• 제목/요약/키워드: micro 3D sensor

검색결과 60건 처리시간 0.027초

다단계 온도 감지막을 가진 마이크로 흐름센서의 열전달 특성 (Thermal Flow Characteristics of a New Micro Flow Sensor with Multiple Temperature Sensing Elements)

  • 김태용;정완영
    • 한국정보통신학회논문지
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    • 제9권3호
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    • pp.595-600
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    • 2005
  • 마이크로 흐름센서는 반도체 집적기술을 이용할 수 있어, 소형으로 제작이 가능하며 빠른 응답특성을 가져 다양한 분야에 응용되고 있다. 본 연구에서는 넓은 흐름의 세기 영역에서 정밀한 감도를 가지는 2차원의 마이크로 흐름센서를 실리콘 기판위에 적충시켜 제작하였다. 흐름센서의 중앙에 하나의 히터와 양측에 온도를 검출할 수 있는 3쌍의 감지막을 가진 새로운 센서 구조를 제안하고, 온도 검출에 대한 성능평가를 위하여 시간영역에서의 유한차분법을 이용하여 공기흐름의 세기 변화에 따른 온도분포를 계산하였다. 계산결과를 통하여 실제 흐름센서의 동작을 정량적으로 분석하였다.

수송기계 엔진용 3C-SiC 마이크로 압력센서의 제작

  • 한기봉;정귀상
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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    • pp.10-13
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    • 2006
  • This paper describes on the fabrication and characteristics of a 3C-SiC (Silicon Carbide) micro pressure sensor for harsh environment applications. The implemented micro pressure sensor used 3C-SiC thin-films heteroepitaxially grown on SOI (Si-on-insulator) structures. This sensor takes advantages of the good mechanical properties of Si as diaphragms fabricated by D-RIE technology and temperature properties of 3C-SiC piezoresistors. The fabricated pressure sensors were tasted at temperature up to $250^{\circ}C$ and indicated a sensitivity of 0.46 mV/V*bar at room temperature and 0.28 mV/V*bar at $250^{\circ}C$. The fabricated 3C-Sic/SOI pressure sensor presents a high-sensitivity and excel lent temperature stability.

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열운송 방정식을 이용한 마이크로 흐름센서의 온도특성 해석 (Temperature Property Analysis of Micro Flow Sensor using Thermal Transfer Equation)

  • 김태용;정완영
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2005년도 춘계종합학술대회
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    • pp.363-366
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    • 2005
  • 마이크로 흐름센서는 종래의 반도체 집적회로 공정기술을 이용하여 소형으로 제작이 가능하며, 빠른 응답특성으로 다양한 응용이 기대되고 있다. 본 연구에서는 넓은 흐름의 세기 영역에서 정밀한 감도를 가지는 2차원 마이크로 흐름센서를 실리콘 기판위에 설계하였다. 흐름센서 중앙에 하나의 히터와 양측에 3쌍의 온도 감지막을 가진 새로운 구조를 제안하고, 제안된 구조의 성능평가를 위해 유한차분법을 이용하석 열운송방정식을 시간영역에서 해석하였다. 성능평가는 제안된 흐름센서 모델에 대하여 공기흐름의 세기 변화에 따른 온도분포를 계산함으로써 실제 흐름센서의 동작을 정량적으로 분석하였다.

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3-D 유체집속효과와 레이저 중합반응을 이용한 PDA 센서 미세섬유 제작 (On-Chip Fabrication of PDA Sensor Fiber Using Laser Polymerization and 3-D Hydrodynamic Focusing)

  • 유임성;송시몬
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2008년도 추계학술대회B
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    • pp.2692-2695
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    • 2008
  • Polydiacetylene (PDA) is chemosensor materials that exhibit non-fluorescent-to-fluorescent transition as well as blue-to-red visible color change upon chemical or thermal stress. They have been studied in forms of film or microarray chip, so far. In this paper, we provide a novel technique to fabricate continuous micro-fiber PDA sensor using in-situ laser-polymerization technique and 3-D hydrodynamic focusing on a microfluidic chip. The flow of a monomer solution with diacetylene (DA) monomer is focused by a sheath flow on a 3-D microfluidic chip. The focused flow is exposed to 365 nm UV laser beam for in-situ polymerization which generates a continuous fiber containing DA monomers. Then, the fiber is exposed to 254 nm UV light to polymerize DA monomers to PDA. Preliminary results indicate that the fiber size can be controlled by the flow rates of the monomer solution and sheath flows and that a PDA sensor fiber successively responds to chemical and thermal stress.

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전자기파의 감쇠패턴 및 깊이 정보 취득을 이용한 수중 위치추정 기법 (Underwater Localization using EM Wave Attenuation with Depth Information)

  • 곽경민;박대길;정완균;김진현
    • 로봇학회논문지
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    • 제11권3호
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    • pp.156-162
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    • 2016
  • For the underwater localization, acoustic sensor systems are widely used due to greater penetration properties of acoustic signals in underwater environments. On the other hand, the good penetration property causes multipath and interference effects in structured environment too. To overcome this demerit, a localization method using the attenuation of electro-magnetic(EM) waves was proposed in several literatures, in which distance estimation and 2D-localization experiments show remarkable results. However, in 3D-localization application, the estimation difficulties increase due to the nonuniform (doughnut like) radiation pattern of an omni-directional antenna related to the depth direction. For solving this problem, we added a depth sensor for improving underwater 3D-localization with the EM wave method. A micro scale pressure sensor is located in the mobile node antenna, and the depth data from the pressure sensor is calibrated by the curve fitting algorithm. We adapted the depth(z) data to 3D EM wave pattern model for the error reduction of the localization. Finally, some experiments were executed for 3D localization with the fast calculation and less errors.

미곡(米穀) 상온통풍건조(常温通風乾燥)의 자동제어용(自動制御用) 곡물(穀物) 함수율(含水率) 측정(測定)센서 개발(開發) (Development of a Grain Moisture Content Measurement Sensor for Automatic Control of Rough Rice Drying by Natural Air)

  • 김태곤;장동일;김만수;김태균;홍순호
    • Journal of Biosystems Engineering
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    • 제13권3호
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    • pp.52-58
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    • 1988
  • This study was conducted to develop a grain moisture content measurement sensor for automatic control of rough rice drying by natural air. For the above objective, the electrod type sensor was designed and tested. The sensor was able to produce electrical resistance which changes with moisture content of grain. An A/D converter and a micro-computer wed for processing measurement data of sensor. The developed sensor satisfied most design requirements and the results of statistical analysis show that there it no difference between the measurement method of sensor developed and of the dry-oven. Using the developed sensor and measurement system, we are able to measure moisture content of rough rice automatically in drying by natural air.

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전기화학적 금속 3D 프린터의 적층 조건 연구를 통한 마이크로 코일 제작 (The Micro Coil Production through Research on the Additive Conditions of Electrochemical Metal 3D Printer)

  • 김영국;강동화;김성빈;유봉영
    • 한국표면공학회지
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    • 제53권4호
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    • pp.138-143
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    • 2020
  • In this study, we produced a coil of micro-pattern that can be used for electromagnetic wave absorber, heating material, wireless charging, sensor, antenna, etc. by using electrochemical additive manufacturing method. Currently, it contains research contents for manufacturing a micro pattern coil having practicality through control of process control variables such as applied voltage, distance between electrode, and nozzle injection. Circulation of the electrolyte through the nozzle injection control can significantly contribute to improving the surface characteristics of the coil because of minimizing voltage fluctuations that may occur during the additive manufacturing process. In addition, by applying the pulse method in the application of voltage, the lamination characteristics of the plated body were improved, which showed that the formation of a fine line width plays an important role in the production of a micro pattern coil. By applying the pulse signal to the voltage application, the additive manufacturing characteristics of the produced product were improved, and it was shown that the formation of a fine line width plays an important role in the production of a micro pattern coil.

Acridine Fluorescence Behaviors in Different Polymeric Microenvironments Directed by C2-Proton-Acidity of Imidazolium-Based Ionic Liquids

  • Ji, Myoung-Jin;Kim, Jong-Gyu;Shin, Ueon-Sang
    • Bulletin of the Korean Chemical Society
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    • 제33권8호
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    • pp.2489-2493
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    • 2012
  • A new fluorescent system (acridine/RTIL hybrid gel) confined in the 3D micro-structure of a poly(lactic acid) membrane were prepared from 1-butyl-3-methylimidazolium-based ionic liquids ([bmim]X (X = $SbF_6$, $NTf_2$, Cl); RTILs), poly(lactic acid) (PLA), and acridine via the sol-gel route. SEM images showed that, in the presence of [bmim]$SbF_6$ and [bmim]$NTf_2$, 3D-ly paticulated structures were created inside the PLA membranes and acridine/RTIL hybrid gels were confined in gabs of particulates. However, the use of [bmim]Cl induced the formation of a 3D-ly porous structure containing the hybrid gel of acridine/[bmimCl in the micropores. The three fluorescent systems exhibited different fluorescence behaviors (fluorescence maximum and intensity) depending on the C2-H acidity scale of the RTILs (or their anion type). Acridine gels hybridized with [bmim]$SbF_6$ and [bmim]$NTf_2$ showed blue fluorescence with relative high intensity, whereas the hybrid gel with [bmim]Cl exhibited almost no fluorescence under dry conditions. However, the acridine/[bmim]Cl hybrid system in the micro-porous PLA membrane started to emit fluorescent light under humid conditions and showed a possible response, indicating that it could be applied as a humidity sensor.

마이크로 스테퍼를 활용한 역설계 시스템 구축 (The Construction of Reverse Engineering System Appling Micro Stepper)

  • 김수용;김민주;이승수;김순경;전언찬
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.194-197
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    • 2004
  • This paper is to develop of 3D reverse engineering equipment. The existing equipment didn't use in the field popularly as it is too expensive. So in this study, we build the reverse engineering system of simple construction using a LM guide and a laser sensor. Therefore we measured product using this equipment, this result compared with the CAD date.

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Thermo-optic Characteristics of Micro-structured Optical Fiber Infiltrated with Mixture Liquids

  • Wang, Ran;Wang, Yuye;Miao, Yinping;Lu, Ying;Luan, Nannan;Hao, Congjing;Duan, Liangcheng;Yuan, Cai;Yao, Jianquan
    • Journal of the Optical Society of Korea
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    • 제17권3호
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    • pp.231-236
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    • 2013
  • We present both theoretically and experimentally the thermo-optic characteristics of micro-structured optical fiber (MOF) filled with mixed liquid. The performance of MOF depends on the efficient interaction between the fundamental mode of the transmitted light wave and the tunable thermo-optic materials in the cladding. The numerical simulation indicates that the confinement loss of MOF presents higher temperature dependence with higher air-filling ratios $d/{\Lambda}$, longer incident wavelength and fewer air holes in the cladding. For the 4cm liquid-filled grapefruit MOF, we demonstrate from experiments that different proportions of solutions lead to tunable temperature sensitive ranges. The insertion loss and the extinction ratio are 3~4 dB and approximate 20 dB, respectively. The proposed liquid-filling MOF will be developed as thermo-optic sensor, attenuator or optical switch with the advantages of simple structure, compact configuration and easy fabrication.