• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.229-233
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• 2004

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. This paper was carried out some experiments of the micro plasma electrode fabrications using FIB. The sputtering of FIB has one major problem that is redeposited by sputtered material including $Ga^+$ ion source. Therefore we have verified the effect of the reposition by EDX. And the optimal condition is suggested to machine the micro plasma electrode.

• KSTLE International Journal
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• v.8 no.2
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• pp.26-28
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• 2007

Si(100) surfaces were topographically modified i.e. the surfaces were patterned at micro-scale using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and microchannels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating a thin DLC film. The surfaces were then evaluated for their friction behavior at micro-scale in comparison with those of bare Si(100) flat, DLC coated Si(100) flat and uncoated patterned surfaces. Experimental results showed that the chemically treated (DLC coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the surfaces. This indicates that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro-Electro-Mechanical-Systems (MEMS).

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.3 no.2
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• pp.53-59
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• 2004

In this paper, we propose a new multi-purpose Scanning Force Microscope (SFM) system. The system can be used for nano/micro-scratching, in-process profile measurement, and observation of potential surface defects which occur during the scratching in air or liquid. Experimental results of nano/micro-scratching show that the smallest scratching depth can be controlled to be 10nm, which corresponds to the stability of the SFM system. Profile measurements of nano/micro-scratching surfaces have also been performed by the method of on-machine measurement and in-process measurement. Two measurement results were in good agreement with each other. The maximum difference was approximately 10 nm, which was mainly caused by the sampling repeatability error that influences the measurement accuracy Also, micro-defects on the micro-scratching surface were successfully detected by the SFM system. It was confirmed that the number of micro-defects increases when the surface is subjected to a cyclic bending load. The maximum depth was less than 100nm.

• Korean Journal of Metals and Materials
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• v.48 no.7
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• pp.630-638
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• 2010

The present investigation has been performed on the mixing behavior and microstructural development during fabrication of Fe micro-nano powder feedstock for a micro-powder injection molding process. The mixing experiment using a screw type blender system was conducted to measure the variations of torque and temperature during mixing of Fe powder-binder feedstock with progressive powder loading for various nano-powder compositions up to 25%. It was found that the torque and the temperature required in the mixing of feedstock increased proportionally with increasing cumulative powder loading. Such an increment was larger in the feedstock containing higher content of nano-powder at the same powder loading condition. However, the maximum value was obtained at the nano-powder composition of not 25% but 10%. It was owing to the 'roller bearing effect' of agglomerate type nano-powder acting as lubricant during mixing, consequently leading to the rearrangement of micro-nano powder in the feedstock. It is concluded that the improvement of packing density by rearrangement of nano-powders into interstices of micro-powders is responsible for the maximum powder loading of about 71 vol.% in the nano-powder composition of 25%.

• Transactions on Electrical and Electronic Materials
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• v.12 no.3
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• pp.98-101
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• 2011

A 10 nm nano-silica was introduced to a conventional 3 ${\mu}M$ micro-silica composite to develop an eco-friendly new electric insulation material for heavy electric equipment. Thermal and mechanical properties, such as glass transition temperature (Tg), dynamic mechanical analysis, tensile and flexural strength, were studied. The mechanical results were estimated by comparing scale and shape parameters in Weibull statistical analysis. The thermal and mechanical properties of conventional epoxy/micro-silica composite were improved by the addition of nano-silica. This was due to the increment of the compaction via the even dispersion of the nano-silica among the micro-silica particles.

• Advances in nano research
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• v.12 no.2
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• pp.151-165
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• 2022

Micro-scale serpentine structure fibers are widely used as flexible sensor in the manufacturing of micro-nano flexible electronic devices because of their outstanding non-linear mechanical properties and organizational flexibility. The use of melt electrowriting (MEW) technology, combined with the axial bending effect of the Taylor cone jet in the process, can achieve the micro-scale serpentine structure fibers. Due to the interference of the process parameters, it is still challenging to achieve the precise deposition of micro-scale and high-consistency serpentine structure fibers. In this paper, the micro-scale serpentine structure fiber is produced by MEW combined with axial bending effect. Based on the controlled deposition of MEW, applied voltage, collector speed, nozzle height and nozzle diameter are adjusted to achieve the precise deposition of micro-scale serpentine structure fibers with different morphologies in a single motion dimension. Finally, the influence mechanism of the above four parameters on the precise deposition of micro-scale serpentine fibers is explored.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1073-1077
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• 2003

This study aims to investigate the fabrication process of nano silicon mold using electron beam lithography (EBL) to generate the nanometer level patterns by nano-imprinting technology. the nano-patterned mold including 100mm pattern size has been fabricated by EBL with different doses ranged from 22 to 38 ${\mu}C/cm^2$ on silicon using the conventional polymethylmetharcylate(PMMA) resist. The silicon mold is fabricated with various patterns such as circles, rectangles, crosses, oblique lines and mixed forms, The effect of dosage on pattern density in EBL is discussed based on SEM (Scannning Electron Microscopy) analysis of fabricated molds. The mold surface is modified by hydrophobic fluorocarbon (FC) thin films to avoid the stiction during nano-imprinting process.

• Advances in nano research
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• v.16 no.6
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• pp.615-622
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• 2024

This study investigates the impact of educational management on the performance of scholars in the field of nano/micro-level composites. The objective is to understand how effective management strategies can enhance the academic achievements and research outcomes of students specializing in this advanced area of materials science. Through a combination of qualitative and quantitative methodologies, data was collected from various educational institutions renowned for their programs in nano/micro-level composites. Our results indicate that tailored educational management practices significantly improve student performance. Key strategies identified include personalized mentorship programs, interdisciplinary collaboration opportunities, and access to state-of-the-art laboratory facilities. Institutions that implemented these practices observed a marked increase in the quality and quantity of research outputs, higher student satisfaction rates, and improved post-graduation employment prospects in relevant industries. Furthermore, the study highlights the importance of continuous professional development for educators to stay abreast of the latest advancements in nano/micro-level composites. By fostering an environment of innovation and support, educational management can play a crucial role in shaping the next generation of researchers and professionals in this cutting-edge field. These findings underscore the necessity of strategic educational management in optimizing the academic and professional trajectories of scholars in nano/micro-level composites, ultimately contributing to advancements in technology and industry applications.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.632-635
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• 2003

As a process technology of nano pattern with a new conception for economic and practical technology of alternative nano process. process technologies such as Embossing, Imprinting. Molding and Inking are beginning to make its appearance. Among these alternative processes, nano mold process is a process that is of benefit to mass production and keeps excellency of reproduction and high quality of parts. In this study, we experienced micro precision machining technology of nano stamper for the injection mold of optical disk with big capacity. Especially, Flatness and uniformity are important for nano stamper with global area, for the purpose of developing polishing technology of micro precision of Back polishing only being used for nano stamper, we carried out a basic study to secure flatness standards

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.05a
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• pp.259-264
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• 2004

The hot embossing process as a method for the fabrication of polymer is becoming increasingly important because of its simple process, low cost, high replication fidelity and relatively high throughput. In this paper, we carried out experimental studies and numerical simulations in order to understand the viscous flow of polymer film during hot embossing process. As the initial step of quantitating the hot embossing process, simple parametric studies for the embossing conditions have been carried out using high resolution masters which patterned by DRIE process. Under different embossing times and pressures, the viscous flow of PMMA films into micro/nano cavities has been investigated. Also, the viscous flow during the hot embossing process has been simulated by the continuum based FDM analysis considering micro/nano effect, such as surface tension and contact angle.