• 한국진공학회지
• /
• 제19권2호
• /
• pp.81-90
• /
• 2010

층과 층 사이의 정전기적인력, 수소결합 또는 공유결합을 이용하여 층당 두께를 수 옹스트롱에서부터 수십 나노미터까지 제조할 수 있으며 박막의 표면 형태를 흡착시키고자 하는 물질 및 박막 후처리 공정을 통해 제어할 수 있으며 더 나아가, 삽입하는 물질의 특성에 따라 박막의 기능성을 집적화 및 다양화시킬 수 있다. 본 연구에서는 이러한 층상자기조립방법의 특성을 이용하여 반사방지막, 초소수성 필름 및 전기화학센서로의 응용가능성을 제시하였다. 반사방지막의 경우, 구형의 블록공중합체를 유리기판 위에 다층박막으로 적층시킴으로써 박막 굴절률을 1.25까지 감소시켰고 이를 통해 약 99.5%의 빛 투과도를 달성할 수 있었다. 더 나아가 바이오물질인 엔자임을 다층박막에 삽입시킬 경우, 활성 산소를 분해시키는 전기화학센서로의 제조가 가능함을 보인다. 본 연구는 본인이 이미 발표한 논문(J. Am. Chem. Soc. 128, 9935 (2006); Adv. Mater. 19, 4364 (2007); Electro. Mater. Lett. 3, 163 (2007))들을 정리하여 층상자기조립법에 관해 소개하는 논문이다.

• 센서학회지
• /
• 제6권1호
• /
• pp.72-80
• /
• 1997

실리콘 공정을 이용하여 마이크로 밸브(valve)를 제작할 때에 역방향 누설 유량은 중요한 문제중 하나이다. 본 논문에서는 플래퍼(flapper)와 노즐(nozzle)을 이용하여 누설 유량이 없는 마이크로 밸브를 설계하고, 실리콘 공정을 이용하여 제작하였다. 제작된 마이크로 밸브의 작동원리는 정방향 압력이 가해질 때에는 유체의 압력이 플래퍼를 위로 밀어서 유체를 흐르게 하고, 역방향 압력이 가해질 때에는 플래퍼를 밀지만 이때는 노즐의 입구에 의해 지지되므로 플래퍼나 노즐이 깨지지 않는 한 유체가 흐를 수 없게 된다. 노즐은 (100) 웨이퍼를 습식식각하여 제작하였고, 플래퍼는 역형상을 $20{\mu}m$만큼 플라즈마 식각장비(RIE)로 수직 식각한 뒤 뒷면에서부터 습식식각을 하여 제작하였다. 제작된 마이크로 플래퍼-노즐 밸브의 정적특성을 해석하였고, 순수를 사용한 실험결과와 비교하였다. 실험결과는 제작된 마이크로 플래퍼-노즐 밸브가 완전한 다이오드적인 특성을 가진다는 것을 보여 주었다.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 1995년도 추계학술대회 논문집
• /
• pp.224-227
• /
• 1995

The micro-patterning by a Bow energy FIB whish has been conventionally utilized far mask-repairing was investigated. Amorphous Se$\_$75/Gee$\_$25/ resist irradiated by 9[keV]-defocused Ga$\^$+/ ion beam(∼10$\^$15/[ions/$\textrm{cm}^2$]) resulted in increasing the optical absorption, which was also observed also in the film exposed by an optical dose of 4.5${\times}$10$\^$20/[photons/$\textrm{cm}^2$]. The ∼0.3[eV] edge shift for ion-irradiated film was about twice to that obtained for photo-exposed. These large shift could be estimated as due to an increase in disorder from the decrease in the sloop of the Urbach tail. For Ga$\^$+/ FIB irradiation with a relatively low energy, 30[keV] and above the amount of dose of 1.4${\times}$10$\^$16/[ions/$\textrm{cm}^2$], the irradiated region in a-Se$\_$75/Ge$\_$25/ resist was perfectly etched in acid solution for 10[sec], which is relatively a short development time. A contrast was about 2.5. In spite of the relatively low incident energy,∼0.225[$\mu\textrm{m}$] pattern was clearly obtained by the irradiation of a dose 6.5${\times}$10$\^$16/[ions/$\textrm{cm}^2$] and a scan diameter 0.2[$\mu\textrm{m}$], from which excellent results were expected fur incident energies above 50[keV] which was conventionally used in FIBL.

• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2011년도 춘계학술발표대회
• /
• pp.3.1-3.1
• /
• 2011

Over the past decade, the major efforts for lowering the cost of electronics has been devoted to increasing the packaging efficiency of the integrated circuits (ICs), which is defined by the ratio of all devices on system-level board compared to the area of the board, and to working on a larger but cheaper substrates. Especially, in flexible electronics, the latter has been the favorable way along with using novel nanomaterials that have excellent mechanical flexibility and electrical properties as active channel materials and conductive films. Here, the tool for achieving large area patterning is by printing methods. Although diverse printing methods have been investigated to produce highly-aligned structures of the nanomaterials with desired patterns, many require laborious processes that need to be further optimized for practical applications, showing a clear limit to the design of the nanomaterial patterns in a large scale assembly. Here, we demonstrate the alignment of highly ordered and dense silicon (Si) NW arrays to anisotropically etched micro-engraved structures using a simple evaporation process. During evaporation, entropic attraction combined with the internal flow of the NW solution induced the alignment of NWs at the corners of pre-defined structures. The assembly characteristics of the NWs were highly dependent on the polarity of the NW solutions. After complete evaporation, the aligned NW arrays were subsequently transferred onto a flexible substrate with 95% selectivity using a direct gravure printing technique. As proof-of-concept, flexible back-gated NW field effect transistors (FETs) were fabricated. The fabricated FETs had an effective hole mobility of 0.17 $cm2/V{\cdot}s$ and an on/off ratio of ${\sim}1.4{\times}104$. These results demonstrate that our NW gravure printing technique is a simple and effective method that can be used to fabricate high-performance flexible electronics based on inorganic materials.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2010년도 제39회 하계학술대회 초록집
• /
• pp.276-276
• /
• 2010

Large-area micropatterned array of Co/Ni bilayer anti-dots was fabricated using photolithography and wet etching process. The surface morphology as well as the surface topography was checked by scanning electron microscopy and atomic force microscopy, whereas the magnetic properties were studied by magneto-optical Kerr effect (MOKE) and magnetic force microscopy (MFM). Systematic studies of the magnetic-reversal mechanism, the in-plane anisotropy and the switching field properties were carried out. To get a comprehensive knowledge about the domain configuration, we also employed OOMMF simulations. It was found from the MOKE measurements that a combined effect of configurational and the magneto-crystalline anisotropy simultaneously works in such micropatterned bilayer structures. In addition, the inclusion of holes in the uniform magnetic film drastically affected the switching field. The MFM images show well-defined domain structures which are periodic in nature. The micromagnetic simulations indicate that the magnetization reversal of such a structure proceeds by formation and annihilation of domain walls, which were equally manifested by the field-dependent MFM images. The observed changes in the magnetic properties are strongly related to both the patterning that hinders the domain-wall motion and to the magneto-anisotropic bilayered structure.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2010년도 제39회 하계학술대회 초록집
• /
• pp.259-259
• /
• 2010

Periodically polarity inverted (PPI) ZnO structures on (0001) Al2O3 substrates are demonstrated by plasmas assisted molecular beam epitaxy. The patterning and re-growth methods are used to realize the PPI ZnO by employing the polarity controlling method. For the in-situ polarity controlling of ZnO films, Cr-compound buffer layers are used.[1, 2] The region with the CrN intermediate layer and the region with the Cr2O3 and Al2O3 substrate were used to grow the Zn- and O-polar ZnO films, respectively. The growth behaviors with anisotropic properties of PPI ZnO heterostructures are investigated. The periodical polarity inversion is evaluated by contrast images of piezo-response microscopy. Structural and optical interface properties of PPI ZnO are investigated by the transmission electron microcopy (TEM) and micro photoluminescence ($\mu$-PL). The inversion domain boundaries (IDBs) between the Zn and the O-polar ZnO regions were clearly observed by TEM. Moreover, the investigation of spatially resolved local photoluminescence characteristics of PPI ZnO revealed stronger excitonic emission at the interfacial region with the IDBs compared to the Zn-polar or the O-polar ZnO region. The possible mechanisms will be discussed with the consideration of the atomic configuration, carrier life time, and geometrical effects. The successful realization of PPI structures with nanometer scale period indicates the possibility for the application to the photonic band-gap structures or waveguide fabrication. The details of application and results will be discussed.

• Korean Chemical Engineering Research
• /
• 제44권1호
• /
• pp.1-9
• /
• 2006

생물체를 구성하는 세포의 기능과 구성요소 간 상호작용 메커니즘을 인공적으로 모방하여 바이오물질 박막으로 구성된 바이오소자는 의료 진단, 신약 스크리닝, 전자소자, 생물공정, 환경오염 물질 측정 등 다양한 산업 분야에 응용되고 있다. 단백질, DNA, 바이오색소, 세포 등의 생체물질을 칩 상에 고집적으로 배열하여 구성된 바이오 소자로서 바이오 전자소자(생물분자 광다이오드, 바이오 정보저장소자, 바이오 전기발광 소자), DNA칩, 단백질칩, 및 세포칩 등이 개발되어 오고 있다. 생체물질 고정화 기술, 마이크로 및 나노수준의 패터닝기술, 소자 구성 기술, 바이오 멤스 기술의 융합을 통해 바이오소자는 구현되며, 최근에는 나노기술의 적용에 의하여 나노바이오소자도 구현이 가능하다. 본 논문에서는 현재까지 개발된 다양한 바이오소자의 제작 기술과 응용에 대하여 소개하고 향후의 발전 방향에 대하여 다룬다.

• 한국가시화정보학회지
• /
• 제13권1호
• /
• pp.43-48
• /
• 2015

Collective cell migration is a fundamental phenomenon observed in various biological processes such as development, wound healing, and cancer metastasis. During the collective migration, cells undergo changes in their phenotypes from those of stable to the migratory state via the process called epithelial-mesenchymal transition (EMT). Recent findings in biology and biochemistry have shown that EMT is closely related to the cancer invasion or metastasis, but not much of the correlations in kinematics and physical forces between the neighboring cells are known yet. In this study, we aim to understand the cell migration and stress distribution within the expanding cell cluster. We constructed the in vitro cell cluster on the hydrogel, employed traction force microscopy (TFM) and monolayer stress microscopy (MSM) to visualize the physical forces within the expanding cell monolayer. During the expansion, cells at the cluster edge exhibited enhanced motility and developed focal adhesions that are the essential features of EMT while cells at the core of the cluster maintained the epithelial characteristics. In the aspect of mechanical stress, the cluster edge had the highest traction force of ~90 Pa directed toward the cluster core, which means that cells at the edge actively pull the substrate to make the cluster expansion. The cluster core of the tightly confined cells by neighboring cells had a lower traction force value (~60 Pa) but the highest intercellular normal stress of ~800 Pa because of the accumulation of traction from the edge of the monolayer.

• 에너지공학
• /
• 제29권1호
• /
• pp.75-84
• /
• 2020

본 연구에서는 간단하면서, 효과적이고, 지속가능성이 높은 3차원 프린터를 활용한 마찰 전기 발전기 제작 방식을 소개하고자 합니다. 본 연구는 매크로 사이즈의 표면 패턴을 생성하는 방식으로써, 새롭게 소개되는 마찰전기 발전기 제작 방식입니다. 모든 실험은 특별히 제작된 test-bed에서 수행되었으며, test-bed는 마찰을 일으키는 무게와 빈도수, 상대 습도 등을 조정할 수 있는 실험 환경입니다. 추가적으로, 본 연구를 통하여 본연구진은 어떠한 공정을 거치지 않은 마찰전기 발전기에 비해 공정을 거친 마찰전기 발전기가 1.6배가량 전압의 성능이 향상된 것을 확인하였습니다. 기존의 마이크로 그리고 나노 사이즈의 패턴들과 비교하여 3차원 프린터를 활용한 본 연구의 방식은 제작이 훨씬 빠르고, 용이하며, 대량 생산에 적합한 방법이 될 수 있습니다.

• 전기학회논문지
• /
• 제61권12호
• /
• pp.1828-1835
• /
• 2012

In this paper, a conceptual design and a detailed design of novel cylindrical magnetic levitation stage is introduced. This is came from planar-typed magnetic levitation stage. The proposed stage is composed of cylinder-typed permanent magnet array and semi-cylinder-typed 3 phase winding module. When a proper current is induced at winding module, a magnetic levitation force between the permanent magnet array and winding module is generated. The proposed stage can precisely move the cylinder to rotations and translations as well as levitations with the magnetic levitation force. This advantage is useful to make a nano patterning on the surface of cylindrical specimen by using electron beam lithography under vacuum. Two methods are used to calculate required magnetic levitation forces. The one is 2D FEM analysis, the other is mathematical modeling. This paper shown that results of two methods are similar. An assistant plate is introduced to reduce required currents of winding module for levitations in vacuum. The mathematical model of cylindrical magnetic levitation stage is used for dynamic simulation of magnetic levitations. A lead-lag compensator is used for control of the model. Simulation results shown that the detail designed model of the cylindrical magnetic levitation stage with the assistant plate can be controlled very well.