• 제목/요약/키워드: micro-mechanics

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Deep cavity를 가진 Cap Wafer와 MEMS 소자의 Polymer Wafer bonding (Polymer Wafer bonding of MEMS device and Cap Wafer with deep cavity)

  • 이현기;박태준;윤상기;박남수;박형재;민종환;이영규
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2011년도 제42회 하계학술대회
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    • pp.1702-1703
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    • 2011
  • MEMS 소자의 Wafer level Package 관련하여 Deep cavity를 가진 Cap Wafer와 Polymer bonding 중 cavity 단차로 인한 Polymer Patterning 및 접합 불량의 어려움을 극복할 수 있는 새로운 공정 flow를 제안하였다. Cavity를 형성할 때 사용하는 Si deep etching Mask인 기존의 Photoresist를 접합용 감광성 Polymer로 대체하고, cavity 형성 후, 별도의 추가 공정 없이 이 Polymer를 이용해 Wafer bonding을 진행하였다. 이를 통해 cavity 단차에 따른 문제를 해결함과 동시에 공정이 단순하고 제작 비용이 저렴하며, 신뢰성 있는 Wafer level Package를 구현하였다.

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복합공정을 이용한 스테인레스 박판 마이크로 노즐 어레이 제작 (Fabrication of the Micro Nozzle Arrays on a Stainless Steel Sheet Metal by Using Combined Micro Press and Surface Finishing Process)

  • 박성준;유영석;장현석;김영태;김순영;이상조
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1294-1298
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    • 2005
  • In this study, combined micro press and surface finishing process are proposed to fabricate the micro nozzle array on a stainless steel sheet metal. In micro hole punching process the burr occurs inevitably, but the burr must be minimized in order to improve the quality and accuracy of the product. For this reason, subsequent magnetic field-assisted finishing technique is applied to remove the burr which exists around the nozzles for ink-jet printer head and proved to be a feasible for deburring by experiment. The deburring characteristics of sheet metals were investigated changing with polishing time and magnetic abrasive size. After the deburring, the burr size has remarkably reduced and roundness of the hole also has improved.

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나노 금속잉크의 미세 액적 토출을 이용한 마이크로 패터닝 (Micro Patterning of Conductive Line by Micro Droplet Ejection of Nano Metal Ink)

  • 서상훈;박성준;정현철;정재우
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.689-693
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    • 2005
  • Inkjet printing is a non-contact and direct writing associated with a computer. In the industrial field, there have been many efforts to utilize the inkjet printing as a new way of manufacturing, especially for electronic devices. For the application of inkjet printing to electronic field, one of the key factors is exact realization of designed images into printed patterns. In this work, micro patterning for conducting line has been studied using the piezoelectric print head and silver nano ink. Dimensions of printed images have been predicted in terms of print resolution and diameter of a single dot. The predicted and the measured values showed consistent results. Using the results, the design capability for industrial inkjet printing could be achieved.

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Buckling analysis of linearly tapered micro-columns based on strain gradient elasticity

  • Akgoz, Bekir;Civalek, Omer
    • Structural Engineering and Mechanics
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    • 제48권2호
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    • pp.195-205
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    • 2013
  • The buckling problem of linearly tapered micro-columns is investigated on the basis of modified strain gradient elasticity theory. Bernoulli-Euler beam theory is used to model the non-uniform micro column. Rayleigh-Ritz solution method is utilized to obtain the critical buckling loads of the tapered cantilever micro-columns for different taper ratios. Some comparative results for the cases of rectangular and circular cross-sections are presented in graphical and tabular form to show the differences between the results obtained by modified strain gradient elasticity theory and those achieved by modified couple stress and classical theories. From the results, it is observed that the differences between critical buckling loads achieved by classical and those predicted by non-classical theories are considerable for smaller values of the ratio of the micro-column thickness (or diameter) at its bottom end to the additional material length scale parameters and the differences also increase due to increasing of the taper ratio.

IEEE 802.15.4a 기반의 환경 적응형 위치 추적 시스템에 관한 연구 (Adaptive Indoor Location Tracking System Based on IEEE 802.15.4a)

  • 전현식;우성현;박현주;조상도;나종인;김기환;양창수
    • 한국HCI학회:학술대회논문집
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    • 한국HCI학회 2006년도 학술대회 1부
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    • pp.638-646
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    • 2006
  • 유비쿼터스 시대가 도래함에 따라 사회적으로 실내 위치 추적 시스템에 대한 관심이 증가되었다. 하지만 기존 실내 위치 추적 시스템은 실내 환경의 빈번한 변화에 능동적으로 대응하지 못하고, 실내 환경의 NLOS 특성으로 인하여 이동 객체의 정확한 위치 측정이 어려운 문제점이 있다. 본 연구의 목적은 앞으로 유비쿼터스 시대가 도래함에 따라 다양한 사용자의 요구를 만족시키기 위한 서비스를 제공하는데 필수 요소인 실내 이동 객체의 위치를 효과적으로 파악하고, 이동 객체의 위치 정확도를 향상시킨 환경 적응형 위치 추적시스템을 제안한다.

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Surface and size dependent effects on static, buckling, and vibration of micro composite beam under thermo-magnetic fields based on strain gradient theory

  • Mohammadimehr, Mehdi;Mehrabi, Mojtaba;Hadizadeh, Hasan;Hadizadeh, Hossein
    • Steel and Composite Structures
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    • 제26권4호
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    • pp.513-531
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    • 2018
  • In this article, static, buckling and free vibration analyses of a sinusoidal micro composite beam reinforced by single-walled carbon nanotubes (SWCNTs) with considering temperature-dependent material properties embedded in an elastic medium in the presence of magnetic field under transverse uniform load are presented. This system is used at micro or sub micro scales to enhance the stiffness of micro composite structures such as bar, beam, plate and shell. In the present work, the size dependent effects based on surface stress effect and modified strain gradient theory (MSGT) are considered. The generalized rule of mixture is employed to predict temperature-dependent mechanical and thermal properties of micro composite beam. Then, the governing equations of motions are derived using Hamilton's principle and energy method. Numerical results are presented to investigate the influences of material length scale parameters, elastic foundation, composite fiber angle, magnetic intensity, temperature changes and carbon nanotubes volume fraction on the bending, buckling and free vibration behaviors of micro composite beam. There is a good agreement between the obtained results by this research and the literature results. The obtained results of this study demonstrate that the magnetic intensity, temperature changes, and two parameters elastic foundations have important effects on micro composite stiffness, while the magnetic field has greater effects on the bending, buckling and free vibration responses of micro composite beams. Moreover, it is shown that the effects of surface layers are important, and observed that the changes of carbon nanotubes volume fraction, beam length-to-thickness ratio and material length scale parameter have noticeable effects on the maximum deflection, critical buckling load and natural frequencies of micro composite beams.

Free vibration of Cooper-Naghdi micro saturated porous sandwich cylindrical shells with reinforced CNT face sheets under magneto-hydro-thermo-mechanical loadings

  • Yazdani, Raziye;Mohammadimehr, Mehdi;Navi, Borhan Rousta
    • Structural Engineering and Mechanics
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    • 제70권3호
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    • pp.351-365
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    • 2019
  • In this paper, free vibration of Cooper-Naghdi micro sandwich cylindrical shell with saturated porous core and reinforced carbon nanotube (CNT) piezoelectric composite face sheets is investigated by using first order shear deformation theory (FSDT) and modified couple stress theory (MCST). The sandwich shell is subjected to magneto-thermo-mechanical loadings with temperature dependent material properties. Energy method and Hamilton's principle are used for deriving of the motion equations. The equations are solved by Navier's method. The results are compared with the obtained results by the other literatures. The effects of various parameters such as saturated porous distribution, geometry parameters, volume fraction and temperature change on the natural frequency of the micro-sandwich cylindrical shell are addressed. The obtained results reveal that the natural frequency of the micro sandwich cylindrical shell increases with increasing of the radius to thickness ratio, Skempton coefficient, the porosity of the core, and decreasing of the length to radius ratio and temperature change.

초소형 부품 조작을 위한 Non-stick 마이크로 매니퓰레이션 시스템의 설계 (Design of Non-stick Micromanipulation for Handling of Micro particle)

  • 인용석;김유창;최혁렬;이상무;구자춘
    • 로봇학회논문지
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    • 제4권3호
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    • pp.225-232
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    • 2009
  • In the high precision robot systems, the most popular tasks may be handling of micro-scale objects on a surface such as a micromanipulation robot system. In handling of micro-scale objects, the stiction effect becomes a fundamental issue since the micro-contact mechanics dominates the micromanipulation robot system. In the paper, a theoretical non-stick condition derived from the micro-contact mechanics is carried out for the propose of micro-scale object manipulation. To verify the non-stick condition, a micro-manipulation robot system equipped with a high precision stage system and a microscope system is developed. Experimental results show that the proposed non-stick condition guarantees successful micro-scale object manipulation.

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두 입자의 접촉면에서의 손상역학 해석 (Mechanics of Micro-Damage at Contact portion of Two Grains)

  • 정교철;김원영
    • 지질공학
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    • 제4권2호
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    • pp.231-243
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    • 1994
  • 응력하에서 암석 및 암반의 변형특성의 원인이되는 손상발달에 대한 이해는 지질공학 및 토목공학에 있어서 매우 중요하다. 지금까지의 연구에서 본면 실험전과 후의 관찰로서 응력하의 미소손상발달에 대한 연구는 아직 미미한 실절이다. 그러므로 응력하에서 손상과 정을 직접 관찰하는 것은 매우 중요하다. 본 연구에서는 응력하 중립질 화강암의 미소손상에 대한 보다 정확한 이해를 위해 미소손상집중, 발생 및 진전등에 석영과 장석의 접촉면에서 새로이 개발한 실험장치에의해 상세히 관찰되었다. 그 결과 두입자의 elastic mismatch 와 Hertzian fracture mechanice에 의해 잘 설명된다.

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Nonlinear analysis of viscoelastic micro-composite beam with geometrical imperfection using FEM: MSGT electro-magneto-elastic bending, buckling and vibration solutions

  • Alimirzaei, S.;Mohammadimehr, M.;Tounsi, Abdelouahed
    • Structural Engineering and Mechanics
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    • 제71권5호
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    • pp.485-502
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    • 2019
  • In this research, the nonlinear static, buckling and vibration analysis of viscoelastic micro-composite beam reinforced by various distributions of boron nitrid nanotube (BNNT) with initial geometrical imperfection by modified strain gradient theory (MSGT) using finite element method (FEM) are presented. The various distributions of BNNT are considered as UD, FG-V and FG-X and also, the extended rule of mixture is used to estimate the properties of micro-composite beam. The components of stress are dependent to mechanical, electrical and thermal terms and calculated using piezoelasticity theory. Then, the kinematic equations of micro-composite beam using the displacement fields are obtained. The governing equations of motion are derived using energy method and Hamilton's principle based on MSGT. Then, using FEM, these equations are solved. Finally the effects of different parameters such as initial geometrical imperfection, various distributions of nanotube, damping coefficient, piezoelectric constant, slenderness ratio, Winkler spring constant, Pasternak shear constant, various boundary conditions and three material length scale parameters on the behavior of nonlinear static, buckling and vibration of micro-composite beam are investigated. The results indicate that with an increase in the geometrical imperfection parameter, the stiffness of micro-composite beam increases and thus the non-dimensional nonlinear frequency of the micro structure reduces gradually.