Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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The Design and Control of Contact-free Magnetic Suspension System with Four Degrees of Freedom

4자유도 비접촉 자기 서스펜션 기구의 설계 및 제어

  • 이상헌 (연세대학교 기계공학과 대학원) ;
  • 백윤수 (연세대학교 기계전자공학부)
  • Published : 2003.06.01
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Abstract

With the development of micro -technology, the demand for micro actual ing device is increasing. But, it is difficult to achieve high resolution and wide bandwidth with the conventional contact systems. So, the contact-free systems which are suspended or levitated by magnetic force or air bearing were proposed. These systems can be applied to high precision stages and alignment apparatuses. This paper describes a magnetically suspended system with four degrees of freedom which are composed of three rotations (roll, pitch, yaw), and one translation ( z). The operating principle and the structure of the system are similar to variable reluctance type electric machines. In this study, the force analysis is executed using magnetic circuit and virtual work principle, and the equations that describe the dynamics of the system are presented. The multivariable PID controller is adapted to the system and the experiment is executed.

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References

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