• Journal of the Semiconductor & Display Technology
• /
• v.1 no.1
• /
• pp.35-40
• /
• 2002

Understanding of charging properties of a small particle is necessary to control the particle contamination and to improve productivity of the electronic device in the plasma aided semiconductor manufacturing processes. In this study, the effects of both magnetic field and particle size on the charging properties are experimentally investigated in collisional dusty plasmas. The experiments carried out in the system consisted of a monodisperse particle generation system, a DC magnetized plasma generation system and a charge measurement system. The plasma chamber is made of cross-shape Pyrex surrounded by magnetic bucket (composed of 12 permanent magnetic bar) to confine the plasma. DC magnetic field up to 250G are applied to the plasma zone by external magnetic coil. Previous work shows the charging effect clearly increase with increasing the size of the particle and plasma density, as it was expected.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.08a
• /
• pp.106.1-106.1
• /
• 2013

When strong static magnetic field is applied to the TMP, it is expected that the presence of the magnetic field might retard the velocity of the blades which results in the change of the pumping speed of the TMP. However, such effect of the magnetic field on the TMP has not been well characterized. Thus, under the strong magnetic field, monitoring pumping speed as well as generated heat, pressure, and vibration of the TMP may be an important issue to understand the magnetic field tolerance of the TMP and the development of magnetic shielding technique for the key components of the pump. For this purpose, magnetic field generation system to the vertical direction by a circular current source was firstly designed and suggested [K. Baik et al., 44th Annual Conf. KVS, 22(1), 153, (2012)]. In the current study, another magnetic field generation systems are presented to apply the magnetic field to the horizontal and radial directions by the rectangular current sources and the permanent magnets respectively. Such systems were made to generate at least 50 Gauss of magnetic field along the vertical direction and at least 25 Gauss of magnetic field along the horizontal or radial direction. Current study introduces the evaluation system of the magnetic field along the vertical, horizontal, and radial directions and presents the measured experimental results of the magnetic field when such systems are combined with the equipment where TMP will be installed.

• Journal of the Korean Magnetics Society
• /
• v.13 no.6
• /
• pp.251-256
• /
• 2003

We have developed the quality analysis system for magnetic field effect of cathode-ray tube that is used a monitor, TV and medical appliance. We designed and constructed the large 3-axis square coil (2 m length) system for the generation of 3-component magnetic field using power supply, magnetometer and computer below 0.2 mT range. The coil constant is 30.31 ${\mu}$T, 29.73 ${\mu}$T and 30.51 ${\mu}$T for the X, Y and Z axis square coil respectively. The magnetic field resolution was 0.01 T. The uniformity of magnetic field was measured within 1 ％ in the range of 12 cm.

• Journal of the Korean Magnetics Society
• /
• v.12 no.4
• /
• pp.137-142
• /
• 2002

A precision magnetic field was generated by the NMR magnetometer and electromagnet system. The current and field feedback systems are used to control of magnetic field in the electromagnet using computer. Stability of magnetic field according to results that compare field and current feedback, current method is better than 2 times. The stability of magnetic field with current feedback improved 10 times compared with no feedback. This system is used for the calibration of magnetometers and the testing related to magnetic fields.

• Journal of the Korean Magnetics Society
• /
• v.24 no.1
• /
• pp.22-27
• /
• 2014

North indicating azimuth angle sensors have been used in airplanes, ships traditionally and nowadays employed in smart phones. For the azimuth and roll angle measurement of the sensor, 3-axis acceleration sensor was added to the 3-axis magnetic field sensor. In this work, we have constructed a measuring system for the measurement of the magnetic field and the angle uncertainty of the magnetic field sensors. Measuring system could be useful not only in non-magnetic laboratory but also in normal laboratory, we constructed small size of 3-axis Helmholtz coils for the compensation environment magnetic field (Earth magnetic field and magnetic field from building) and the generation of magnetic field for the test of magnetic field sensor. The constructed measuring system could compensate environment magnetic field below 10 nT level and generate 3-dimensional magnetic field with magnitude uncertainty of 0.2 % and angle error of $0.2^{\circ}$ within the volume of ${\pm}30mm$ diameter at center of Helmholtz coils. For the conformation of developed measuring system, We tested commercially available 3-axis magnetometer and heading sensor.

• Proceedings of the KIPE Conference
• /
• 2014.07a
• /
• pp.383-384
• /
• 2014

This paper investigates the experimental and simulated time-varying magnetic field generation in a chlor-alkali manufacturing process. 19kA thyristor-based rectifier is modeled and analyzed. The performance is compared and evaluated on the basis of exposure guidelines from ICNIRP. The mechanical structure of current carrying conductor is simplified as an infinite long busbar model and low frequency harmonic contents up to 65kHz are considered. Thyristor rectifier generates a significant amount of low frequency magnetic field harmonic contents both at ac and dc busbar of rectifier infringing the limit of ICNIRP. Along with simulation analysis the experimental measurement of the time-varying magnetic field in ac input busbar, rectifier block, dc load and busbar are presented. The experimental test results partly confirm the simulation results.

• Progress in Superconductivity and Cryogenics
• /
• v.1 no.1
• /
• pp.33-37
• /
• 1999

The fast current and field ramp-up experiment was done with the superconducting magnet that is made of three non-insulated strand CICC (Cable-In- Conduit Conductor). The shunt the unbalanced current magnet enabled the unbalanced current measurement which is believed to be associated with the loop current. To explain the generation of the loop current during the current ramp up. the steady-state three strand loop current model was proposed. This model gives an explanation for the relation between the loop current and the twist geometry of the strands. According to this model. The twisr geometry and the surface contact resistance of the strand has significant influence on the generation of the loop current especially in the large superconducting magnet.

• Journal of the Korean Magnetics Society
• /
• v.24 no.3
• /
• pp.76-80
• /
• 2014

Toroidal cores made of metallic powder requires large magnetic field strength up to few decade kA/m to obtain major hysteresis loop. To overcome thermal heat generation problem from large exciting current during measurement, we have employed a real time hysteresis loop tracer which can digitize and calculate B-H signals in personal computer as real time. For example, when we magnetize specimen at 10 Hz frequency, we could display hysteresis loops 10 times per second. Using the real time hysteresis loop tracer, we could measure major hysteresis loop of toroidal shape metallic powder core at maximum flux density or maximum magnetic field strength to be measured within 5 second not to significant increasement of specimen temperature due to the heat dissipation from coil windings. For the constructed hysteresis loop tracer, we could measure hysteresis loop at magnetic field strength higher than 50 kA/m for the toroidal shape specimen.

• Transactions of the Korean hydrogen and new energy society
• /
• v.34 no.2
• /
• pp.132-140
• /
• 2023

In this study, rotary magnet holder (RMH) was manufactured to analyze the ion transport effect according to the rotating magnetic field for the hydrogen production efficiency by alkaline water electrolyte. In the experiment, the voltage signal according to the magnet arrangement inside the RMH, the rotation speed, and the rotation time was measured using the voltage measurement module. As a result of the voltage signal measurement experiment, the average potential difference increased as the rotation speed of the RMH increased. Through the results of the voltage signal measurement experiment, the most efficient magnet arrangement (case 2) was applied to the RMH to conduct a water electrolysis experiment. A 20% NaOH aqueous solution was filled in the electrolytic cell, and a direct current 2 V constant voltage was applied to measure the current value according to the RMH rotation to compare the hydrogen generation amount. When rotating at 100 RPM, the hydrogen production efficiency increased by 8.06% compared to when not rotating. Considering the area exceeding +25 mA, which was not measured at the beginning of the experiment, an increase in hydrogen production of about 10% or more can be expected.

• Proceedings of the KIEE Conference
• /
• 1998.07e
• /
• pp.1800-1802
• /
• 1998

The Pohang Light Source (PLS) is a third generation 2 GeV synchrotron machine. An injection kicker modulator is positioned in the PLS storage ring tunnel. The kicker modulator is driving four kicker magnets simultaneously. The kicker magnets produce magnetic field to deflect the stored beam orbit in the storage ring closer to the injected beam from the PLS beam transfer line. The injected beam then falls into the storage ring beam dynamic aperture. The current kicker modulator was upgraded and installed on August 1995. Since then, the kicker modulator has shown very reliable and stable performance. The kicker modulator specifications are ${\sim}6.0{\mu}s$ full width, ${\sim}24$ kA peak current, and 10 Hz repetition rate. Output current waveform is a half sinusoid. Two thyratron switches(EEV CX-1536AX) are used in the kicker modulator. Total accumulated thyratron heater run hour is about 15,000 hours as of May 1998. Measurement result of spatial magnetic field distribution in the kicker magnet shows good uniformity.