• Journal of Electrical Engineering and Technology
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• v.1 no.2
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• pp.263-267
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• 2006

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.109.1-109
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• 2002

This paper presents a macro/micro flip chip mounting head system for precise force control. In the proposed macro/ micro system, the macro actuator is conventional do servomotor with a ball screw mechanism and the micro actuator is a voice coil motor(VCM) that consists of four NdFeB magnets and a winded moving coil. For force control, a sensitive strain-gauge force sensor is mounted in the micro actuator. Through harmonic motion between macro and micro actuator, we would like to get precise contact force control when small sized flip chip is mounted on flexible substrate in high speed. In order to show the effectiveness of the proposed macro/micro flip chip mounting head system, we com...

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.848-853
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• 2001

Electrostatic actuation was adopted for ease of fabrication. We proposed a new driving scheme that uses the vector sum of force generated by comb-finger and by parallel plate. The moving and fixed electrodes are arranged to maximize the driving force. In this paper, an electrostatic field analysis is performed by Maxwell analysis tool for micro actuators. From the analysis, a comb-parallel type micro-actuator with 4${\mu}{\textrm}{m}$ width, 6${\mu}{\textrm}{m}$ overlap and 45${\mu}{\textrm}{m}$ height could be designed. In order to compare the new type of actuator with the conventional comb type of actuator, we arranged that both types have the same area and the same number of actuators. To make a high aspect ratio structure, we are developing fabrication process using SU-8 and electro-plating.

• Journal of Sensor Science and Technology
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• v.25 no.6
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• pp.399-405
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• 2016

Scent diffuser using micro-pore piezo actuator achieved a commercial success because of its cheap production cost, but it is easy to be use for IT-based contents due to difficulty of scent intensity control. To solve this problem, we control the emission amount of scent diffuser by changing amplitude and frequency of input voltage applied to micro-pore piezo actuator. And, we analyzed the effect of density of cotton core on emission amount and a relationship between hole-size of mesh in piezo actuator and viscosity of scents to design a mechanically optimal scent device.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1060-1065
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• 2003

This paper contributes to development of a new chip mounting head system for flip chip. Recently, the LDM(Linear DC Motor) has been widely used, because it has particular merits than the rotary type motors. In this paper, we proposed a macro/micro positioning system for force control of a chip mounting system. In the proposed macro/micro system, the macro actuator provide the system with a gross motion while the micro device yields fine tuned motion to reduce the harmful impact force that occurs between very small sized electronic parts and PCB surface. In order to prove the effectiveness of the proposed macro/micro chip mounting system, we compared the proposed chip mounting head with the conventional chip mounting head equipped with a macro actuator only. A series of experiments were executed under the mounting conditions of various access velocities and PCB stiffness. As a result of this study, a satisfactory voice coil actuator as the micro actuator has been developed, and its performance meet well the specifications desired for the design of the chip mounting head system and show good correspondence between theoretical analysis and experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.926-929
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• 2000

As the track density of hard disk drives increases, there is a need for more precise actuation of the head. This can be accomplished by using a high band width micro-actuator. In this work, the flying characteristics of sliders with micro-actuators are investigated with the aim to optimize the head/disk interface performance of such sliders. Contact-start-stop, sweep, and flying height tests are performed and analyzed. The results show that the MEMS based micro-actuator mounted on a slider possess acceptable flying characteristics.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.9
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• pp.96-100
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• 2001

As the track density of hard disk drives increases, there is a need for more precise actuation of the head. This can be accomplished by using a high band width micro-actuator. In this work, the flying characteristics of sliders with micro-actuators are investigated with the aim to optimize the head/disk interface performance of such sliders. Contact-start-stop, sweep, and flying height tests are performed and analyzed. The results show that the MEMS based micro-actuator mounted on a slider possess acceptable flying characteristics.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.735-740
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• 2001

With the development of micro-technology, the demand for micro actuator is increasing. But, it is difficult to achieve high resolution and long travel range simultaneously with the conventional actuators. So, the noncontact surface actuator was proposed. This actuator can realize high dynamic range and the planar motion without complex cross-axis linear slides. This paper describes a magnetically suspended linear actuator for developing a non-contact surface actuator. The operating principle and the structure of the proposed linear actuator are similar to switched reluctance motor, but the proposed linear actuator utilizes normal force and propulsion force simultaneously. With this characteristic, the system can be simpler than other non-contact surface actuator.

• Transactions of the Society of Information Storage Systems
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• v.4 no.1
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• pp.6-12
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• 2008

The paper deals with the numerical analysis and design optimization of polysilicon micro thermal flexure actuator. The deflection of a thermal actuator is implicitly related to the actuation time so that such deflection is to be maximized under the consideration of structural performances such as maximum stress and natural frequencies. At first, the structural formulation of a thermal actuator is reviewed, and its CAE based simulation is performed to verify the numerical model. A parametric study is then conducted to identify the mainly effective design variables. Finally, the design of a micro thermal actuator is explored in the context of deterministic optimization and reliability based design optimization in the present study.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1286-1289
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• 2004

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene(PVDF-TrFE). The large difference of coefficient of thermal expansion(CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a large deflection with relatively small temperature rising. Compared to the most conventional micro actuators based on MEMS(micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. The proposed actuator can find applications where a large vertical displacement is needed while keeping compact overall device size, such as a micro zooming lens.