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Thermal Flow Characteristics of a New Micro Flow Sensor with Multiple Temperature Sensing Elements  

Kim Tae Yong (동서대학교 인터넷공학부)
Chung Wan-Young (동서대학교 인터넷공학부)
Publication Information
Journal of the Korea Institute of Information and Communication Engineering / v.9, no.3, 2005 , pp. 595-600 More about this Journal
Abstract
A micro flow sensor on silicon substrate allows the fabrication of small components where many different functions can be integrated so that the functionality of the sensors can be increased. Further more, the small size of the elements these sensors can be quite fast. A thermal mass flow sensor measures the asymmetry of temperature profile around the heater which is modulated by the fluid flow. In normal, a mass flow sensor is composed of a central heater and a pair of temperature sensing elements around the heater A new 2-D wide range micro flow sensor structure with three pairs of temperature sensors and a central heater was proposed and numerically simulated by Finite Difference formulation to confirm the feasibility of the flow sensor structure in time domain.
Keywords
thermal mass flow sensor;
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