• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.329-332
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• 2002

Recently, most machineries have been small size and mobile type. Then the motors used in this field are developed in micro size such as about 2mm in diameter. The structure of this motor is similar to a general brushless DC motor but because of small sige there is no position sensor such as hall sensor. In this paper, we propose synchronous driving and control method for micro brushless DC motor without position sensor. We design and manufacture this controller and perform experiment to show the effectiveness of the proposed method.

• Proceedings of the KIEE Conference
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• 2005.07b
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• pp.1444-1446
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• 2005

Recently most machineries have been small size and mobile type. And human body insertion type endoscope and micro robot technology has been developed. Then the motors used in this field are developed in micro size such as about 2mm in diameter. The structure of this motor is similar to a general brushless DC(BLDC) motor but because of small size there is no position sensor such as hall sensor. In this paper, a design and fabrication result of an ultra-small brushless DC motor is presented. This motor is designed to 3-phase coreless winding and operated with sensor-less type driver. Test results confirmed the feasibility of the proposed motor drive system design.

• Journal of Advanced Navigation Technology
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• v.14 no.6
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• pp.984-989
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• 2010

In this paper, parallel programming technique by using Java Thread is introduced so as to develop parallel design tool to analyze the small micro flow sensor. To estimate computing time for Thread-level parallelism, the performances of two experimental models for potential problem subject to Thermal transfer equation are examined. As a result, if the number of network PC is increase, computing time for parallelism on network environment is enhanced to be almost n times. The micro sensor design tool based on distributed computing can be utilized to analyze a large scale problem.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.950-952
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• 2003

This paper have been studied fabrication and characteristics of disposable pH sensor using MEMS technology. The sensor has two open-well structure, the container for the internal electrolyte and electrode were formed by anisotropically etching a silicon substrate. unlike currently used KCI saturated solution, the structure was introduced hydrogel which take an advantage of miniaturization, bulk product, a low price. PU and CA/TP used to measurement ion detection, one is reference membrane and the other is pH. fabricated sensor is encapsulated entirely with epoxy, finally sensor was estimated various ion sorts and pH ranges.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.274-274
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• 2008

This paper describes on the fabrication and characteristics of a 3C-SiC (Silicon Carbide) micro pressure sensor for harsh environment applications. The implemented micro pressure sensor used 3C-SiC thin-films heteroepitaxially grown on SOI (Si-on-insulator) structures. This sensor takes advantages of the good mechanical properties of Si as diaphragms fabricated by D-RIE technology and temperature properties of 3C-SiC piezoresistors. The fabricated pressure sensors were tasted at temperature up to $250^{\circ}C$ and indicated a sensitivity of 0.46 mV/V*bar at room temperature and 0.28 mV/V*bar at $250^{\circ}C$. The fabricated 3C-SiC/SOI pressure sensor presents a high-sensitivity and excellent temperature stability.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.9
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• pp.728-732
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• 2008

This paper presents ion-based micro vibration sensor for the ultra-high frequency vibration detection. Presented sensor uses the motion of anion and cation in an electrolyte. Electrolyte vibration sensors have the high shock survival characteristics and a simple read-out circuit because of the small mass and own charges of ions. Presented sensor measures the induced electric potential by the mechanical-electrical coupling. It consist of electrolyte chamber and detection electrode. Electrolyte chamber was fabricated by PDMS molding. Detection electrode was made of gold evaporation on pyrex glass. Size of electrolyte chamber was designed as $600{\times}600{\times}100um$. Detection electrode had 200nm-thick and 42um-gap. In the experimental study, 5.8M sodium Chloride (NaCl) solution was used as electrolyte in 36nl-chamber. Mechanical vibration was measured from 2kHz to 4MHz.

• Smart Structures and Systems
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• v.1 no.1
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• pp.63-82
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• 2005

This paper introduces a technology for robust and low maintenance cost sensor network capable to detect accelerations below a micro-g in a wide frequency bandwidth (above 1,000 Hz). Sensor networks with such performance are critical for navigation, seismology, acoustic sensing, and for the health monitoring of civil structures. The approach is based on the fabrication of an array of high sensitivity accelerometers, each utilizing Fabry-Perot cavity with wavelength-dependent reflectivity to allow embedded optical detection and serialization. The unique feature of the approach is that no local power source is required for each individual sensor. Instead one global light source is used, providing an input optical signal which propagates through an optical fiber network from sensor-to-sensor. The information from each sensor is embedded onto the transmitted light as an intrinsic wavelength division multiplexed signal. This optical "rainbow" of data is then assessed providing real-time sensing information from each sensor node in the network. This paper introduces the Fabry-Perot based accelerometer and examines its critical features, including the effects of imperfections and resolution estimates. It then presents serialization techniques for the creation of systems of arrayed sensors and examines the effects of serialization on sensor response. Finally, a fabrication process is proposed to create test structures for the critical components of the device, which are dynamically characterized.

• Journal of Sensor Science and Technology
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• v.20 no.6
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• pp.363-367
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• 2011

This paper proposes a highly-sensitive gas flow sensor with a simple structure. The sensor is composed of a micro-heater for heating the gas medium and a pair of temperature sensors for detecting temperature differences due to gas flow in a sealed chamber on one axis. Operation of the gas flow sensor depends on the transfer of heat through the air medium. The proposed gas flow sensor has the capability to measure gas flow rates <5 $cm^3$/min with a resolution of approximately 0.01 $cm^3$/min. Furthermore, this paper reports some additional experiment results, including the sensitivity of the proposed gas flow sensor as a function of operating current and the flow of different types of gas(oxygen, carbon dioxide, and nitrogen). The fabrication process of the proposed sensor is very simple, making it a good candidate for mass production.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.12
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• pp.17-23
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• 2003

A sensor array (3${\times}$5$\textrm{mm}^2$ in diaphragm dimension) of 12 sensing clements with different operating temperatures was optimized with respect to thermal operation. This sensor array with single heater on a glass diaphragm over back-etched silicon bulk realizes a novel concept of a sensor array: an array of sensor clements operated at different temperatures can yield more information than single measurement. The proposed micro sensor array could provide well-integrated array structure because it had only single heater at the center of the diaphragm and used the various sensing properties of two kinds of metal oxide layers with various operating temperatures.

• Journal of Institute of Control, Robotics and Systems
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• v.19 no.3
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• pp.219-226
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• 2013

A distortion correction technique is presented to enhance the 3D scanning performance of a micro-size camera-projector system. Recently, several types of micro-size digital projectors and cameras are available. However, there have been few effort to develop a micro-size 3D scanning system. We develop a micro-sized 3D scanning system which is based on the structured light technique. Three images of phase-shifted sinusoidal patterns are projected, captured, and analyzed by the system to reconstruct 3D shapes of very small objects. To overcome inherent optical imperfection of the micro 3D sensor, we correct the vignetting and blooming effects which cause distortions in the phase image. Error analysis and 3D scanning results on small real objects are presented to show the performance of the developed 3D scanning system.