• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1783-1788
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• 2004

In the present paper, a micro flow sensor, which can be used at bio-delivery systems and micro heat pumps, is developed. For this, the micro flow sensor is integrated on a quartz wafer ($SiO_2$) and is manufactured by simple and convenient microfabrication processes. The micro flow sensor aims for measuring mass flow rates in the low range of about $0{\sim}20$ SCCM. The micro flow sensor is composed of temperature sensors, a heater, and a flow microchannel. The temperature sensors and the heater are manufactured by the sputtering processes in this study. In the microfabrication processes, stainless steel masks with different patterns are used to deposit alumel and chromel for temperature sensors and nichrome for the heater on the quartz wafer. The microchannel is made of Polydimethylsiloxane(PDMS) easily. A deposited quartz wafer is bonded to the PDMS microchannel by using the air plasma. Finally, we confirmed the good operation of the present micro flow sensor by measuring flow rate.

• Proceedings of the KSME Conference
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• 2001.06c
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• pp.47-52
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• 2001

Micro-injection molding and microfluidic devices with the help of MEMS technologies including the LIGA process are expected to play important roles in. micro-system industries, in particular the bioapplication industry, in the near future. Understanding fluid flows in micro-channels is important since micro-channels are typical geometry in various microfluidic devices and mold inserts for micro-injection molding. In the present study, both experimental and numerical studies have been carried out to understand the detailed flow phenomena in micro-channel filling process. Three sets of micro-channels of different thickness were fabricated and a flow visualization system was also developed to observe the filling flow into the micro-channels. Experimental flow observations were extensively made to find the effects of channel width and thickness, and effects of surface tension and volume flow rate and so on. And a numerical analysis system has been developed to simulate the filling flow into micro-channels with the surface tension effect taken into account. Discussed are the flow visualization experimental observations along with the predictability of the numerical analysis system.

• Proceedings of the KIEE Conference
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• 1987.07a
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• pp.481-485
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• 1987

The fabrication of a micro mass flow sensor on a silicon chip by means of micro-machining technology is described on this paper. The operation of micro mass flow sensor is based on the heat transfer from a heated chip to a fluid. The temperature differences on the chip is a measure for the flow velocity in a plane parallel with the chip surface. An anisotropic etching technigue was used for the formation of the V-type groove in this fabrication. The micro mass flow sensor is made up of two main parts ; A thin glass plate embodying the connecting parts and mass flow sensor parts in silicon chip. This sensor have a very small size and a neglible dead space. Micro mass flow sensor can fabricate on silicon chip by micro machining technology too.

• Journal of the Korean Society of Visualization
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• v.5 no.1
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• pp.43-48
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• 2007

Micro-PIV(particle image velocimetry) has been widely used to measure the velocity of micro flow. Although this micro-PIV method can give accurate 2D instantaneous velocity information of mea-surement plane, it cannot resolve the out of plane component of velocity vectors. Lots of the micro fluidic devices generate three-dimensional flow and 3D measurement of velocity is useful to understand the physics of micro flow phenomena. In this study, we constructed stereoscopic micro-PIV(SMPIV) system and applied this method to the impinging micro jet flow. The results show that this method can produce accu-rate 3D reconstruction of micro jet flow.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.10
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• pp.1982-1988
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• 2002

Micro-injection molding and microfluidic devices with the help of MEMS technologies including the LIGA process are expected to play important roles in micro-system industries, in particular the bio-application industry, in the near future. Understanding fluid flows in micro-channels is important since micro-channels are typical geometry in various microfluidic devices and mold inserts for micro-injection molding. In the present study, Part 1, an experimental investigation has been carried out to understand the detailed flow phenomena in micro-channel filling process. Three sets of micro-channels of different thickness (40um,30um and 2011m) were fabricated using SU-8 on silicon wafer substrate. And a flow visualization system was developed to observe the filling flow into the micro-channels. Experimental flow observations are extensively made to find the effects of pressure, inertia force, viscous force and surface tension. A dimensional analysis for experimental results was carried out and several relationships A dimensionless parameters are obtained.

• Journal of Institute of Control, Robotics and Systems
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• v.12 no.1
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• pp.85-92
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• 2006

A new silicon micro flow sensor with multiple temperature sensing elements was proposed and fabricated in considering wide range flow velocity measuring device. Thermal mass flow sensor measures the asymmetry of temperature profile around the heater which is modulated by the fluid flow. A micro mass flow sensor was normally composed of a central heater and a pair of temperature sensing elements around it. A new 2-D wide range micro flow sensor structure with three pairs of temperature sensing elements and a central heater was proposed and numerically simulated by Finite Difference Formulation to confirm the feasibility of the wide flow range sensor structure. To confirm the simulation result, the new flow sensor was fabricated on silicon substrate and the basic flow sensing properties of the sensor were measured.

• International Journal of Vascular Biomedical Engineering
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• v.1 no.2
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• pp.30-35
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• 2003

Flow characteristics of blood flow in a micro channel were investigated experimentally using a micro-PIV (Particle Image Velocimetry) velocity field measurement technique. The main objective of this study was to understand the real blood flow in micron-sized blood vessels. The Reynolds number based on the hydraulic diameter of micro-channel for deionized (DI) water was about Re=0.34. For each experimental condition, 100 instantaneous velocity fields were captured and ensemble-averaged to get the spatial distributions of mean velocity. In addition, the motion of RBC (Red Blood Cell) was visualized with a high-speed CCD camera. The captured flow images of nano-scale fluorescent tracer particles in DI water were clear and gave good velocity tracking-ability. However, there were substantial velocity variations in the central region of real blood flow in a micro-channel due to the presence of red blood cells.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.3
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• pp.164-169
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• 2009

The slip velocity and the temperature jumps for low-speed flow in microchannels are investigated using Langmuir slip boundary condition. This slip boundary condition is suggested to simulate micro flow. The current study analyzes Langmuir slip boundary condition theoretically and it analyzed numerically micro-Couette flow, micro-Poiseuille flow and grooved microchannel flow. First, to prove validity for Langmuir slip condition, an analytical solution for micro-Couette flow is derived from Navier-Stokes equations with Langmuir slip conditions and is compared with DSMC and an analytical solution with Maxwell slip boundary condition. Second, the numerical analysis is performed for micro-Poiseuille flow and grooved microchannel flow. The slip velocity and temperature distribution are compared with results of DSMC or Maxwell slip condition and those are shown in good agreement.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.11a
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• pp.178-181
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• 2011

Recently, micro shock tube is being extensively used in various fields of engineering applications. The flow characteristics occurring in the micro shock tube may be significantly different from that of conventional macro shock tube due to very low Reynolds number and Knudsen number effects which are, in general, manifested in such flows of rarefied gas, solid-gas two-phase, etc. In these situations, Navier-Stokes equations cannot properly predict the micro shock tube flow. In the present study, a two-dimensional CFD method has been applied to simulate the micro shock tube, with slip velocity and temperature jump boundary conditions. The effects of wall thermal conditions on the unsteady flow in the micro shock tube were also investigated. The unsteady behaviors of shock wave and contact discontinuity were, in detail, analyzed. The results obtained show much more attenuation of shock wave, compared with macro-shock tubes.

• 유체기계공업학회:학술대회논문집
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• 2006.08a
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• pp.301-304
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• 2006

This paper presents a review of the important recent literature available in the area of micro-channel flow analysis and mixing. The topics covered include the physics of flows in micro-channels and integrated simulation of micro-channel flows. Also the flow control models and electro-kinetically driven micro-channel flows are explained. A comparison of various mixing principles in micro-channels are provided in sufficient detail.