• Journal of Sensor Science and Technology
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• v.1 no.1
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• pp.35-41
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• 1992

A constant temperature type of flow sensor using a solid state micromachining technology was developed for measuring the velocity of gas or liquid. It was designed to detect only the heat convection related to flow velocity. Other heat transfer terms and common mode interferences are canceled by differentiating both reference and exposed flow sensor. It employs the principle that the change of current through the sensing element can be used to measure the flow velocity. An experimental study of the behavior on this flow sensor was performed in a narrow tube(diameter : 8mm) for city water. The relation between power consumption of the flow sensor and square-root of flow velocity is almost linear in the low velocity range(0-200 cm/sec).

• Journal of Biomedical Engineering Research
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• v.42 no.4
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• pp.193-200
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• 2021

Flowmeter and oxygen sensors are listed in COVID-19 essential medical devices. This article reports a Teensy microcontroller-based Oxygen mass flow controller (MFC), core part of the oxygen respirator or extracorporeal membrane oxygenation (ECMO). The developed MFC consisting of the microcontroller, MEMS flow sensor, and solenoid valve was able to accurately control 0 to 100 sccm of oxygen flow rate. The pressure of vacuum chamber increased proportionally to the flow rate (0.998 of Pearson correlation coefficient). The experimental results proved that the developed MFC exhibits comparable performance to a commercial MFC in accuracy, settling time, linearity with pressure, and repeatability of oxygen mass flow control. It is expected that this simple and cheap MFC is utilized for oxygen therapy against the severe acute respiratory syndrome coronavirus 2.

• Transactions of the Korean Society of Automotive Engineers
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• v.9 no.1
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• pp.102-111
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• 2001

To describe the air flow characteristics within an air cleaner cover and mass air flow sensor (MAFS) entry region installed in a 3.0L engine air induction system, flow visualization, velocity and turbulence intensity measurements were taken in several view planes. A detailed knowledge of the interaction between the design parameters and the flow structures will enhance our understanding of the motions within the flow field and enable engineers to optimize the induction system and reduce the signal-to-noise ratio in the MAFS output. Emphasis is placed on the analysis of coherent motions and the controlling parameters which affect the air flow in the MAFS entrance region over a flow rate of 13-240 kg/hr. The high speed motion pictures illustrated that the air flow generated within the air cleaner cover under steady state condition is quite complex. In both axial and radial planes of the main passage it was found that the flow pattern is remarkably influenced by the air cleaner cover and main passage configuration. A comparison of the flow patterns and measurements in the original and modified air cleaner cover is presented. Measurements from the MAFS indicated an significant reduction in pressure drop and signal noise for the modified cover as compared with the original cover, over an air flow rate of 13-240 kg/hr.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.39 no.4
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• pp.309-316
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• 2015

Numerical analysis and experimental verification of a thermal liquid mass flow meter (LMFM) were performed. The configuration of the LMFM was the same as a gas mass flow meter (GMFM), but the opposite results in temperature difference between upstream and downstream thermistors occurred. In the case of the gas, the convection depending on the flow of thermal mass was small and comparable to the conduction through the sensor tube wall. The temperature difference was proportional to the mass flow rate due to their interaction. For the liquid flow, the convection overwhelmed the wall conduction because of the large flow of thermal mass caused by high density. The temperature difference in this case was inversely proportional to the mass flow rate. The tube diameter and heater wiring width are important design parameters, and the optimized sensor can be used to measure and control the infinitesimal liquid flow rate.

• Journal of Sensor Science and Technology
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• v.4 no.2
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• pp.29-36
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• 1995

A constant solid state flow velocity/mass sensor has been fabricated and its characteristics were measured according to flow velocity and fluid temperature. Parameters of the sensor circuit were obtained by simulation using finite difference method. Sensitivity was 10mW/(cm/sec) in the range of flow velocity 0-45cm/sec and response time was within two seconds. For the experiment of fluid temperature variation, the sensor output was compensated at the rate of temperature variation $0.1^{\circ}C/min$, however, with the rate of $0.2^{\circ}C/min$ it took two minutes to be compensated. Since it is not quite often to have such a rate of temperature variation of $0.2^{\circ}C/min$ or more, the developed sensor output can be used for most applications to detect small amount of flow-rate.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.2 s.179
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• pp.146-153
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• 2006

Acceleration sensors have widely been used in the various fields of industry. In recent years, micromachining accelerometers have been developed and commercialized by the micromachining technique or MEMS technique. Typical structure of such sensors consist of a cantilever beam and a vibrating mass fabricated on Si wafers using etching. This study investigates the feasibility of powder blasting technique for microfabrication of sensor structures made of the pyrex glass alternating the existing Si based acceleration sensor. First, as preliminary experiment, effect of blasting pressure, mass flow rate of abrasive and no. of nozzle scanning on erosion depth of pyrex and soda lime glass is studied. Then the optimal blasting conditions are chosen for pyrex sensor. Structure dimensions of designed glass sensor are 2.9mm and 0.7mm for the cantilever beam length and width and 1.7mm for the side of square mass. Mask material is from aluminium sheet of 0.5mm in thickness. Machining results showed that tolerance errors of basic dimensions of glass sensor ranged from 3um in minimum to 20um in maximum. This results imply the powder blasting can be applied for micromachining of glass acceleration sensors alternating the exiting Si based sensors.

• Journal of ILASS-Korea
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• v.21 no.1
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• pp.1-6
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• 2016

A gasoline injector rig which can measure cumulative injected fuel mass under a vehicle driving condition was developed. The measurement system consists of an engine control unit (ECU), data acquisition (DAQ) and injected fuel collection system using loadcells. By supplying reconstructed sensor signals which simulate the real vehicle's sensor signals to the ECU, the ECU drives injectors as if they were driven in the vehicle. The vehicle's performance was computer simulated by using $GT-Suite^{(R)}$ software based on both engine part load performance and automatic transmission shift map. Throttle valve position, engine and vehicle speed, air mass flow rate et al. were computer simulated. The used vehicle driving pattern for the simulation was FTP-75 mode. For reconstructing the real vehicle sensor signals which are correspondent to the $GT-Suite^{(R)}$ simulated vehicle's performance, the DAQ systems were used. The injected fuel was collected with mess cylinders. The collected fuel mass in the mess cylinder with elapsed time after starting FTP-75 driving mode was measured using loadcells. The developed method shows highly improved performance in fast timing and accuracy of the cumulative injected fuel mass measurement under the vehicle driven condition.

• Journal of Sensor Science and Technology
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• v.8 no.5
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• pp.394-399
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• 1999

An automobile hot-film air flow sensor is deposited with platinum by sputtering method, patterned by photoresisted lift-off method, annealed in $1,000^{\circ}C$ and passivated with PI-2723. The TCR of the fabricated hot-film is about $3500\;ppm/^{\circ}C$. In the experiment, the output voltage of the sensor is in proportional to the fourth power root in the air mass flow range of 300 kg/h. The error in the full flow range is about ${\pm}0.7%$. In the range of air temperature of $-20^{\circ}C{\sim}120^{\circ}C$, the error is about ${\pm}1%$ that is ${\pm}2%$ lower than that of the reference sensor. Therefore, the fabricated hot-film air flow sensor satisfies the specification for automobile. Lower temperature error of the sensor provides to control the precise air/fuel ratio of automobile engine and results in improvement of a fuel mileage and the less amount of toxic gases emitted by automobile.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1951-1956
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• 2008

Various MEMS accelerometers are used in engineering applications including automobiles, mobile phones, military systems, and electronic devices. Among them, the thermal accelerometer employing the temperature difference induced by the convective flow inside the micro cavity has been a topic of interest. As the convective sensor does not utilize a solid proof mass, it is compact, lightweight, inexpensive to manufacture, sensitive and highly endurable to mechanical shock. However, the complexity of the convective flow and various design constraints make optimization of a device a crucial step before fabrication. In this work, optimization of a 2-axis thermal convective MEMS accelerometer is conducted based on 3-dimensional numerical simulation. Parametric studies are performed by varying the several design variables such as the heater shape/size, the cavity size and types of the gas medium and the position of temperature probes in the sensor. The results of optimal design are presented.

• Journal of Sensor Science and Technology
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• v.3 no.1
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• pp.12-18
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• 1994

In this study, we fabricated and characterized a calorimetric-type flow sensing element using a micromachined silicon substrate. The cooling and heating effects resulted from the gas flow were measured by two temperature sensors located at both sides of the heating resistor, and the insulator diaphragm was employed as a substrate in order to improve thermal isolation. The sensor generated $0{\sim}378.4mV$ output signal under 10V bridge-applied voltage when the nitrogen gas was passed on the sensor surface having a mass flow rate of $0{\sim}0.25grs/min$, and reached to the stable operating condition within 10 seconds.