• 소성∙가공
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• 제19권2호
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• pp.73-78
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• 2010

Recently, many researches on the development of super-hydrophobic surface have been concentrated on the fabrication of nano-patterned products. Nano-patterned mold is a key to replicate nano-patterned products by mass production process such as injection molding and UV molding. The present paper proposes the new fabricating method of nano-patterned mold at low cost. The nano-patterned mold was fabricated by electroforming the anodic aluminum oxide membrane filled with UV curable resin in nano-hole by capillary phenomenon. As a result, the final mold with nano-patterns which have the holes with the diameter of 100~200 nm was fabricated. Furthermore, the UV-molded products with clear nano- patterns which have the pillars with the diameter of 100~200nm were achieved.

• 소성∙가공
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• 제14권5호
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• pp.473-476
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• 2005

The demand of on-chip total analyzing system with MEMS (micro electro mechanical system) bio/chemical sensor is rapidly increasing. In on-chip total analyzing system, to detect the bio/chemical products with submicron feature size, a filtration system with nano-filter is required. One of the conventional methods to fabricate nano-filter is to use direct patterning or RIE (reactive ion etching). However, those procedures are very costly and are not suitable fur mass production. In this study, we suggested new fabrication method for a nano-filter based on replication process, which is simple and low cost process. After the Si master was fabricated by laser interference lithography and reactive ion etching process, the polymeric mold was replicated by UV-imprint process. Metallic nano-filter was fabricated after removing the polymeric part of metal deposited polymeric mold. Finally, our fabrication method was applied to metallic nano-filter with $1{\mu}m$ pitch size and $0.4{\mu}m$ hole size for bacteria sensor application.

• 멤브레인
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• 제29권2호
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• pp.105-110
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• 2019

다공성 분리막은 입자성 물질을 제거하는데 산업적으로 다양하게 응용되고 있다. 기존 다공성 분리막 제작 방법과 다르게, 용액퍼짐 상분리법은 매우 간단하게 기공을 형성할 수 있다. 먼저 지지층으로 메쉬 위에 물을 적신 후, 물과 혼합되지 않은 용매에 폴리설폰 용액을 흘려준다. 이때 물과 혼합되지 않은 용매는 쉽게 기화되어 폴리설폰은 얇은 막으로 만들어지게 된다. 기공을 형성하기 위해 폴리설폰 용액에 물과 혼합할 수 있는 물질을 넣게 되면, 넣어주는 농도 비율에 따라 기공크기를 조절할 수 있게 된다. 막의 두께는 쉽게 용액의 농도로 조절이 된다. 다공성 분리막은 메쉬의 형성을 그대로 유지하고 있어 3차원 구조체를 형성하는데 매우 유용하다. 본 연구에서 제시된 용액 퍼짐 상분리법은 매우 낮은 생산단가와 쉬운 공정조절에 의해 기존 분리막에 비해 높은 가격경쟁력을 가질 수 있는 특징을 보이고 있다.

• 한국기계가공학회지
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• 제13권2호
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• pp.21-27
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• 2014

Recently, various biochip environments have been presented. In this study, a novel transparent film with porous membrane windows, which is an essential component in a co-cultured biochip environment, is fabricated using spin-coating, 3D printing, and electrospinning processes. In detail, a transparent polystyrene film was fabricated by means of the spin-coating process followed bywindow cutting, after which apolycaprolactone-chloroform solution was deposited along the window edge to introduce an adhesion layer between the PS film and the PCL nanofibers. Nanofibers were electrospun into the window region using a direct-write electrospinning method. Consequently, it was demonstrated that the fabricated window film could be used in a co-culture biochip environment.

• 한국정밀공학회지
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• 제28권2호
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• pp.245-250
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• 2011

A high-resolution shadow mask, a nanostencil, is widely used for high resolution lithography. This high-resolution shadowmask is often fabricated by a combination of MEMS processes and focused ion beam (FIB) milling. In this study, FIB milling on 500-nm-thin SiN membrane was tested and characterized. 500 nm thick and $2{\times}2$ mm large membranes were made on a silicon wafer by micro-fabrication processes of LPCVD, photolithography, ICP etching and bulk silicon etching. A subsequent FIB milling enabled local membrane thinning and aperture making into the thinned silicon nitride membrane. Due to the high resolution of the FIB milling process, nanoscale apertures down to 60 nm could be made into the membrane. The nanostencil could be used for nanoscale patterning by local deposition through the apertures.

• 한국염색가공학회지
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• 제23권2호
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• pp.107-117
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• 2011

Polyurethane (PU) was synthesized by one-shot process and the PU nanofiber was prepared by electrospinning. In this study, electrospun PU multi-membranes were prepared with various coating thickness ratio of base resin to top resin, where the base resin contains melamine curing agent and acid catalyst and the top resin contains water-repellent agent of fluoro-carbon compounds. The PU nanofiber multi-membranes were analyzed by field-emission scanning electron microscopy, differential scanning calorimeter, breathability, tensile strenth, air permeability and water resistance. The results showed that the PU multi-membrane provided excellent waterproof and moisture permeability.

• 한국분말재료학회지
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• 제16권4호
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• pp.262-267
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• 2009

Disk type porous nickel membrane was fabricated by in-situ reduction/sintering process using compacted NiO/PMMA (PMMA; Polymethyl methacrylate) mixture at $800^{\circ}C$ in hydrogen atmosphere. The porosity (49$\sim$58%) of these membrane was investigated as an amount of PMMA additive. The thermal decomposition and reduction behavior of NiO/PMMA were analyzed by TG/DTA in hydrogen atmosphere and the activation energy for the hydrogen reduction of NiO and thermal degradation of PMMA was calculated as 61.1 kJ/mol, evaluated by Kissinger method. Finally, the filtering performance and pressure drop were measured by particle counting system.

• Membrane and Water Treatment
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• 제9권1호
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• pp.43-51
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• 2018

Hollow fiber (HF) membranes are gaining wide interest over flat membranes due to their compaction and high area to surface volume ratio. This work addresses the fabrication of HF from polysulfone (PS) and polyethersulfone (PES) using N-methylpyrrolidone (NMP) as solvent in addition to other additives to achieve desired characteristics. The semi-pilot spinning system includes jacketed vessel, four spinneret block, coagulation and washing baths in addition to dryer and winder. Different parameters affecting dry-wet spinning phase inversion process were investigated. Dope compositions of PES, NMP and polyvinyl pyrrolidone (PVP) of varying molecular weights as additive were addressed. Some critical parameters of importance were also investigated. Those include dope flow rate, air gap, coagulation & washing baths and drying temperatures. The measured dope viscosity was in the range from 1.7 to 36.5 Pa.s. Air gap distance was adjusted from 20 to 45 cm and coagulation bath temperature from 20 to $46^{\circ}C$. The HF membranes were characterized by scanning electron microscope (SEM), atomic force microscope (AFM) and mechanical properties. Results indicated prevalence of finger like structure and average surface roughness from about 29 to 78.3 nm. Profile of stress strain characteristics revealed suitability of the fibers for downstream interventions for fabrication of thin film composite membrane. Different empirical correlations were formulated which enable deeper understanding of the interaction of the above mentioned variables. Data of pure water permeability (PWP) confirmed that the fabricated samples fall within the microfiltration (MF)-ultrafiltration (UF) range of membrane separation.

• 폴리머
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• 제38권4호
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• pp.530-534
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• 2014

다양한 기공도를 갖는 폴리에틸렌 분리막은 리튬이차전지의 격리막과 마이크로필터로 사용되고 있다. 폴리에틸렌 분리막을 대용량 리튬이차전지의 격리막에 응용하기 위해서는 고다공성 분리막의 제조가 요구된다. 본 연구에서는 열유도 상분리 공정으로 고다공성 폴리에틸렌 분리막을 제조하는데 있어, BET가 무독성 희석제로 사용 가능한지 여부를 실험하였다. 폴리에틸렌/BET 혼합물의 UCST-거동을 관찰하여 BET가 폴리에틸렌 다공막 제조용 희석제로 사용 가능함을 확인하였다. 폴리에틸렌/BET 혼합물로부터 제조된 분리막이 같은 조성에서 폴리에틸렌/파라핀 오일로부터 제조된 분리막에 비해 1.8배 높은 기공도를 나타내었다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권6호
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• pp.303-306
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• 2001

STFR were fabricated on the floating membrane which was formed by SOI-micromachining process. The floating membranes having a thickness range of $3{\sim}15{\mu}m$ could be simply formed by micromachining the directly-bonded and thinned SOI substrate. The STFR device fabricated on the $15{\mu}m$-thick membrane showed resonance frequency of fr = 1.65 GHz, coupling coefficient of Keff2 = 2.4 %, and series and parallel quality factors of Qs = 91.7 and Qp = 87.7, respectively.