• Journal of the Korean institute of surface engineering
• /
• v.32 no.6
• /
• pp.658-664
• /
• 1999

Helicon sources are attractive for plasma processing because they provide high plasma density in low magnetic fields. Helicon waves were excited by a Nagoya type III antenna in a magnetized plasma column. Plasma parameters were measured with a double probe, and the structure and adsorption of the helicon wave fields were determined with the probes. Argon is fed through a MFC (mass flow controller) for operation pressure of 10~110 mtorr. A 13.56 MHz r.f. power of 50~450 W is induced through the antenna. The plasma density and electron temperature are measured as functions of external magnetic field, r.f. power and pressure. The plasma density as functions of r.f. power and magnetic field at a constant pressure increased linearly, and the electron temperature did not change largely with various operation parameters and the value was around 5~7 eV.

• Journal of the Semiconductor & Display Technology
• /
• v.4 no.3 s.12
• /
• pp.23-27
• /
• 2005

The effects of the base vacuum level on a plasma display panel (PDP) produced by the vacuum in-line sealing technology were investigated. The main equipment of the vacuum in-line sealing process consists of the sealing chamber, pumping systems for evacuating, mass flow controller for introducing the plasma gases, and other measuring systems. During the sealing process, the impurity gases were fully evacuated and the panel was prevented from the adsorption of impurity gases. As a result, the brightness increased as the impurity gas density decreased, so we found that the vacuum in-line sealing process was more efficient technology an the conventional sealing process.

• Journal of Institute of Control, Robotics and Systems
• /
• v.21 no.8
• /
• pp.735-741
• /
• 2015

In this paper, we suggest a dimensional controller to produce a different thickness strip without adding production facilities at the same steel. We describe the model for the non-linear thickness and speed setup, and drive a variation of the speed and thickness with Talyor expansion. The control algorithm is composed of 8 steps and the transient condition is added in order to maintain a mass flow between stands. A simulator is developed in order to verify the algorithm, and includes a non-linear rolling model, the tension model, AGC model, the disturbance model, and so on. From the simulation results by disturbances, we show that the thickness, tension and looper angle are converged to the set condition when we change the rolling conditions.

• Transactions of the Korean Society of Mechanical Engineers
• /
• v.19 no.8
• /
• pp.2012-2021
• /
• 1995

An experimental study was performed for the analysis of dynamic characteristics of refrigeration system by controlling the evaporator superheat. Experimental data have been taken utilizing two different devices, thermostatic expansion valve(T.E.V.) and electronic expansion valve(E.E.V.), for the control of the evaporator superheat. The ranges of parameters, such as superheat, mass flow rate of refrigerant and inlet temperature of evaporator were 5-30.deg. C 90-170 kg/h and 10-25.deg. C, respectively. The data taken from the T.E.v.and E.E.v.were discussed with the control of the superheat, pressure drop, refrigerating capacity, compression work, evaporating temperature, condensing temperature and COP affecting performance characteristics of refrigeration system. In case of the refrigerant flow control with T.E..V., the superheat and pressure drop of the evaporator varied periodically, but the control with E.E.V., the parameters were very stable. In E.E.v.control, refrigerating capacity, compression work and evaporating temperature were decreased with increasing superheat, and the highest COP was obtained in the range of superheat from 5.deg. C to 15.deg. C.

• Journal of ILASS-Korea
• /
• v.7 no.2
• /
• pp.7-15
• /
• 2002

A particle flow visualization, electrostatic charging measurement and separation of triboelectrically charged particles in the external electric field by a fluidized bed tribocharger are conducted for the removal of PVC particles from mixed waste plastics. The laboratory-scale triboelectrostatic separation system consists of the fluidized bed tribocharger, a separation chamber, a collection chamber and a controller. PVC and PET particles can be imparted negative and positive surface charges respectively due to the difference of triboelectric charging series between particles and particles in the fluidized bed tribocharger, and can be separated by passing them through an external electric field. To visualize these charged particles, He-Ne laser is used with cylindrical lenses to generate a sheet beam. In the charging measurement, the particle motion analysis system (PMAS), capable of determining particle velocity and diameter. is used to non-intrusively measure particle behavior in high strength electric field. The average charge-to-mass ratios of PVC and PET particles are $1.4\;and\;1.2{\mu}C/kg$, respectively. The highly concentrated PVC (91.9%) can be recovered with a yield of about 96.1% from the mixture of PVC and PET materials for a single-stage processing. The triboelectrostatic separation system using the fluidized tribocharger shows the potential to be an effective method for removing PVC from mixed plastics for waste plastic recycling.

• Journal of the Korea Safety Management & Science
• /
• v.12 no.4
• /
• pp.93-98
• /
• 2010

본 연구에서는, 반도체, LCD 공정에서 금속막을 증착하기 위하여 PECVD장비에 화재, 폭발 위험성과 독성을 가진 Silane가스를 사용하게 되는 장비인 gas cabinet, pipeline, VMB(Valve manifold box), MFC(mass flow controller)장비 등, 전반적인 시스템에 대하여 영국 HES의 ALARP개념을 도입하여 위험성 평가를 실시하여 문제점을 도출하고 대책을 강구 하는데 목적이 있고, 여러 가지 문제점중 절대적으로 수용 할 수 없는 Critical Risk로는 Gas Cylinder를 사용하여 Silane을 공급하고자 할 때에는 필히 Gas Cabinet을 사용하여 공급하여야 하고, Tube Trailer를 사용하여 공급하고자 할 때에는 필수적으로 Purge System을 갖추어 공급하여야 한다. 선택적으로 수용할 수 있는 High, Medium Risk로는 Gas Cylinder 또는 Tube Trailer를 사용하여 Silane을 공급하고자 할 때는 Inlet 부분에 RFO(Resticted Flow Orifice)를 설치하여 사용하고 Gas Supply Room에는 CO2소화설비를 적용하지 말고 Water Mist등 물 분무설비를 적용하여야한다.

• Transactions of the Korean hydrogen and new energy society
• /
• v.23 no.2
• /
• pp.183-190
• /
• 2012

The research shows the experiment results according to the combustion characteristics and configuration of the linear generator of powerpack for the generating power applying the 2-stroke compact linear engine. The powerpack used in this paper consists of 2-stroke linear engine, linear generator and air compressor parts. For identifying the combustion characteristics and generating power of linear engine, some parameters were varied sucha as electric load, fuel input calorie, spark timing delay and equivalence ratio. Also generating power was confirmed at each operation conditions, when the air gap length of linear generator part was changed as each 1.0 mm and 2.0 mm. During the all operations, intake air was inputted under the wide open throttle. Mass flow rate of air and fuel was changed using mass flow controller, after these were premixed by premixture device, and then premixed gas was supplied directly into each cylinder. As a result, piston frequency and combustion characteristics were different at each conditions according to parameters affecting the combustion such as fuel input calorie, resistive load, spark timing delay and equivalence ratio. Consequently, these had an effect on generating power.

• Journal of Digital Contents Society
• /
• v.16 no.3
• /
• pp.483-492
• /
• 2015

This thesis analysis the CARBO 3000 that is one of a $CO_2$ infuser and improve its effectiveness. The thesis designs H/W and S/W that controls the $CO_2$ infusing mass compared to the CARBO 3000. Specially the designed H/W has a newly CPU, LCD, a flow velocity controller, a solenoid valve and a flow sensor. Also the designed S/W is composed of GUI and the algorithm to control the $CO_2$ infusing mass. The designed and implemented the $CO_2$ Infuser in this thesis is tested for the performance. The commercial measuring sensor is used for the test. The testing results say that the designed and implemented the $CO_2$ Infuser in this thesis is much more accurate compared to the CARBO 3000 on $CO_2$ infusing.

• Nuclear Engineering and Technology
• /
• v.55 no.2
• /
• pp.460-474
• /
• 2023

A simple but accurate mathematical model is crucial for dynamic simulations and controller design of helical coil once-through steam generator (OTSG). This paper presents a three-region movable boundary dynamic model of the helical coil OTSG. Based on the secondary side fluid conditions, the OTSG is divided into subcooled region (two control volumes), two-phase region (two control volumes) and superheated region (three control volumes) with movable boiling boundaries between each region. The nonlinear dynamic model is derived based on mass, energy and momentum conservation equations. And the linear model is obtained by using the transfer function and state space transformation, which is a 37-order model of five input and three output. Validations are made under full-power steady-state condition and four transient conditions. Results show good agreements among the nonlinear model, linear model and the RELAP5 model, with acceptable errors. This model can be applied to dynamic simulations and controller design of helical coil OTSG with constant primary-side flow rate.

• Progress in Superconductivity and Cryogenics
• /
• v.20 no.3
• /
• pp.21-27
• /
• 2018

It is difficult to fabricate and maintain moving parts of expander at cryogenic temperature. This paper describes numerical analysis and experimental investigation on a cryogenic reciprocating expander without moving piston. An intake valve which takes high-pressure gas, and an exhaust valve which discharges low-pressure gas, are connected to a tube. The inside pressure of the tube is pulsated for work production. This geometric configuration is similar to that of pulse tube refrigerator but without regenerator. An orifice valve and a reservoir are installed to control the phase of the mass flow and the pressure. At the warm end, a heat exchanger rejects the heat which is converted from the produced work of the expanded gas. For the numerical analysis, mass conservation, energy conservation, and local mass function for valves are used as the governing equations. Before performing cryogenic experiments, we carried out the expander test at room temperature and compared the performance results with the numerical results. For cryogenic experiments, the gas is pre-cooled by liquid nitrogen, and then it enters the pulse tube expander. The experiments are controlled by the opening of the orifice valve. Numerical analysis also found the expander conditions that optimize the expander performance by changing the intake pressure and valve timing as well as the opening of the orifice valve. This paper discusses the experimental data and the numerical analysis results to understand the fundamental behavior of such a newly developed non-mechanical expander and elucidate its potential feature for cryogenic application.