, we developed a DTSA(Diode Temperature Sensor Array) for detecting and controlling the temperature on small surface. The DTSA is fabricated by using VLSI technique. It consists of 32 ${\times}$ 32 array of diodes (1,024 diodes) for temperature detection and 8 heaters for temperature control on a 8mm ${\times}$ 8mm surface area. The working principle of temperature detection is that the forward voltage drop across a silicon diode is approximately proportional to the inverse of the absolute temperature of diode. And eight heaters ($1K{\Omega}$) made of poly-silicon are added onto a silicon wafer and controlled individually to maintain a uniform temperature distribution across the DTSA. Flip chip packaging used for easy connection of the DTSA. The circuitry for scanning and controlling DTSA are also developed

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.3
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• pp.94-99
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• 2011

Micro-scale surface pattern has an benefit of tribological application under lubricated sliding contact. Therefore, a special pattern, that has to reduce the coulomb friction under contact, is considered to be necessary for improved efficiency of machines. The current study investigated the friction property of angle effect for micro-scale grooved crosshatch pattern on bearing steel surface using pin-on-disk type. The samples fabricated by photolithography process and then these are carry out the electrochemical etching process. We discuss the friction property due to the influence of hatched-angle on contact surface. We could be explained the lubrication mechanism for a Stribeck curve. It was found that the friction coefficient depend on an angle of the crosshatch on contact surface. It was thus verified that micro-scale crosshatch grooved pattern could affect the friction reduction.