• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 B
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• pp.1444-1446
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• 2005

Recently most machineries have been small size and mobile type. And human body insertion type endoscope and micro robot technology has been developed. Then the motors used in this field are developed in micro size such as about 2mm in diameter. The structure of this motor is similar to a general brushless DC(BLDC) motor but because of small size there is no position sensor such as hall sensor. In this paper, a design and fabrication result of an ultra-small brushless DC motor is presented. This motor is designed to 3-phase coreless winding and operated with sensor-less type driver. Test results confirmed the feasibility of the proposed motor drive system design.

• 마이크로전자및패키징학회지
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• 제6권4호
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• pp.1-7
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• 1999

MCM-D 기판에 수동소자를 내장시키는 공정을 개발하였다. MCM-D 기판은 Cu/감광성 BCB를 각각 금속배선 및 절연막 재료로 사용하였고, 금속배선은 Ti/cu를 각각 1000$\AA$/3000$\AA$으로 스퍼터한 후 fountain 방식으로 전기 도금하여 3 um Cu를 형성하였으며, BCB 층에 신뢰성있는 비아형성을 위하여 BCB의 공정특성과 $C_2F_6$를 사용한 플라즈마 cleaning영향을 AES로 분석하였다. 이 실험에서 제작한 MCM-D 기판은 절연막과 금속배선 층이 각각 5개, 4개 층으로 구성되는데 저항은 2번째 절연막 위에 thermal evaporator 방식으로 NiCr을 600$\AA$증착하여 시트저항이 21 $\Omega$/sq가 되게 형성하였고. 인덕터는 coplanar 구조로 3, 4번째 금속배선층에 형성하였으며, 커패시터는 절연막으로 PECVD $Si_3N_4$를 900$\AA$증착한 후 1, 2번째 금속배선층에 형성하여 88nF/$\textrm {cm}^2$의 커패시턴스를 얻었다. 이 공정은 PECVD $Si_3N_4$와 thermal evaporation NiCr 공정을 이용함으로써 기존의 반도체 공정을 이용하여 MCM-D 기판에 수동소자를 안정적으로 내장시킬 수 있었다.

• 센서학회지
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• 제23권3호
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• pp.165-169
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• 2014

An existing infrared (IR) analysis system is generally composed of infrared source, IR focusing lenses, IR detector, and optical chopper. An optical chopper is widely used in combination with lock-in amplifier to improve the signal-to-noise ratio by periodically interrupting incident light beam. During recent years, a few researches on miniaturized optical chopper have been reported to apply to micro-scaled optical systems. In this paper, a micro optical chopper operated by electromagnetic actuation is proposed and applied to a miniaturized micro-scaled optical system operating in IR spectral range. Additionally, the fabrication method of the proposed micro chopper is demonstrated. The proposed micro optical chopper is composed of the polydimethylsiloxane (PDMS) membrane, solenoid, and permanent magnet. The permanent magnet is bonded on the PDMS membrane using an ultraviolet-activated adhesive. The operation of the chopper is based on the attractive and repulsive forces between permanent magnet and solenoid induced by an electrical current flowing through the solenoid. The fabricated micro optical chopper could operate up to 200 Hz of frequency. The maximum operating distance of the chopper with 7mm diameter membrane was $750{\mu}m$ at 100 Hz of frequency.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2004년도 학술대회지
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• pp.477-481
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• 2004

High Quality CD, OAT audio requires that large amount of data. Currently, multi channel preference has been rapidly propagated among latest users. The MPEG(Moving Picture Expert Group) is provides data compression technology of sound and image system. The MPEG standard provides multi channel and 5.1 sounds, using the same audio algorithm as MPEG-l. And MPEG-2 audio is forward and backward compatible. The MDCT (Modified Discrete Cosine Transform) is a linear orthogonal lapped transform based on the idea of TDAC(Time Domain Aliasing Cancellation). In this paper, we proposed the micro-program type vector processor architecture a benefit in MDCT/IMDCT of MPEG-II AAC. And it's reduced operating coefficient by overlapped area to bind. To compare original algorithm with optimized algorithm that cosine coefficient reduced $0.5\%$multiply operating $0.098\%$ and add operating 80.58\%$. Algorithm test is used C-language then we designed hardware architecture of micro-programmed method that applied to optimized algorithm. This processor is 20MHz operation 5V.

• 대한전자공학회논문지
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• 제27권6호
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• pp.871-878
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• 1990

The control method which electrically subdivides 1 step(1.8\ulcornerstep) of a PM step motor into 64 micro-step (0.028\ulcornerstep) is realized using micro-step algorithm on the basis of the look up table method and the position and velocity control using Z-80 microprocessor is also realized. With micro-stepping. The resolution of the system is improved, also by micro-step control of driving-current of the step motro, which is followed by the increase of micro-step subdivision-coefficient, the precise position and velocity control of step-motor can be realized and the stabilization of the system is improved.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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• pp.1023-1025
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• 1998

This paper presents the fabrication of a micro pump consisting of a pair of Al f1ap wave and a phase change actuator. The phase change actuator is composed of a heater, a silicone rubber diaphragm and a working liquid chamber. The diaphragm is actuated by the evaporation and the condensation of the working liquid. The actuator pumps fluid through the valves. The micro pump is fabricated by the anisotropic etch, the boron deposition and the metal evaporation. The forward and the backward flow characteristics of the f1ap valves were obtained. Also, the flow rate of the micro pump has been measured. When the square wave input of 12 V, 60% duty ratio and 0.2 Hz is applied, the average flow rate is $0.15{\mu}{\ell}/sec$ for zero pressure difference.

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2001년도 Proceedings of 2001 Korea-Japan Joint Seminar on Particle Image Velocimetry
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• pp.44-52
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• 2001

A micro-PIV(particle image velocimetry) measurement has been conducted to investigate flow fields in such microfluidic devices as microchannels and micronozzle. The present study employs a state-of-art micro-PIV system which consists of epi-fluorescence microscope, 620nm diameter fluorescent seed particles and an 8-bit megapixel CCD camera. Velocity vector fields with a resolution of $6.8\;\times\;6.8{\mu}m$ has been obtained, and the attention has been paid on the effect of varying measurement conditions of particle diameter and particle concentration on the resulting PIV results. In this study, the microfluidic elements were fabricated on plastic chips by means of MEMS processes and a subsequent molding process. Flow fields in a variety of microchannels as well as micronozzle have been investigated.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 추계학술대회 논문집 전기기기 및 에너지변환시스템부문
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• pp.240-242
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• 2002

Recently, most machineries have been small size and mobile type. And human body insertion type endoscope and micro robot technology has been developed. Then the motors used in this field are developed in micro size such as about 2mm in diameter. The structure of this motor is similar to a general brushless DC(BLDC) motor but because of small size there is no position sensor such as hall sensor. In this paper, we propose synchronous driving method for micro BLDC motor without position sensor. We design and manufacture this driver and perform experiment to show the effectiveness of the proposed method.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2003년도 somma/kms meeting
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• pp.265-265
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• 2003

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2006년도 하계종합학술대회
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• pp.641-642
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• 2006

Two-dimensional (2D) photonic quasicrystals (PQCs) were fabricated by a holographic nanolithography techniques. Using two laser beams with different angles incident on the sample, micro-cavities with 2D internal nanostructures are patterned with a few micrometer periods.