• Proceedings of the KIEE Conference
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• 2005.07b
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• pp.1444-1446
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• 2005

Recently most machineries have been small size and mobile type. And human body insertion type endoscope and micro robot technology has been developed. Then the motors used in this field are developed in micro size such as about 2mm in diameter. The structure of this motor is similar to a general brushless DC(BLDC) motor but because of small size there is no position sensor such as hall sensor. In this paper, a design and fabrication result of an ultra-small brushless DC motor is presented. This motor is designed to 3-phase coreless winding and operated with sensor-less type driver. Test results confirmed the feasibility of the proposed motor drive system design.

• Journal of the Microelectronics and Packaging Society
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• v.6 no.4
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• pp.1-7
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• 1999

We developed Fabrication process of embedded passive components in MCM-D substrate. The proposed MCM-D substrate is based on Cu/photosensitive BCB multilayer. The substrate used is Si wafer and Ti/cu metallization is used to form the interconnect layer. Interconnect layers are formed with 1000$\AA$ Ti/3000$\AA$ Cu by sputtering method and 3$\mu\textrm{m}$ Cu by electrical plating method. In order to form the vias in photosensitive BCB layer, the process of BCB and plasma etch using $C_2F_6$ gas were evaluated. The MCM-D substrate is composed of 5 dielectric layers and 4 interconnect layers. Embedded resistors are made with NiCr and implemented on the $2^{nd}$ dielectric layer. The sheet resistance of NiCr is controlled to be about 21 $\Omega$/sq at the thickness of 600$\AA$. The multi-turn sprial inductors are designed in coplanar fashion on the $4^{th}$ interconnect layer with an underpass from the center to outside using the lower $3^{rd}$ interconnect layer. Capacitors are designed and realized between $1^{st}$ interconnect layer and $2^{nd}$ interconnect layer. An important issue in capacitor is the accurate determination of the dielectric thickness. We use the 900$\AA$ thickness of PECVD silicon nitride film as dielectric. Capacitance per unit area is about 88nF/$\textrm {cm}^2$at the thickness of 900$\AA$. The advantage of this integration process is the compatibility with the conventional semiconductor process due to low temperature PECVD silicon nitride process and thermal evaporation NiCr process.

• Journal of Sensor Science and Technology
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• v.23 no.3
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• pp.165-169
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• 2014

An existing infrared (IR) analysis system is generally composed of infrared source, IR focusing lenses, IR detector, and optical chopper. An optical chopper is widely used in combination with lock-in amplifier to improve the signal-to-noise ratio by periodically interrupting incident light beam. During recent years, a few researches on miniaturized optical chopper have been reported to apply to micro-scaled optical systems. In this paper, a micro optical chopper operated by electromagnetic actuation is proposed and applied to a miniaturized micro-scaled optical system operating in IR spectral range. Additionally, the fabrication method of the proposed micro chopper is demonstrated. The proposed micro optical chopper is composed of the polydimethylsiloxane (PDMS) membrane, solenoid, and permanent magnet. The permanent magnet is bonded on the PDMS membrane using an ultraviolet-activated adhesive. The operation of the chopper is based on the attractive and repulsive forces between permanent magnet and solenoid induced by an electrical current flowing through the solenoid. The fabricated micro optical chopper could operate up to 200 Hz of frequency. The maximum operating distance of the chopper with 7mm diameter membrane was $750{\mu}m$ at 100 Hz of frequency.

• Proceedings of the IEEK Conference
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• 2004.08c
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• pp.477-481
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• 2004

High Quality CD, OAT audio requires that large amount of data. Currently, multi channel preference has been rapidly propagated among latest users. The MPEG(Moving Picture Expert Group) is provides data compression technology of sound and image system. The MPEG standard provides multi channel and 5.1 sounds, using the same audio algorithm as MPEG-l. And MPEG-2 audio is forward and backward compatible. The MDCT (Modified Discrete Cosine Transform) is a linear orthogonal lapped transform based on the idea of TDAC(Time Domain Aliasing Cancellation). In this paper, we proposed the micro-program type vector processor architecture a benefit in MDCT/IMDCT of MPEG-II AAC. And it's reduced operating coefficient by overlapped area to bind. To compare original algorithm with optimized algorithm that cosine coefficient reduced $0.5\%$multiply operating $0.098\%$ and add operating 80.58\%$. Algorithm test is used C-language then we designed hardware architecture of micro-programmed method that applied to optimized algorithm. This processor is 20MHz operation 5V.

• Journal of the Korean Institute of Telematics and Electronics
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• v.27 no.6
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• pp.871-878
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• 1990

The control method which electrically subdivides 1 step(1.8\ulcornerstep) of a PM step motor into 64 micro-step (0.028\ulcornerstep) is realized using micro-step algorithm on the basis of the look up table method and the position and velocity control using Z-80 microprocessor is also realized. With micro-stepping. The resolution of the system is improved, also by micro-step control of driving-current of the step motro, which is followed by the increase of micro-step subdivision-coefficient, the precise position and velocity control of step-motor can be realized and the stabilization of the system is improved.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.1023-1025
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• 1998

This paper presents the fabrication of a micro pump consisting of a pair of Al f1ap wave and a phase change actuator. The phase change actuator is composed of a heater, a silicone rubber diaphragm and a working liquid chamber. The diaphragm is actuated by the evaporation and the condensation of the working liquid. The actuator pumps fluid through the valves. The micro pump is fabricated by the anisotropic etch, the boron deposition and the metal evaporation. The forward and the backward flow characteristics of the f1ap valves were obtained. Also, the flow rate of the micro pump has been measured. When the square wave input of 12 V, 60% duty ratio and 0.2 Hz is applied, the average flow rate is $0.15{\mu}{\ell}/sec$ for zero pressure difference.

• 한국가시화정보학회:학술대회논문집
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• 2001.12a
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• pp.44-52
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• 2001

A micro-PIV(particle image velocimetry) measurement has been conducted to investigate flow fields in such microfluidic devices as microchannels and micronozzle. The present study employs a state-of-art micro-PIV system which consists of epi-fluorescence microscope, 620nm diameter fluorescent seed particles and an 8-bit megapixel CCD camera. Velocity vector fields with a resolution of $6.8\;\times\;6.8{\mu}m$ has been obtained, and the attention has been paid on the effect of varying measurement conditions of particle diameter and particle concentration on the resulting PIV results. In this study, the microfluidic elements were fabricated on plastic chips by means of MEMS processes and a subsequent molding process. Flow fields in a variety of microchannels as well as micronozzle have been investigated.

• Proceedings of the KIEE Conference
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• 2002.11d
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• pp.240-242
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• 2002

Recently, most machineries have been small size and mobile type. And human body insertion type endoscope and micro robot technology has been developed. Then the motors used in this field are developed in micro size such as about 2mm in diameter. The structure of this motor is similar to a general brushless DC(BLDC) motor but because of small size there is no position sensor such as hall sensor. In this paper, we propose synchronous driving method for micro BLDC motor without position sensor. We design and manufacture this driver and perform experiment to show the effectiveness of the proposed method.

• Proceedings of the Korean Magnestics Society Conference
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• 2003.12a
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• pp.265-265
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• 2003

• Proceedings of the IEEK Conference
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• 2006.06a
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• pp.641-642
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• 2006

Two-dimensional (2D) photonic quasicrystals (PQCs) were fabricated by a holographic nanolithography techniques. Using two laser beams with different angles incident on the sample, micro-cavities with 2D internal nanostructures are patterned with a few micrometer periods.