• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.5 s.176
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• pp.1166-1174
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• 2000

In this paper, we introduce a positioner based on magnetic levitation to eliminate the friction which is the most severe effect to limit high resolution on the micro level. Differently from existing electromagnetic device, the proposed positioner consists of air core solenoid and permanent magnet. Although the combination produces small magnetic force, it is suitable for realizing micro motion repeatedly without the accumulation of error because there is no hysteresis caused by ferromagnetic materials, no eddy current loss, no flux saturation. First, the approximate modeling of stiffness and damping effects between the magnetic elements is made and verified experimentally. Then, we have formulated the dynamic equation of one d.o.f magnetic levitation positioner using linear perturbation method and discussed the necessity of optimization for the chief design parameters to maximize the stability performance.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.6
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• pp.871-878
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• 2003

With the development of micro -technology, the demand for micro actual ing device is increasing. But, it is difficult to achieve high resolution and wide bandwidth with the conventional contact systems. So, the contact-free systems which are suspended or levitated by magnetic force or air bearing were proposed. These systems can be applied to high precision stages and alignment apparatuses. This paper describes a magnetically suspended system with four degrees of freedom which are composed of three rotations (roll, pitch, yaw), and one translation ( z). The operating principle and the structure of the system are similar to variable reluctance type electric machines. In this study, the force analysis is executed using magnetic circuit and virtual work principle, and the equations that describe the dynamics of the system are presented. The multivariable PID controller is adapted to the system and the experiment is executed.

• Journal of the Korean Magnetics Society
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• v.20 no.2
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• pp.35-40
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• 2010

The GMR-SV (giant magnetoresistance-spin valve) device depending on the micro patterned features according to two easy directions of longitudinal and transversal axes has been studied. The GMR-SV multilayer structure was Ta(5 nm)/NiFe(8 nm)/Cu(2.3 nm)/NiFe(4 nm)/IrMn(8 nm)/Ta(2.5 nm). The applied anisotropy direction of the GMR-SV thin film was performed under the magnitude of 300 Oe using by permanent magnet during the deposition. The size of micro patterned device was a $1\;{\times}\;18\;{\mu}m^2$ after the photo lithography process. In the aspects of the shape magnetic anisotropy effect, there are two conditions of fabrication for GMR-SV device. Firstly, the direction of sensing current was perpendicular to the magnetic easy axis of the pinned NiFe/IrMn bilayer with the transversal direction of device. Secondly, the direction of shape magnetic anisotropy was same to the magnetic easy axis of the free NiFe layer with the longitudinal direction of device.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.1
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• pp.103-109
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• 2021

Fine chips generated by machining have an impact on machine failure and quality of machined products, it is necessary to remove the chips, so the microchip collection and removal device by rotating conveyor belt with neodymium permanent magnets was developed. In this research, to solve the problem for reducing the existing microchips in the tank, a micro-chip removal device by rotating conveyor belt with neodymium permanent magnets developed. In the development of micro-chip removal device, 3D CATIA modeling was used, and the flow analysis and the electromagnetic force analysis were performed with COMSOL Multiphysics program. To evaluate the performance of the prototypes produced, design of experiments (DOE) is used to obtain the effect of neodymium conveyor movement speed on chip removal for the ANOVA analysis of recovered powders. An experiment was conducted to investigate the effect of the conveyor feed rate on the chip removal performance in detail. As a result of the experiment, it was confirmed that the slower the feeding speed of the fine chip removing device, the more efficient the chip removal.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.782-784
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• 2002

Many compound semiconductors which have high carrier mobility and small band gap have attentive in application of various practical a field. Especially, InSb served for Hall device and magnetic resistor such as magnetic sensor because InSb thin film has high mobility. Many studies on InSb thin film deposition because In and Sb has been very different feature of vapor pressure($10^4$ times) When In and Sb deposited. In this paper studied it In and Sb deposited simultaneously using by method of co-sputtering deposotion. This process, get to effects of manufacture process simplification. After that this paper observed micro structure and electronic behavior of InSb thin film using by co-sputtering.

• Journal of the Korean Magnetics Society
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• v.8 no.4
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• pp.241-248
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• 1998

In accordance with tendency to miniaturization and high frequency operation of electronic products, extensive efforts of miniaturizing magnetic devices such as inductors, transformers and magnetic sensors are being made. In order to study on fabrication and characteristic of micro-magnetic devices, we carried out two sets of experiments. One is to develop a magnetic film that is suitable for high frequency operation, and the other is to develop the fabrication processes for realizing the micro-coil with meander shape. Magnetic films were composed of FeTa(N,C) fabricated by DC magnetron sputtering system. Their microstructures were nanocrystalline structure and magnetic properties showed Bs:13~17 kG, Hc:0.1~0.2 Oe and $\mu$':2000~4000. Cu coil pattern fabricated by selective electroplating process showed good electrical conductivity. In the case of air core inductors, inductance (L) of 50 nH, resonance frequency $(f_R)$ of 700 MHz, and quality factor (Q) of 30 at 200 MHz could be obtained. In the case of close type magnetic inductors, inductance (L) of 150 nH, resonance frequency $(f_R)$ of 100 MHz, and quality factor (Q) of 4 at 10~30 MHz could be obtained.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.23 no.1
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• pp.1-7
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• 2013

The three-dimensional structure of the proteins, including the location of the hydrogen atoms can be analyzed by using neutron diffraction. In order to grow single crystals for neutron diffraction experiments, we developed a simple magnetic field device with the commercial magnets and succeeded in growing hen egg-white lysozyme single crystals of more than 1 $mm^3$ in volume using this device. The crystals grown with a magnetic field were larger and had perfect transparency, whereas the crystals grown without a magnetic field had micro-cracks. The result of the X-ray measurement showed a good resolution and small mosaicity for the crystals grown in the presence of a magnetic field.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.879-884
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• 2007

Flywheel energy storage systems have advantages over other types of energy storage devices in such aspects as unlimited charge/discharge cycles and environmental friendliness. In this paper we propose a millimeter scale flywheel energy storage device. The flywheel is supported by a pair of passive magnetic bearings and rotated by a toroidally wound electric motor/generator. The geometry of the bearings is optimized for the maximum dynamic performance.

• Journal of the Korean Society of Propulsion Engineers
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• v.5 no.3
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• pp.100-107
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• 2001

Miro propulsion device is a literally very small propulsion system The reason why such a small propulsion system is required is that micro satellites are considered as substitutions for conventional satellites to reduce cost; the fabrication of micro satellites enables us to produce mass production Microrockets have relatively high values of thrust/weight ratio due to the cube law; weight is proportional to volume and thrust is proportional to area. Accordingly, downsizing makes the ratio of thrust/weight ratio high However, conventionally ignorable facts are not negligible any more in small scale systems. for chemical micro rockets, downsizing causes lots of heat loss as surface to volume ratio increases, which results in the destruction of radical ions. For thrusters using plasma, the generation of strong magnetic field for plasma is very difficult. Also, in the aspect of flow dynamics, the effects of drag and viscosity are important parameters in low Re flows. When these problems are solved, micro propulsion systems can be commercialized and result in spin-off effects in many fields.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.11
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• pp.918-924
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• 2009

In this paper, we designed micro-structured electromagnetic transducers for energy harvesting and verified the performance of proposed transducers using finite element analysis software, COMSOL Multiphysics. To achieve higher energy transduce efficiency, around the magnetic core material, three-dimensional micro-coil structures with high number of turns are fabricated using semiconductor fabrication process technologies. To find relations between device size and energy transduce efficiency, generated electrical power values of seven different sizes of transducers ($3{\times}3\;mm^2$, $6{\times}6\;mm^2$, $9{\times}9\;mm^2$, $12{\times}12\;mm^2$, $15{\times}15\;mm^2$, $18{\times}18\;mm^2$, and $21{\times}21\;mm^2$) are analyzed on various magnetic flux density environment ranging from 0.84 T to 1.54 T and it showed that size of $15{\times}15\;mm^2$ device can generate $991.5\;{\mu}W$ at the 8 Hz of environmental kinetic energy. Compare to other electromagnetic energy harvesters, proposed system showed competitive performance in terms of power generation, operation bandwidth and size. Since proposed system can generate electric power at very low frequency of kinetic energy from typical life environment including walking and body movement, it is expected that proposed system can be effectively applied to various pervasive computing applications including power source of embodied medical equipment, power source of RFID sensors and etc. as an secondary power sources.