• KIEE International Transactions on Electrophysics and Applications
• /
• 제5C권6호
• /
• pp.264-269
• /
• 2005

The electrostatic comb drive actuator is one of the main building blocks in the field of micro electro-mechanical systems (MEMS). Most of the comb actuators presented previously have fingers that are rectangular in shape which produce a stable, constant force output during actuation. The use of sawtooth fixed fingers in a comb drive, which were presumed to produce an increasing force output with displacement due to the increased number of regions where fringing force, the driving force of comb actuators, appear. The dimensions of the sawtooth were derived from finite element analysis (FEA) of simplified finger models with sawtooth type fingers of various dimension and were compared to the rectangular finger model that showed that the sawtooth type fingers have $7\~9$ times stronger driving force. Finally, comb drive actuators with sawtooth type and rectangular fingers were fabricated and although the gap was bigger, the comb actuator with sawtooth type fingers showed about 1.7 times greater electrostatic force than the one with rectangular fingers at equal driving voltages. In conclusion, using the proposed sawtooth type comb fingers in a comb drive makes it possible to increase its displacement or reduce the driving voltage.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1997년도 추계학술대회 논문집
• /
• pp.539-542
• /
• 1997

We present a micro-positioning stage that has minimized geometrical error and can drive in the 4-axis. This stage divided into two parts: $Z\theta_x$ $\theta_y$, motion stage and$\theta_z$ motion stage. These stages are constructed in flexure hinges, piezoelectric actuators and displacement scnsors. The dynamic model for each stage is obtained and their FE (finite element) models are made. Using the Lagrange's equation, the motion of equation is found. Through the parametric analysis and FE analysis, sensitiv~ty of the design parameters is executed. Finally, fundamental frequencies, maximum stress, and displacement sensitivity for each stage are obtained. We expect that this micro-positioning stage be a useful micro-alignment device for various applications.

• Design & Manufacturing
• /
• 제12권1호
• /
• pp.47-51
• /
• 2018

As the IT industry rapidly progresses, the functions of electronic devices and display devices are integrated with high density, and the model is changed in a short period of time. To implement the integration technology, a uniform micro-pattern implementation technique to drive and control the product is required. The most important technology for the micro pattern generation is the exposure processing technology. Failure to implement the basic pattern in this process cannot satisfy the demands in the manufacturing field. In addition, the conventional exposure method of the mask method cannot cope with the small-scale production of various types of products, and it is not possible to implement a micro-pattern, so an alternative technology must be secured. In this study, the technology to implement the required micro-pattern in semiconductor processing is presented through the photolithography process and plasma etching.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2008년도 춘계학술대회 논문집
• /
• pp.445-446
• /
• 2008

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
• /
• pp.140-140
• /
• 2004

마이크로 기술을 대변하는 Micro-Electro-Mechanical-Systems (MEMS)와 반도체, 각종 micro-sensor 및 actuator 등은 실리콘 위에 박막 코팅한 재료를 주로 사용하고 있다. 따라서 1 Um 이하의 박막코팅에 의해 원하는 성능을 얻으려는 시도가 널리 진행되고 있다 Hard Disk Drive (HDD)의 Head-Disk Interface (HDI)와 MEMS 접촉면에서는 발생하는 마찰 및 마멸에 대한 문제 등은 중요한 고려대상이다. 특히 코팅 층의 표면 파손 현상은 코팅 층의 파손 특성과 코팅 층과 기판 사이의 결합상태가 큰 영향을 미친다.(중략)

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2000년도 추계학술대회논문집
• /
• pp.225-231
• /
• 2000

Nonlinear characteristics of piezoelectric-type micro actuator used for hard disk drives are experimentally analyzed using Hutchinson's Magnum acturator. The nonlinear effects include hysteresis, superharmonic resonance, jump phenomenon, and shifting of natural frequencies. The effects of exciting frequency and input voltage on the nonlinear phenomena are investigated. It is shown that the micro actuator has the typical 3 times superhamonic resonances coupled to both 1st torsional and sway modes of the suspension.

• Journal of Advanced Marine Engineering and Technology
• /
• 제17권3호
• /
• pp.60-69
• /
• 1993

The speed control associated with dc servo motors for direct-drive applications of mobile robot is considered in this study. Robot is moved by power wheeled steering of two dc servo motors mounted to it. In order to cooperate with micro-computer and to achieve the high-performance operation of dc servo motor, speed control system is composed of a digital Phase Locked Loop and H-type drive circuit. And the motor is driven by Pulse Width Modulations. In controlling PWM, it is modified to compose of H-type drive circuit with feedback diodes and switching transistor and design of control sequence so that it may show linear characteristics. As a result, speed characteristics of motor showed linear features. In order to get data on design of PLL control system, the parameters of 80[W[ motor & robot device is measured by simple software control. The PLL speed control system is schemed and designed by leaner drive circuit and measured parameters. A complete speed control system applied to 80[W] dc servo motor showed good linearity, stability and high response. Also, it is verified that the PLL speed control system has good compatibility as a mobile robot driver.

• 한국윤활학회:학술대회논문집
• /
• 한국윤활학회 1999년도 제29회 춘계학술대회
• /
• pp.47-52
• /
• 1999

In recent years, the micro-tribological behavior of silicon has been the topic of much interest. peformance of thin film under light load is important for potential applications in MEMS. In this work under light load and various humidity, the tribological behavior of undulated surface with various width and shape was Investigated. The results show that undulated surface of linear type had good tribological properties abrasive wear occur depending on the sliding condition. Also the effect of humidity on friction and wear was not important if exist undulation. Finally, undulations on HDD were found to be effective in trapping wear particles.

• 대한기계학회논문집B
• /
• 제27권1호
• /
• pp.17-24
• /
• 2003

A mathematical model of the hydrodynamic and heat transfer performances of two-phase flow (gas-liquid) in thin film region of micro channel is proposed. For the formulation of modeling, the flow of the vapor phase and the shear stress at the liquid-vapor interface are considered. In this work, disjoining pressure and capillary force which drive the liquid flow at the liquid-vapor interface in thin film region are adopted also. Using the model, the effects of the variations of channel height and heat flux on the flow and heat transfer characteristics are investigated. Results show that the influence of variation of vapor pressure on the liquid film flow is not negligible. The heat flux in thin-film region is the most important operation factor of micro cooler system.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2003년도 춘계학술대회
• /
• pp.1777-1782
• /
• 2003

This paper presents the design, fabrication, and testing of the capillary-induced pressure drop valve, thermocapillary pumping of liquid droplet in hydrophilic channels and the splitting of droplet. The capillaryinduced pressure drop is derived with thermodynamic approach considering three-dimensional meniscus shape which is essential for calculating pressure drop in the diverging shape channel when the aspect ratio is close to one. The micro channel is fabricated via MEMS processes, which consists of the liquid stop valve to retard the liquid droplet, thermocapillary pumping region and the bifurcation region. Also the micro heaters are fabricated to drive the droplet by thermocapillary. The theoretical approaches agree well with the experimental data. The functionality of capillary valve is confirmed to be valid when the aspect ratio is smaller than one. To overcome the difficulty in splitting of the droplet due to the pressure drop in the general Y-shape channel, the protrusion shape is employed for easy splitting in the bifurcation channel.