• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.04b
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• pp.69-71
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• 2009

Meander 형태의 인덕터를 각각 산화마그네슘 (MgO)기판과 산화 알루미늄 ($Al_2O_3$) 기판 위에 구현하여 고주파 특성을 구조 시뮬레이션을 통해 연구하였다. 고주파 시뮬레이션을 통해서 적절한 구조의 meander 형태의 인덕터를 선정하여 시뮬레이션을 수행하였다. 시뮬레이션시 사용된 알루미늄 상부전극은 길이 282 nm, 폭 45 nm, 두께 100 nm, 간격은 15 nm의 구조 였으며, 5, 7, 9, 11, 13턴의 meander 형태 인덕터 소자들을 이용하여 고주파 수동소자 응용을 위한 고주파 구조 시뮬레이션을 50 MHz에서부터 30 GHz까지 수행하였다. 주파수에 따른 인덕턴스와 품질계수를 등가회로를 이용하여 계산하였다. 시뮬레이션으로부터 자기공진주파수 (SRF, self resonance frequency)가 인덕터의 턴 수가 증가함에 따라 저주파 영역으로 이동하는 것을 확인하였고, 고주파 시뮬레이션 결과에서 산란 매개변수 (S-parameter, $S_{21}$)로부터 인덕턴스와 품질계수를 추출해내었다.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.43 no.12 s.354
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• pp.75-82
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• 2006

In this paper, we design the meander line inductors with high sensitivity and high quality factor(Q) using high characteristic impedance of aperture ground plate. Sensitivity as a frequency is new defined by variation of effective inductance per analysis frequency range instead of self resonance frequency (SRF). An equivalent lumped circuit is derived to explain the characteristic of high frequency inductor. The 4 nH meander line inductor with aperture ground plate has 0.45 nH/GHz of good sensitivity and 86 of Q at 0.7 GHz.

• Journal of the Korean Magnetics Society
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• v.6 no.6
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• pp.367-374
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• 1996

The developmement of electronic machine industries requires miniature of size as well as increasement of driving frequency in electronic parts, recently. To realize micro-struture of magnetic devices, in this study, we fabricated thin film inductors by using thin film manufacturing techniques such as photolithography and wet etching process, and these devices are measured at high frequency range of 1 MHz~1 GHz. The results are as follows. The accurate measuring technique by using network analyzer system having microstrip line was established. The manufactured inductors are fabricated with several ten micrometers by means of wet etching process known as easier and more economic than dry etching process. VVhen the device size of two types (spiral, meander) is the same, inductance value L and quality factor Q of spiral type devices are larger than those of meander type, but driving frequency of spiral type is lower than that of meander type due to increasement of inductance L. It is necessary to decrease resistance value R by increasing cross section of the conductor film coil. Thus high frequency measuring method would be a very useful for another measuring fields of the range over several hundreds MHz.

• Journal of the Korean Magnetics Society
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• v.6 no.3
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• pp.179-188
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• 1996

This paper discussed on the impedance analysis of the planar air core inductors having spiral pattern and meander pattern. The width and distance of conductor, and number of turns were varied. As the width of conductor increased, both resistance and inductance decreased and there existed an maximum value in Q for spiral pattern. But Q increased with increasing width of conductor in meander pattern. In spiral pattern, there existed a distance between conductors where inductance became constant and Q became maximum, while the distance between conductors must be as large as possible to obtain large Q because the mutual inductance of meander pattern inductor has negative sign due to opposite current direction at adjacent conductor. Resistance and inductance increased with increasing the number of turns. There existed maximum Q at certain number of turns in spiral pattern. But Q became small in the meander pattern because increase of resistance was larger than increase of inductance with increasing number of turns.

• Proceedings of the Korean Magnestics Society Conference
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• 1998.10a
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• pp.120-121
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• 1998

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.8
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• pp.641-644
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• 2009

We have studied on the microwave characteristics for the meander type inductors on the MgO substrates and $Al_2O_3$ substrates by employing 3-D high frequency simulation, respectively. Proper designs of meander type inductors were proposed and confirmed through the high frequency simulations, 5, 7, 9, 11, and 13 turns meander type inductors have been choose to analyze the electrical properties for the microwave passive component applications. The Al top electrodes have 282 nm length, 45 nm width, 100 nm thickness and 15 nm gap. The simulations were carried out from 50 MHz to 30 GHz, Frequency dependent inductances and quality factor were calculated by employing the equivalent circuit model of meander type inductors. The self resonances frequency of meander type inductor were shifted from high frequency to low frequency range as the number of the turn of inductors was increased. From the microwave simulations, the inductances and quality factors of meander type inductors were extracted through the scattering parameter.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.352-352
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• 2008

폐 자기회로 구조를 갖는 Meander 형태의 Inductor 설계를 위해 HFSS 프로그램을 이용하여 Meander Inductor를 시뮬레이션 하였다. Meander Inductor의 turn 수(N) 및 폭(W), 두께(T), 랩(G)의 변화에 따른 인덕턴스(L), S-parameter(S)와 Q-factor(Q)의 변화를 HFSS 를 통해 측정하였다. Al2O3 기판과 MgO의 두께는 각각 680um, 50um로 고정하였고, silver electrode를 이용하여 Meander 타입의 Inductor를 설계하였다. Meander Inductor의 turn수(6,7,8turn)의 변화를 측정한 결과, 8턴이었을 때 Q-factor가 19로서 가장 높은 결과를 얻었다. L의 결과 값은 공진 주파수와 의 관계에 의해 6turn일 때 L값은 17GHz에서 공진현상이 나타났다. 또한 W, G, T에 변화를 주어 설계한 뒤 시뮬레이션의 결과 값을 측정하였다. 그 값을 서로 비교한 결과, 변수들의 변화에 따라 L값과 Q-factor가 변화되었다. 이 논문에서는 각 변수에 따른 meander inductor의 특성을 HFSS 시뮬레이션을 통해 비교하고자 한다.

• Journal of Advanced Marine Engineering and Technology
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• v.34 no.2
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• pp.325-331
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• 2010

In this study, highly miniaturized short-wavelength meander line employing eriodically patterned ground structure (PPGS) was developed for application to miniaturized on-chip passive component on GaAs MMIC (monolithic microwave integrated circuit). The meander line employing PPGS showed shorter wavelength and slow-wave characteristic compared with conventional meander line. The wavelength of the meander line employing PPGS structure was 17 % of the conventional meander line on GaAs MMIC. Due to its slow-wave structure, the meander line employing PPGS exhibited large propagation constant than conventional meander line, which resulted in larger phase shift and shunt inductance value. Above results indicate that the meander line employing PPGS is a promising candidate for application to a development of miniaturized on-chip RF components as well as inductor with a high inductance value on GaAs MMIC.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.21 no.3
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• pp.315-320
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• 2010

In this paper, an internal TDMB(Terrestrial Digital Multimedia Broadcasting) antenna for mobile phone is proposed. The overall dimension of designed antenna with substrate is 30 mm$\times$5 mm$\times$0.6 mm. The proposed antenna consists of a meander type radiator which is connected front- and back-plane of Kapton substrate by via hole and parasitic element for tuning the resonant frequency. And to compensate the electric length of desired frequency, passive inductor is used for matching element. Measured gain of the implemented antenna -17.6 dBi at 174 MHz, -13.01 dBi at 195 MHz, and -14.9 dBi at 216 MHz.

• Journal of the Korean Magnetics Society
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• v.8 no.4
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• pp.241-248
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• 1998

In accordance with tendency to miniaturization and high frequency operation of electronic products, extensive efforts of miniaturizing magnetic devices such as inductors, transformers and magnetic sensors are being made. In order to study on fabrication and characteristic of micro-magnetic devices, we carried out two sets of experiments. One is to develop a magnetic film that is suitable for high frequency operation, and the other is to develop the fabrication processes for realizing the micro-coil with meander shape. Magnetic films were composed of FeTa(N,C) fabricated by DC magnetron sputtering system. Their microstructures were nanocrystalline structure and magnetic properties showed Bs:13~17 kG, Hc:0.1~0.2 Oe and $\mu$':2000~4000. Cu coil pattern fabricated by selective electroplating process showed good electrical conductivity. In the case of air core inductors, inductance (L) of 50 nH, resonance frequency $(f_R)$ of 700 MHz, and quality factor (Q) of 30 at 200 MHz could be obtained. In the case of close type magnetic inductors, inductance (L) of 150 nH, resonance frequency $(f_R)$ of 100 MHz, and quality factor (Q) of 4 at 10~30 MHz could be obtained.