• Title/Summary/Keyword: metal precursor

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Non-stoichiometric AlOx Films Prepared by Chemical Vapor Deposition Using Dimethylaluminum Isopropoxide as Single Precursor and Their Non-volatile Memory Characteristics

  • Lee, Sun-Sook;Lee, Eun-Seok;Kim, Seok-Hwan;Lee, Byung-Kook;Jeong, Seok-Jong;Hwang, Jin-Ha;Kim, Chang-Gyoun;Chung, Taek-Mo;An, Ki-Seok
    • Bulletin of the Korean Chemical Society
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    • v.33 no.7
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    • pp.2207-2212
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    • 2012
  • Dimethylaluminum isopropoxide (DMAI, $(CH_3)_2AlO^iPr$) as a single precursor, which contains one aluminum and one oxygen atom, has been adopted to deposit non-stoichiometric aluminum oxide ($AlO_x$) films by low pressure metal organic chemical vapor deposition without an additional oxygen source. The atomic concentration of Al and O in the deposited $AlO_x$ film was measured to be Al:O = ~1:1.1 and any serious interfacial oxide layer between the film and Si substrate was not observed. Gaseous by-products monitored by quadruple mass spectrometry show that ${\beta}$-hydrogen elimination mechanism is mainly contributed to the $AlO_x$ CVD process of DMAI precursor. The current-voltage characteristics of the $AlO_x$ film in Au/$AlO_x$/Ir metalinsulator-metal (MIM) capacitor structure show high ON/OFF ratio larger than ${\sim}10^6$ with SET and RESET voltages of 2.7 and 0.8 V, respectively. Impedance spectra indicate that the switching and memory phenomena are based on the bulk-based origins, presumably the formation and rupture of filaments.

Characteristics of Spodumene Powders Synthesized by Polyvinyl Alcohol Solution Technique (Polyvinyl Alcohol 폴리머 용액법으로 합성한 스포듀민 분말의 특성연구)

  • Lee, Sang-Jin;Park, Ji-Eun
    • Journal of Powder Materials
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    • v.18 no.1
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    • pp.35-40
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    • 2011
  • LAS-system ceramic powder, spodumene ($Li_2O{\cdot}Al_2O_3{\cdot}4SiO_2$), was successfully synthesized by a chemical solution technique employing PVA(polyvinyl alcohol) as an organic carrier. The PVA content affected the microstructure of porous precursor gels and the crystalline development. The optimum PVA content contributed to homogeneous distribution of metal ions in the precursor gel and it resulted in the synthesis of glass free $\beta$-spodumene powder having a specific surface area of $7.57\;m^2/g$. The agglomerated $\beta$-spodumene powders were also enough soft to grind to fine powders by a simple ball milling process. The microstructures of the densified powder compacts were strongly dependant on the minor phases of spodumene solid solution and amount of liquid phase, which were formed from the inhomogeneous precursors.

The effect of precursor powder on the properties of BSCCO 2223 Ag-sheathed tapes

  • Su, Xiao-Dong;Ko, Jae-Woong;Park, Sung-Chung;Kim, Hai-Doo;Chung, Hyung-Sik;Qiao, Gui-Wen
    • 한국초전도학회:학술대회논문집
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    • v.9
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    • pp.329-333
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    • 1999
  • The BSCCO 2223 Ag-sheathed tapes were prepared with spray dried precursor powders, which are of different starting condition. The J$_c$ in the short tapes varied from 24 kA/ cm$^2$ to 47 kA/ cm$^2$ at 77K and 0T. The largely improvement of J$_c$ in certain tape, which characterized with the large textured BSCCO 2223 grains, homogeneity of reactant and fewer tracks of second phases in final superconducting matrixes, could be due to optimization in the precursor powder.

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Chemical Solution Deposition of PZT/Oxide Electrode Thin Film Capacitors and Their Micro-patterning by using SAM

  • Suzuki, Hisao
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.907-912
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    • 2005
  • Micro-patterns of $Pb(Zr_{0.53}Ti_{0.47})O_3$, PZT, thin films with a MPB composition were deposited on $Pt/Ti/SiO_2/Si$ substrate from molecular-designed PZT precursor solution by using self-assembledmonolayer(SAM) as a template. This method includes deposition of SAM followed by the optical etching by exposing the SAM to the UV-light, leading to the patterned SAM as a selective deposition template. The pattern of SAM was formed by irradiating UV-light to the SAM on a substrate and/or patterned PZT thin film through a metal mask for the selective deposition of patterned PZT or lanthanum nickel oxide (LNO) precursor films from alkoxide-based precursor solutions. As a result, patterned ferroelectric PZT and PZT/LNO thin film capacitors with good electrical properties in micrometer size could be successfully deposited.

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Preparation of reflexite collimating film (RCF) by ink-jet technique with organic-inorganic hybrid precursor

  • Hu, Yi;Liu, Jiun-Shing;Lyu, Jhong-Ming;Liu, Tung-Cheng
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.1459-1461
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    • 2009
  • In this study, we prepared the multi-refraction film thin by ink-jet technique with sol-gel precursor. The precursors were prepared by using some transition metal alk-oxide and the tetraethylorthosilicate (TEOS) mixed separately with n-Butyl Alcohol and PVB (Poly(vinyl butyral)).The structure and morphology of the resulting films were investigated by atomic force microscope (AFM). It is shown that the shape of the pattern of the films would affect the refraction proportion.

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Synthesis of 1,4-Bis(1'-alkyl-2',3',4',5'-tetraphenyl-1'-silacyclopentadienyl)benzenes (1,4-Bis(silyl)benzene의 고리화반응에 의한 1,4-Bis(1'-alkyl-2',3',4',5'-tetraphenyl-1'-silacyclopentadienyl)benzenes 리간드의 합성)

  • Kong, Young Kun;Ahn, Young Man
    • Journal of the Korean Chemical Society
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    • v.41 no.2
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    • pp.82-87
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    • 1997
  • The 1,4-bis(alkyldichlorosilyl)benzene was synthesized to be a precursor of the bis(silacyclopentadienyl) aromatic system. The cyclization reaction of the precursor with 1,4-dilithio-1,2,3,4-tetraphenyl-1,3-butadiene produced the 1,4-bis(1'-alkyl-2',3',4',5'-tetraphenyl-1'-silacyclopentadienyl)benzene as the ligand of organotransition metal compound and the precursor of the stable silacyclopentadienyl anion.

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Understanding Role of Precursor (Crystal Violet) and its Polarity on MoS2 Growth; A First Principles Study

  • Ramzan, Muhammad Sufyan;Kim, Yong Hoon
    • Proceeding of EDISON Challenge
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    • 2016.03a
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    • pp.373-376
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    • 2016
  • Transition metal dichalcogenides (TMDs) such as $MoS_2$ is the thinnest semiconductor, exhibits promising prospects in the applications of optoelectronics, catalysis and hydrogen storage devices. Uniform and high quality $MoS_2$ is highly desirable in large area for its applications on commercial scale and fundamental research. Many experimental techniques i.e CVD have been developed to successfully synthesis $MoS_2$ on large scale, here in this work atomistic detail to understand the growth mechanism is addressed which was greatly overlooked. Here based on first principles calculation we found that polarity of seeding promter (crystal violet considerd in this work) controls the growth mechanism. It is also found that molybdenum destroys the precursor while sulfur adsorption with precursor is favorable.

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Synthesis of YBCO Superconducting Precursor using Organic metal salts method for Electric power transmission (유기금속염을 이용한 전력 전송용 YBCO 초전도 전구체 합성)

  • Lee, Sang-Heon
    • Proceedings of the KIEE Conference
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    • 2005.07c
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    • pp.1966-1967
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    • 2005
  • The solid precursor produced by the dehydration of the gel at $120^{\circ}C$ for 12h is not in the amorphous state as expected but in a crystalline state. X-ray diffraction peaks of nearly the same angular position as the peaks of high Tc phase were observed in the precursor. Experimental results suggest that the intermediate phase formed before the formation of the superconducting phase may be the most important fact in determining whether it is easy to form the superconducting phase or not, because the nucleation barriers of the two superconducting phase may be altered by the variation of the crystal structures of those intermediate phase.

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Fabrication and NOx Gas Sensing Properties of LaMeO3 (Me = Cr, Co) by Polymeric Precursor Method (Polymeric Precursor법에 의한 LaMeO3 (Me = Cr, Co)의 제조 및 NOx 가스 검지 특성)

  • Lee, Young-Sung;Shimizu, Y.;Song, Jeong-Hwan
    • Korean Journal of Materials Research
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    • v.21 no.8
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    • pp.468-475
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    • 2011
  • [ $LaMeO_3$ ](Me = Cr, Co) powders were prepared using the polymeric precursor method. The effects of the chelating agent and the polymeric additive on the synthesis of the $LaMeO_3$ perovskite were studied. The samples were synthesized using ethylene glycol (EG) as the solvent, acetyl acetone (AcAc) as the chelating agent, and polyvinylpyrrolidone (PVP) as the polymer additive. The thermal decomposition behavior of the precursor powder was characterized using a thermal analysis (TG-DTA). The crystallization and particle sizes of the $LaMeO_3$ powders were investigated via powder X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), and particle size analyzer, respectively. The as-prepared precursor primarily has $LaMeO_3$ at the optimum condition, i.e. for a molar ratio of both metal-source (a : a) : EG (80a : 80a) : AcAc (8a) inclusive of 1 wt% PVP. When the as-prepared precursor was calcined at $700^{\circ}C$, only a single phase was observed to correspond with the orthorhombic structure of $LaCrO_3$ and the rhombohedral structure of $LaCoO_3$. A solid-electrolyte impedance-metric sensor device composed of $Li_{1.5}Al_{0.5}Ti_{1.5}(PO_4)_3$ as a transducer and $LaMeO_3$ as a receptor has been systematically investigated for the detection of NOx in the range of 20 to 250 ppm at $400^{\circ}C$. The sensor responses were able to divide the component between resistance and capacitance. The impedance-metric sensor for the NO showed higher sensitivity compared with $NO_2$. The responses of the impedance-metric sensor device showed dependence on each value of the NOx concentration.

Preparation of SnS Thin Films by MOCVD Method Using Single Source Precursor, Bis(3-mercapto-1-propanethiolato) Sn(II)

  • Park, Jong-Pil;Song, Mi-Yeon;Jung, Won-Mok;Lee, Won-Young;Lee, Jin-Ho;Kim, Hang-Geun;Shim, Il-Wun
    • Bulletin of the Korean Chemical Society
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    • v.33 no.10
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    • pp.3383-3386
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    • 2012
  • SnS thin films were deposited on glasses through metal organic chemical vapor deposition (MOCVD) method at relatively mild conditions, using bis(3-mercapto-1-propanethiolato) tin(II) precursor without toxic $H_2S$ gas. The MOCVD process was carried out in the temperature range of $300-400^{\circ}C$ and the average grain size in fabricated SnS films was about 500 nm. The optical band gap of the SnS film was about 1.3 eV which is in optimal range for harvesting solar radiation energy. The precursor and SnS films were characterized through infrared spectroscopy, nuclear magnetic resonance spectroscopy, DIP-EI mass spectroscopy, elemental analyses, thermal analysis, X-ray diffraction, and field emission scanning electron microscopic analyses.