• Journal of the Korean Society for Precision Engineering
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• v.22 no.2
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• pp.38-45
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• 2005

Chemical mechanical polishing(CMP) has been widely accepted for the planarization of multi-layer structures in semiconductor fabrication. But a variety of defects such as abrasive contamination, scratch, dishing, erosion and corrosion are occurred during CMP. Especially, dishing and erosion defects increase the metal resistance because they decrease the interconnect section area, and ultimately reduce the lift time of the semiconductor. Due to this reason dishing and erosion must be prohibited. The pattern density and size in chip have a significant influence on dishing and erosion occurred by over-polishing. The fixed abrasive pad(FAP) was applied and tested to reduce dishing and erosion in this paper. The abrasive concentration decrease of FAP results in advanced pattern selectivity which can lead the uniform removal in chip and declining over-polishing. Consequently, reduced dishing and erosion was observed in CMP of tungsten pattern wafer with proposed FAP and chemicals.

• Journal of Soil and Groundwater Environment
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• v.20 no.3
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• pp.83-91
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• 2015

Mine soil contamination by high levels of metal ions that prevents the successful vegetation poses a serious problem. In the study presented here, we used the microbial biocatalyst of urease producing bacterium Sporosarcina pasteurii or plant extract based BioNeutro-GEM (BNG) agent. The ability of the biocatalysts to bioremediate contaminated soil from abandoned mine was examined by solid-state composting vegetation under field conditions. Treatment of mine soil with the 2 biocatalysts for 5 months resulted in pH increase and electric conductivity reduction compared to untreated control. Further analyses revealed that the microbial catalysts also promoted the root and shoot growth to the untreated control during the vegetation treatments. After the Sporosarcina pasteurii or plant extract based BNG treatment, the microbial community change was monitored by culture-independent pyrosequencing. These results demonstrate that the microbial biocatalysts could potentially be used in the soil bioremediation from mine-impacted area.

• Korean Journal of Materials Research
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• v.16 no.2
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• pp.80-84
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• 2006

The removal efficiency of Cu and Fe contaminants on the silicon wafer surface was examined to investigate the effect of cleaning solutions on the behavior of metallic impurities. Silicon wafers were intentionally contaminated with Cu and Fe solutions by spin coating and cleaned in different types of cleaning solutions based on $NH_4OH/H_2O_2/H_2O\;(SC1),\;H_2O_2/HCl/H_2O$ (SC2), and/or HCl/$H_2O$ (m-SC2) mixtures. The concentration of metallic contaminants on the silicon wafer surface before and after cleaning was analyzed by vapor phase decomposition/inductively coupled plasma-mass spectrometry (VPD/ICP-MS). Cu ions were effectively removed both in alkali (SC1) and in acid (SC2) based solutions. When $H_2O_2$ was not added to SC2 solution like m-SC2, the removal efficiency of Cu impurities was decreased drastically. The efficiency of Cu ions in SC1 was not changed by increasing cleaning temperature. Fe ions were soluble only in acid solution like SC2 or m-SC2 solution. The removal efficiencies of Fe ions in acid solutions were enhanced by increasing cleaning temperature. It is found that the behavior of metallic contaminants as Cu and Fe from silicon surfaces in cleaning solutions could be explained in terms of Pourbaix diagram.

• Economic and Environmental Geology
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• v.26 no.2
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• pp.175-185
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• 1993

Soils and dusts collected from Changhang smelter area were analyzed for Cu, Pb, Zn, and Cd in order to determine their dispersion pattern and mode of occurrences, and to investigate the pollution level of heavy metals such as Cu, Pb, Zn, and Cd by smelting activity. The soil pH of Changhang area is in the range of 3.7~8.8, and increased with increasing distance from the smelter site. The particles containing heavy metals are several tens of ${\mu}m$ in diameter, and have well crystal form. Samples collected near the smelter show similar particle properties in size, shape, and composition, which means that they could be originated from the same contamination source. Element couples of Cu, Pb, Zn, and Cd indicate high correlation with each other, which means that Cu, Pb, Zn, and Cd could be originated from the same point source of smelter. Heavy metal contents were decayed to background levels from 2.5 kilometer away from the smelter.

• Corrosion Science and Technology
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• v.7 no.1
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• pp.27-34
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• 2008

In industrial and fluid handling systems, frequently the protective film forming materials suffer from severe corrosion due to microbial effects. As an example, various micro-organisms, including bacteria, exist in seawater normally fed to power and desalination plants. Unless seawater intakes are properly disinfected to control these microbial organisms, biological fouling and microbial induced corrosion (MIC) will be developed. This problem could destroy metallic alloys used for plant construction. Seawater intakes of cogeneration plants are usually disinfected by chlorine gas or sodium hypochlorite solution. The dose of disinfectant is designed according to the level of contamination of the open seawater in the vicinity of the plant intake. Higher temperature levels, lower pH, reduced flow velocity and oxidation potential play an important role in the enhancement of microbial induced corrosion and bio-fouling. This paper describes, in brief, the different types of bacteria, mechanisms of microbiological induced corrosion, susceptibility of different metal alloys to MIC and possible solutions for mitigating this problem in industry. A case study is presented for the power plant steam condenser at Al-Taweelah B-station in Abu Dhabi. The study demonstrates resistance of Titanium tubes to MIC.

• Journal of Korean Society of Water and Wastewater
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• v.25 no.5
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• pp.783-790
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• 2011

The purpose of this study was to suggest the alternative measures to properly manage the water quality of Lake Euiam, Chuncheon. Current pollution level of Gongji stream (influent to Lake Euiam) and sources of contamination in Lake Euiam were investigated. Particle size, organic matter and nutrient contents, heavy metals were analyzed for sediment samples taken from lower region of Gongji stream. Average organic matter content of nine sediment samples was 5.7%, and for nitrogen and phosphorus it was 750 mg/kg and 977mg/kg, respectively. Heavy metals including aluminum, iron, manganese and zinc were measured, whereas Cd and As were not detected. Effluent from Chuncheon Wastewater Treatment Plant appeared to be one of the main cause of organic matter and nutrients level in Lake Euiam. Inhibition of primary production and consequent reduction of organic matter content within the Lake should be a key measure to protect the water quality of Lake Euiam. Preventive measures to reduce the level of nutrients in wastewater treatment effluent were found necessary.

• Journal of Environmental Health Sciences
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• v.37 no.3
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• pp.173-181
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• 2011

Koo-ni Firing Range in Maehyang-ri consisted of a firing range around 'Nong-sum' and a land-based firing range in the nearby coastal area. From 1951, when the US Air Force began field firing, residents of Maehyang-ri suffered damage to health, environment, life and property due to 54 years of field firing and noise. The purpose of this article is to provide an overview of the environmental damage, property loss, and health impairment by reviewing literature and related lawsuits. Environmental damage, the destruction of coastal fisheries and wetlands, would be a result of heavy metal contamination of soil. Fishing restrictions and the confiscation of farmlands caused financial hardship. Errant bombings led to the loss of life and property, including buildings and livestock. As a result, residents repeatedly sued the Republic of Korea for damages. The court decided partially in favor of the plaintiffs. Finally, Koo-ni firing range was closed down in 2005. Through the literature review, it is presumed that the noise caused hearing problems, hypertension, and mental illness. Since earlier studies were confined to a small fragment of the damage, additional studies focused on chronic health hazards are needed.

• Journal of the Korean Ceramic Society
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• v.40 no.3
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• pp.309-316
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• 2003

EAF(Electric Arc Furnace) Dust classified as special wastes containing heavy metal contaminants may cause to damage an environment such as underground water contamination if they were not treated properly. The possibility of producing the porous sintered body made from EAF Dust/clay composition system was studied. Mixing of EAF Dust and clay was carried out using wet-mixing process and two different sintering methods such as rapid and normal heat treatment were tried. By observing density, porosity and microstructure of sintered bodies, it was found that the bloating phenomenon depend on the contents of C, where the liquid phase occur or not during the sintering process. To obtain a light-aggregate of porous body due to bloating, the rapid heating was better than the normal heating at sintering process.

• Economic and Environmental Geology
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• v.31 no.3
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• pp.223-233
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• 1998

The environments in the vicinity of the Dalseong mine has been much contaminated by heavy metals related to CuW ore deposit, which is of hydrothermal pipe type mineralized by quartz monzonite in the andesitic rocks. Chalcopyrite and wolframite are major ore minerals and sphalerite, galena and others are associated. To investigate the contamination of heavy metals in plants, samples of plants and soils were analysed by ICP for Fe, Mn, Cu, Pb, Zn, Ni, Co, Cd and Cr. Most of ore-related heavy metals are anomalously high in plants and soils, which were contaminated by the development of Taehan Tungsten Mining Company. The mine produced 48,704 tons (M/T) of 4 wt.% Cu and 1,620 tons (S/T) of 70 wt.% of $WO_3$ during active mining activity from 1961 to 1971 but was closed in 1975. Wild plants growing at the mine area may be used to remove heavy metals form soils, which cause contaminations of plants, stream waters and groundwaters in the vicinity of the mine.

• Analytical Science and Technology
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• v.13 no.1
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• pp.96-100
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• 2000

The adsorption of heavy-elements to zeolite has been investigated at various adsorptional condition for purification of waste water. Four heavy elements, Cd, Cr, Cu and Pb, were examined, because they are concerned to the major heavy-element contamination. The adsorption efficiencies are measured at the different conditions such as adsorption times and pHs. The practical adsorption was achived and reaches to maximum within 30 minute by using of 2-g zeolite for 50 mL of heavy-element solution. The overall adsorption efficiencies for Cr and Cu are high and become better at low pH. Cd and Pb have 95% of adsorption ratio and this is lower than other two elements. Cadmium shows an abnormally low adsorption at low pH.