• Bulletin of the Korean Chemical Society
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• 제25권1호
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• pp.21-22
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• 2004

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.159-159
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• 2007

In order to reduce a signal delay in ULSI, low resistive metal and intermetal dielectric material of low dielectric constant are required. Ordered mesoporous silica film is proper to intermetal dielectric due to its low dielectric constant and superior mechanical properties. In this study, ordered mesoporous silica films was synthesized using TEOS (tetraethoxysilane) / MTES (methyltriethoxysilane) mixed silica precursor and Brij-$76^{(R)}$ surfactant. These films had the porosity of 40% and dielectric constant of 2.5. To lower dielectric constant, the ordered mesoporous silica films were surface-modified by HMDS (hexamethyldisilazane) treatment. HMDS substituted -OH groups on the surface of silica wall for -Si$(CH_3)_3$ groups. After the HMDS treatment, ordered mesoporous silica films were calcined at various calcination temperatures. Through the investigation, it was concluded that the proper calcination temperature is necessary as aspects of structural, electrical, and mechanical properties.

• 한국전기전자재료학회논문지
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• 제25권8호
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• pp.593-601
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• 2012

Ordered mesoporous oxide films have been focused because of their low density, high interior specific surface area, and high thermal insulation. Specially, the ordered mesoporous oxide films prepared by self-assembly has many advantages due to easy process and high reproducibility. In this work, ordered mesoporous $SiO_2$, $Al_2O_3$, and $TiO_2$ films were synthesized by control of composition and processing parameter. Also, their structural, thermal, and mechanical properties were characterized variously. In conclusion, ordered mesoporous oxides will be one of core materials in new technology due to their excellent and unique properties.

• Bulletin of the Korean Chemical Society
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• 제31권2호
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• pp.415-418
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• 2010

Highly ordered mesoporous silver material was successfully synthesized from a mesoporous silica template (KIT-6) with 3-D channel structure using the nano-replication method. The effects of $H_2$ or $O_2$ pretreatments on the catalytic performance of the mesoporous silver were investigated using a temperature programmed CO oxidation technique in a fixed bed reactor. The mesoporous silver material that was pretreated with $H_2$ exhibited an excellent catalytic activity compared to the as-prepared and $O_2$-pretreated catalysts. Moreover, this present mesoporous silver material showed good catalytic stability. For the CO oxidation, the apparent activation energy of the $H_2$-pretreated mesoporous silver catalyst was $61{\pm}0.5\;kJ\;mol^{-1}$, which was also much lower than the as-prepared ($132{\pm}1.5\;kJ\;mol^{-1}$) and $O_2$-pretreated ($124{\pm}1.4\;kJ\;mol^{-1}$) catalysts.

• 접착 및 계면
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• 제15권2호
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• pp.63-68
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• 2014

주형으로 구형의 폴리스티렌을 사용하고 질소와 탄소원으로 시안아미드를 사용하여 열처리 과정을 거친 후 구형의 할로우 메조포러스 질화탄소 물질을 합성하였다. 이때 할로우 메조포러스 질화탄소 물질을 합성하는 과정에서 실리카와 같은 무기물 주형을 사용하지 않기 때문에 이차적인 실리카 제거 공정이 필요 없고 용매를 전혀 사용하지 않는다. 구형의 폴리스티렌 입자는 약 170 nm 크기였고 그리고 할로우 메조포러스 질화탄소 구형입자의 할로우 직경은 약 82 nm, 벽 두께는 약 13 nm이었다. 또한 할로우 메조포러스 질화탄소 물질의 표면적, 나노세공 크기, 세공부피는 각각 $188m^2g^{-1}$, 3.8 nm, $0.35cm^3g^{-1}$이었다. 한편, 할로우 벽은 흑연구조와 유사한 박막층의 쌓임 구조를 가졌으며 이러한 할로우 메조포러스 질화탄소 물질은 연료전지, 촉매, 광촉매, 전자방출 소자 등과 같은 분야에 매우 높은 응용 가능성을 가질 것으로 기대된다.

• 한국환경과학회지
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• 제22권7호
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• pp.837-845
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• 2013

This study was designed to synthesize mesoporous carbon, porous carbonic material and to characterize its surface in an attempt to adsorption methane gas($CH_4$). Synthesis of mesoporous carbon was carried out under two steps ; 1. forming a RF-silica complex with a mold using CTMABr, a surfactant, and TEOS, raw material of silica, and 2. eliminating silica through carbonization and HF treatment. The mesoporous carbon was synthesized under various conditions of synthesis time and calcination. Eight different types of mesoporous carbon, which were designated as MC1, MC2, MC3, MC4, MCT1, MCT2, MCT3, and MCT4, were prepared depending upon preparation conditions. The analysis of mesoporous carbon characteristics showed that the calcination of silica stabilized the mixed structure of silica and carbonic complex, and made the particle uniform. The results also showed that hydrothermal synthesis time did not have a strong influence on the size of pore. The bigger specific surface area was obtained as the hydrothermal synthesis time was extended. However, the specific surface area was getting smaller again after a certain period of time. In adsorption experiments, $CH_4$ was used as adsorbate. For the case of $CH_4$, MCT3 showed the highest adsorption efficiency.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.1113-1115
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• 2002

Mesoporous silica, MCM-41, was synthesized by sol-gel method. The organic structure-directing agent must be removed to make the desired proes. To achieve this, alternative calcination method using microwave oven was adapted to this removal stage. Microwave calcination was shown to provide a novel, rapid and inexpensive method of praparing nanoporous material. It was studied how the porous structure, surface area and pore size distribution were changes under microwave calcination.

• Bulletin of the Korean Chemical Society
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• 제34권1호
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• pp.143-148
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• 2013

Novel titanium containing solid core mesoporous shell silica has been synthesized by using octadecyltrichloro silane and triethylamine. The synthesized material was characterized by various physicochemical techniques. The mesoporous character of the material has been revealed from PXRD studies. The presence of octadecyltrichloro silane and triethylamine in the sample has been confirmed from EDAX studies. TG/DTA analysis reveals the thermal characteristics of the synthesized material. The presence of titanium in the frame work and its coordination state has been studies by UV-vis DR studies and XPS analysis. Chemical environment of Si in the framework of the material has been studied by $^{29}SiMASNMR$ studies. The surface area of the material is found to be around $550\;m^2g^{-1}$ and pore radius is of nano range from BET analysis. The spherical morphology and particle size of the core as well as shell has been found to be 300 nm and 50 nm respectively from TEM analysis. The catalytic application of this material towards the synthesis of caprolactam from cyclohexanone in presence of hydrogen peroxide through ammoxidation reaction has been investigated. The optimum conditions for the reaction have been established. The plausible mechanism for the formation of core silica and conversion of cyclohexanone has been proposed.

• Bulletin of the Korean Chemical Society
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• 제32권1호
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• pp.186-190
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• 2011

Periodically ordered mesoporous manganese oxides were synthesized in a single and double replication procedure. Mesoporous SBA-15 and -16 silica and their reverse replica carbons were successively used as hard templates. The silica and carbon pore systems were infiltrated with $Mn(NO_3)_2{\cdot}xH_2O$ or $Mn(AcAc)_2$, which was then converted to $Mn_2O_3$ at 873 K; the silica and carbon matrix were finally removed by NaOH solution or calcinations in air. The structure of the mesoporous $Mn_2O_3$, using a carbon template, corresponds to that of the original SBA-15 and SBA-16 silica. The products consist of hexagonally arranged cylindrical mesopores with crystalline pore walls or cubic mesoporous pores. The structure of replica has been confirmed by XRD, TEM analysis, and its electrochemical properties were tested with cyclic voltammetry. Formation of $Mn_2O_3$ inside the mesoporous carbon pore system showed much improved electrical properties.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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• pp.132.2-132.2
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• 2010

Mesoporous tinoxide ($SnO_2$) as anode materials for Li-ion battery were prepared by hydrothermal method and templating method using SBA-15 as template. And electrochemical properties of $SnO_2$ electrode were investigated with cyclic voltammogram (CV). The morphology and structures of $SnO_2$ were characterized by transmission electron microscopy (TEM) and X-ray diffractometer (XRD), respectively. The specific surface area was defined by $N_2$ adsorption with BET(Brunauer-Emmett-Teller) method. As a result, the surface area of mesoporous $SnO_2$ which was made from templating method is higher than the case of using hydrothermal method. In addition, in anodic performance, mesoporous $SnO_2$ which is prepared by templating method showed higher charge-discharge capasity compared to hydrothermal method and exhibited excellent stability over the entire cycle number. It was indicated that electrochemical performances of mesoporous $SnO_2$mainly affected to the structural features, such as specific surface area and porosity.