• 한국정밀공학회지
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• 제19권8호
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• pp.26-33
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• 2002

• JSTS:Journal of Semiconductor Technology and Science
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• 제13권4호
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• pp.410-414
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• 2013

We report the wet etching of titanium nickel (TiNi) films for the production of nano-electro-mechanical (NEM) device. $SiO_2$ and $Si_3N_4$ have been selected as sacrificial layers of TiNi metal and etched with polyethylene glycol and hydrofluoric acid (HF) mixed solution. Volume percentage of HF are varied from 10% to 35% and the etch rate of the $SiO_2$, $Si_3N_4$ and TiNi are reported here. Within the various experiment results, 15% HF mixed polyethylene glycol solution show highest etch ratio between sacrificial layer and TiNi metal. Especially $Si_3N_4$ films shows high etch ratio with TiNi films. Wet etching results are measured with SEM inspection. Therefore, this experiment provides a novel method for TiNi in the nano-electro-mechanical device.

• 정보저장시스템학회논문집
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• 제10권2호
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• pp.32-38
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• 2014

Heat emission from the laser diode used in the optical disc drive and the defects from the increased temperature at the system have attracted attentions from the field of the information storage device. Thermoelectric refrigerator is one of the fine solutions to solve these thermal problems. The refrigeration performance of thermoelectric device is dependent on the thermoelectric material's figure-of-merit. Meanwhile, high electrical contact resistivity between metal electrode and p- and n-type thermoelectric materials in the device would lead increased total electrical resistance resulting in the degeneracy in performance. This paper represents the manufacturing process of the PbTe-based material which has one of the highest figure-of-merit at medium-high-temperature, ~ 600K to 900 K, and the nickel contact layer for reduced electrical contact resistance at once, and the results showing the decent contact structure and figure-of-merit even after the long-term operation environment.

• 대한기계학회논문집A
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• 제37권12호
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• pp.1521-1527
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• 2013

본 논문에서는 마스터 조정자인 인간의 근육강도과 관절변위를 측정하여 슬레이브장치가 외부환경에 맞는 작업능력을 발휘할 수 있는 마스터/슬레이브 원격조정시스템을 제안한다. 외골격형 기구부와 경량의 관성센서를 사용하여 마스터 착용자의 편리성을 높였으며 인간의 근육과 동일한 운동특성을 가진 공압인공근육으로 슬레이브 기구장치를 구성하여 운동의 모사능력을 향상시켰다. 실험을 통해서 단순히 마스터의 위치정보만 전달하는 원격조정에 비해서 제안된 마스터는 인간 조정자가 근력의 세기를 조절함으로써 슬레이브에 작용하는 가반하중의 변화에 관계없이 균일한 제어성능을 가질 수 있었다.

• 한국전기전자재료학회논문지
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• 제35권1호
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• pp.98-101
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• 2022

Liquid-based Triboelectric nanogenerator (L-TENG) is one of the alternatives to solid-based Triboelectric nanogenerator (S-TENG) because of the absence of surface damage which can decrease the durability of the generator. However, the L-TENG also has an obvious drawback of significantly lower output than that of S-TENG. This article produces water-sloshing-based electricity generating device (W-ED) with a new design of L-TENG that improves electrical output in portable form. The dual-electrode system, consisting of closed-loop circuit and inner electrode which enables water to contact directly in the bottle, can generate the open-circuit voltage and the short-circuit current of up to 348 V and 5.1 mA, respectively. By investigating the motion of water for each frequency, we propose that W-ED is suitable device for a variety of human motions. We expect that W-ED can be applied in small electrical devices or sensors in daily-use items.

• 대한의용생체공학회:의공학회지
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• 제44권1호
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• pp.19-24
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• 2023

Due to the spread of COVID-19, many patients with severe respiratory diseases have occurred worldwide, and accordingly, the use of mechanical ventilators has exploded. However, hospitals do not have systematic risk management, and the Medical Device Regulation also provides medical device risk management standards for manufacturers, but does not apply to devices in use. In this paper, we applied the Failure Mode Effects Analysis (FMEA) risk analysis technique based on the International Standard ISO 14971 (Medical Devices-Application of risk management to medical devices) for 85 mechanical ventilators of a specific model in use in hospitals. Failure modes and effects of each parts were investigated, and risk priority was derived through multiplication of each score by preparing criteria for severity, occurrence, and detection for each failure mode. As a result, it was confirmed that the microprocessor-based Patient Unit/Monitoring board in charge of monitoring scored the highest score with 36 points, and that reliability management is possible through systematic risk management according to priority.

• 한국정밀공학회지
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• 제30권5호
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• pp.544-551
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• 2013

Recently high speed mixer, which is mixing, grinding, dispersion for liquid-liquid material, has been widely used several industries such as food, cosmetics, pharmaceuticals, fine chemicals, electronic material. This high speed mixer has a core element part called particle separation device. Particle separation device, which makes mixed liquid and liquid material using shear forces from a rotor and a stator, is a decisive factor in the distributed parts. In this study, we examined the velocity distribution of the two models of particle separation device using computation fluid dynamics, so that we were able to see the difference of the velocity distribution according to the shape. Also, by experiment, we observed that the use of rotor-screen type is deemed more suitable in case of accurately considering the effect of improving of the dispersibility through the circulation of the future.

• 한국전기전자재료학회논문지
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• 제11권6호
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• pp.458-464
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• 1998

This paper gives characterization of substrate and PZT(53/47) thin film deposited by metalorganic decomposition, which is concerned in deposition process and device fabrication process, to fabricate micro electro mechanical system (MEMS) device with piezoelectric material. The PZT thin films deposited by MOD at 700^{\circ}C$ for 30 minutes had a polycrystallinity, that is, no substrate dependence, while different interface were developed depending on the bottom electrodes. Such a structural variation could influence on not only the properties of the PZT film but also etching process for fabricating MEMS devices. Therefore the electrode structure is a very important factor in the deposition of the PZT film during etching process by HF acid for MEMS device with piezoelectric material. Piezoelectric coefficients of the PZT films on the different substrates were 40 and 80 pm/V at an applied voltage of 4V. Based in these results, it was possible for deposition of the PZT film by MOD to apply MEMS device fabrication process based on piezoelectricity after selection of proper bottom electrode.

• 항공우주시스템공학회지
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• 제10권1호
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• pp.86-94
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• 2016

In this paper, position control of focal plane compensation device using piezoelectric actuator is conducted. The forcal plane compensation device installed on earth observation satellite camera compensates micro-vibration from reaction wheels. In this study, four experimental models of the open-loop compensation device are derived using MATLAB system identification toolbox in the input range of 0~50Hz. Subsequently, the PID controller for each model is designed and the performance test of each controller is conducted through MATLAB/Simulink. According to frequency response analysis of the closed-loop compensation device system, the PID controller designed for 38~50Hz input range has enough tracking performance for the whole 0~50Hz input range. The maximum output error is about $1{\mu}m$ for the input range. The simulation results has been verified by the experimental method.

• 한국정밀공학회지
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• 제34권1호
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• pp.59-63
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• 2017

We present a multi-sample array device based on a pneumatic system. Solenoid valves were used to control a micro valve in a pneumatic system. The use of a compressor together with a vacuum pump ensured that one outlet could supply both compression and vacuum pressure. The multi-sample array device was fabricated using conventional photolithography and PDMS casting. The device was composed of a multiplexer, sample array, and rinsing. The multiplexer could control four sample solutions injecting into the sample array chamber. Sample solution not arrayed was removed by DI-water from the rinsing inlet. To prevent trapping of microbubbles in the channel during injection of sample solution into the device, surfactant was added in PDMS solution to serve as a hydrophilic surface treatment. As a result, the device could be used as a sample array for 64 cases, using four samples and three columns of three chambers.