• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권6호
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• pp.367-374
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• 2000

This paper presents a method to fabricate freestanding structures by (100) silicon anisotropic etching and nickel electroless plating. The electroless plating process is simpler than the electroplating, and provides good coating uniformity and improved mechanical properties. Furthermore, the (100) silicon anisotropic etching in KOH solution with being aligned to <100> direction provides vertical (100) sidewalls on etched (100) surface. In this paper, the effects of the nickel electroless plating condition on the properties of electroless plated metal structures are investigated to apply fabrication of micro structures and then various micro structures are fabricated by nickel electroless plating. And then, the structures are released by silicon anisotropic etching in KOH solution with a large gap between the structure and the substrate. The fabricated cantilever structures are $210\mum$. wide, $5\mum$. thick and $15\mum$. over the silicon substrate, and the comb structure has the comb electrodes which are $4\mum$. wide and $4.3\mum$. thick separated by$1\mum$. It is released by silicon anisotropic etching in KOH solution. The gap between the structure and the substrate is $2.5\mum$.

• 한국전기전자재료학회논문지
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• 제25권12호
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• pp.955-960
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• 2012

We fabricated piezoelectric unimorph cantilever generators (UCG) using $Pb(Zr_{0.54}Ti_{0.46})O_3$ + 0.2 wt% $Cr_2O_3$ + 1.0 wt% $Nb_2O_5$ (PZCN) piezoelectric thick films, which were produced by a tape casting method. The PZCN thick films were tailored with same width and thickness but different lengths from 7.7 to 57.7 mm in order to evaluate optimized UCG for energy harvesting device applications. When the length of PZCN film was increased, the resonance frequency of UCG was slightly increased from 7 Hz to 8 Hz, which could be due to enlarged area of the highly stiff piezo-ceramic film. However, the output power was proportionally increased with the length of PZCT film and it reached 4.68 mW (1.221 $mW/cm^3$) when the film's length was 57.7 mm under 25 g of tip mass at 8 Hz, which is sufficient for micro-scale device applications.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2005년도 추계종합학술대회
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• pp.147-150
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• 2005

Low actuation voltage and no contact stiction are the important factors to apply MEMS RF switches to mobile devices. Conventional electrostatic MEMS RF switches require several tens of voltages for actuation. In this paper we propose PAS MEMS RF switch which adopt PZT actuators and seesaw cantilevers to meet the above requirements. The fundamental structures of PAS MEMS switch were designed, optimized, and fabricated. Through the developed processes PAS SPDT MEMS RF switches were successfully fabricated on 4" wafers and they showed good electrical properties. The driving voltage was less than 5 volts. And the insertion loss was -0.5dB and the isolation was 35dB at 5GHz. The switching speed was about 5kHz. So these MEMS RF switches can be applicable to mobile communication devices or wireless multi-media devices at lower than 6GHz.

• Structural Engineering and Mechanics
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• 제46권3호
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• pp.417-431
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• 2013

This paper presents responses of the free end of a cantilever micro beam under the effect of an impact force based on the modified couple stress theory. The beam is excited by a transverse triangular force impulse modulated by a harmonic motion. The Kelvin-Voigt model for the material of the beam is used. The considered problem is investigated within the Bernoulli-Euler beam theory by using energy based finite element method. The system of equations of motion is derived by using Lagrange's equations. The obtained system of linear differential equations is reduced to a linear algebraic equation system and solved in the time domain by using Newmark average acceleration method. In the study, the difference of the modified couple stress theory and the classical beam theory is investigated for the wave propagation. A few of the obtained results are compared with the previously published results. The influences of the material length scale parameter on the wave propagation are investigated in detail. It is clearly seen from the results that the classical beam theory based on the modified couple stress theory must be used instead of the classical theory for small values of beam height.

• 한국소음진동공학회논문집
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• 제26권1호
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• pp.5-12
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• 2016

This paper describes the development process for vibration and acoustic characteristics of a balanced armature speaker. The design parameters were chosen in consideration of the influence of the bending stiffness of balanced armature which is the form of a cantilever structure in the speaker. For study of the performance of the speaker according to the design parameters, in the first step, we analyzed the characteristics of the velocity of the diaphragm to the electrical input. Next step, acoustic characteristics were analyzed by structural-acoustic coupled analysis. And the reliability of the analysis was verified by comparing the result of analysis with test results. Finally, we proposed a design method for implementing an enhanced balanced armature speakers through analysis method.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2000년도 Proceedings of 5th International Joint Symposium on Microeletronics and Packaging
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• pp.110-110
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• 2000

Cantilever-shaped lateral field emitters were fabricated and their electrical characteristics were tested. As shown in Fig.1, poly-silicon cantilevers were fabricated by the surface micromachining and they were used to the vacuum magnetic field sensors. The tunneling devices were vacuum sealed with the tubeless packaging method, as shown in Fig.2 and Fig.3. The soda-lime glasses were used for better encapsulation, so the sputtered silicon and the glass layers on the soda-lime glasses were bonded together at 1x10$^{-6}$ Torr. The getter was activated after the vacuum sealing fur the stable emissions. The devices were tested outside of the vacuum chamber. Through vacuum packaging, the tunneling sensors can be utilized. Fig.4 shows that the sensor operates with the switching of the magnetic field. When the magnetic field was applied to the device, the anode currents were varied by the Lorentz force. The difference of anode currents can be varied with the strength of the applied magnetic field.

• Smart Structures and Systems
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• 제20권6호
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• pp.657-668
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• 2017

In this research, an active vibration suppression of a smart beam having piezoelectric sensor and actuators is investigated by designing separate controllers comprising a linear quadratic regulator and a neural network. Firstly, design of a smart beam which consists of a cantilever aluminum beam with surface bonded piezoelectric patches and a designed mechanism having a micro servomotor with a mass attached arm for obtaining variations in the frequency response function are presented. Secondly, the frequency response functions of the smart beam are investigated experimentally by using different piezoelectric patch combinations and the analytical models of the smart beam around its first resonance frequency region for various servomotor arm angle configurations are obtained. Then, a linear quadratic regulator controller is designed and used to simulate the suppression of free and forced vibrations which are performed both in time and frequency domain. In parallel to simulations, experiments are conducted to observe the closed loop behavior of the smart beam and the results are compared as well. Finally, active vibration suppression of the smart beam is investigated by using a linear controller with a neural network based adaptive element which is designed for the purpose of overcoming the undesired consequences due to variations in the real system.

• 한국정밀공학회지
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• 제25권5호
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• pp.77-81
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• 2008

Structural components subjected to high frequency vibrations, such as those used in vibrating parts of gas turbine engines, are usually required to avoid resonance frequencies. Generally, the operating frequency is designed at more than resonance frequencies. When a vibrating structure starts or stops, the structure has to pass through a resonance frequency, which results in large stress concentration. This paper presents the transient thermoelastic stress analysis of vibrating cantilever beam using infrared thermography and finite element method (FEM). In FEM, stress concentration factor at the 2nd resonance vibration mode is calculated by the mode superposition method of ANSYS. In experiment, stress distributions are investigated with infrared thermography and dynamic stress concentration factor is estimated. Experimental result is agreed with FEM result within 10.6%. The advantage of this technique is a better immunity to contact problem and geometric limitation in stress analysis of small or micro structures.

• Structural Engineering and Mechanics
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• 제76권4호
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• pp.451-463
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• 2020

In this paper, a new semi-analytical solution for estimating the pull-in parameters of electrically actuated functionally graded (FG) nanobeams is proposed. All the bulk and surface material properties of the FG nanoactuator vary continuously in thickness direction according to power law distribution. Here, the modified couple stress theory (MCST) and Gurtin-Murdoch surface elasticity theory (SET) are jointly employed to capture the size effects of the nanoscale beam in the context of Euler-Bernoulli beam theory. According to the MCST and SET and accounting for the mid-plane stretching, axial residual stress, electrostatic actuation, fringing field, and dispersion (Casimir or/and van der Waals) forces, the nonlinear nonclassical equation of motion and boundary conditions are obtained derived using Hamilton principle. The proposed semi-analytical solution is derived by employing Galerkin method in conjunction with the Particle Swarm Optimization (PSO) method. The proposed solution approach is validated with the available literature. The freestanding behavior of nanoactuators is also investigated. A parametric study is conducted to illustrate the effects of different material and geometrical parameters on the pull-in response of cantilever and doubly-clamped FG nanoactuators. This model and proposed solution are helpful especially in mechanical design of micro/nanoactuators made of FGMs.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.219-219
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• 2008

Energy harvesting from the environment has been of great interest as a standalone power source of wireless sensor nodes for ubiquitous sensor networks (USN). There are several power generating methods such as thermal gradients, solar cell, energy produced by human action, mechanical vibration energy, and so on. Most of all, mechanical vibration is easily accessible and has no limitation of weather and environment of outdoor or indoor. In particular, the piezoelectric energy harvesting from ambient vibration sources has attracted attention because it has a relative high power density comparing with other energy scavenging methods. Through recent advances in low power consumption RF transmitters and sensors, it is possible to adopt a micro-power energy harvesting system realized by MEMS technology for the system-on-chip. However, the MEMS energy harvesting system hassome drawbacks such as a high natural frequency over 300 Hz and a small power generation due to a small dimension. To overcome these limitations, we devised a novel power generator with a spiral spring structure. In this case, the energy harvester has a lower natural frequency under 200 Hz than a normal cantilever structure. Moreover, it has higher an energy conversion efficient because shear mode ($d_{15}$) is much larger than 33 mode ($d_{33}$) and the energy conversion efficiency is proportional to the piezoelectric constant (d). We expect the spiral type MEMS power generator would be a good candidate as a standalone power generator for USN.