• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.172-176
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• 2002

This paper describes a MEMS-based micro-fluxgate magnetic sensing element using Ni$\_$0.8/Fe$\_$0.2/ film formed by electroplating. The micro-fluxgate magnetic sensor composed of a thin film magnetic core and micro-structured solenoids for the pick-up and the excitation coils, is developed by using MEMS technologies in order to take advantage of low-cost, small size and lower power consumption in the fabrication. A copper with 20um width and 3um thickness is electroplated on Cr(300${\AA}$)/Au(1500${\AA}$) films for the pick-up(42turn) and the excitation(24turn) coils. In order to improve the sensitivity of the sensing element, we designed the magnetic core into a rectangular-ring shape to reduce the magnetic flux leakage. An electroplated permalloy film with the thickness of 3 $\mu\textrm{m}$ is obtained under 2000Gauss to induce magnetic anisotropy. The magnetic core has the high DC effective permeability of ∼1,100 and coercive field of -0.1Oe. The fabricated sensing element using rectangular-ring shaped magnetic film has the sensitivity of about 150V/T at the excitation frequency of 2MHz and the excitation voltage of 4.4Vp-p. The power consumption is estimated to be 50mW.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권9호
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• pp.418-423
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• 2003

This paper describes an electronic compass using micromachined X- and Y-axis micro fluxgate sensors which were perpendicularly aligned each other to measure X- and Y-axis magnetic fields respectively. The fluxgate sensor was composed of rectangular-ring shaped magnetic core and solenoid excitation(49 turns) and pick-up(46 turns) coils. Excitation and pick-up coil patterns which were formed opposite to each other wound the magnetic core alternatively to improve the sensitivity and to excite the magnetic core in an optimal condition with reduced excitation current. The magnetic core has DC effective permeability of ~1000 and coercive field of ~0.1 Oe. The magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. To decrease the difference of induced second harmonic voltages from X- and Y-axis, excitation condition of 2.8 $V_{P-P}$ and 1.2 MHz square wave was selected. Excellent linear response over the range of -100 $\mu$T to +100 $\mu$T was obtained with 210 V/T sensitivity. The size of each micro fluxgate sensor excluding pad region was about 2.6${\times}$1.7 $mm^2$ and the power consumption was estimated to be 14 mW.W.

• 한국전기전자재료학회논문지
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• 제16권2호
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• pp.120-124
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• 2003

This paper describes a MEMS-based micro-fluxgate magnetic sensing element using Ni$\_$0.8/Fe$\_$0.2/ film formed by electroplating. The micro-fluxgate magnetic sensor composed of a thin film magnetic core and micro-structure solenoids for the pick-up and the excitation coils, is developed by using MEMS technologies in order to take advantage of low-cost, small size and lower power consumption in the fabrication. A copper with 20${\mu}$m width and 3${\mu}$m thickness is electroplated on Cr (300${\AA}$) / Au (1500${\AA}$) films for the pick-up (42turn) and the excitation (24turn) coils. In order to improve the sensitivity of the sensing element, we designed the magnetic core into a rectangular-ring shape to reduce the magnetic flux leakage. An electroplated permalloy film with the thickness of 3${\mu}$m is obtained under 2000 gauss to induce magnetic anisotropy. The magnetic core has the high DC effective permeability of ~1,100 and coercive field of ~0.1 Oe. The fabricated sensing element using rectangular-ring shaped magnetic film has the sensitivity of about 150 V/T at the excitation frequency of 2 MHz and the excitation voltage of 4.4 V$\_$p p/. The power consumption is estimated to be 50mW.

• 한국산학기술학회논문지
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• 제11권12호
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• pp.4891-4895
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• 2010

본 자기공명영상장치(MRI: Magnetic Resonance Imaging)의 구성 요소인 RF Coil의 성능은 영상의 신호대 잡음비(Signal to Noise Ratio)를 결정하는 장치이다. RF Coil의 성능은 민감도(Sensitivity)와 라디오주파수 필드 균질성(RF Field Uniformity)으로 나타내고, RF Coil에 의해 유기되는 라디오 주파수 자기장(B1 Field)의 세기는 RF Coil의 구조 및 배열에 따라 공간적으로 달라진다. MRI 신호의 크기는 RF Coil이 만들어내는 자기장의 세기에 의해 결정되기 때문에 RF Coil에 의해 형성되는 공간상의 B1 Field의 분포를 확인할 수 있어야 한다. 본 논문에서는 다채널 RF Coil 설계에 있어서 가장 기본이 되는 형태의 RF Coil 구조와 이의 B1 Field 분포를 Matlab을 이용하여 모의실험을 통해 확인 하였다. Matlab을 이용하여 계산된 기본 구조의 RF 코일이 형성하는 B1 Field 분포는 다채널 RF 코일 설계시 매우 유용하게 사용될 수 있을 것이다.

• 센서학회지
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• 제23권6호
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• pp.392-396
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• 2014

The 2-dimensional silicon vertical Hall devices, which are sensitive to X,Y components of the magnetic field parallel to the surface of the chip, are fabricated using a modified bipolar process. It consists of the thin p-layer at Si-$SiO_2$ interface and n-epi layer to improve the sensitivity and influence of interface effect. Experimental samples are a sensor type K with and type J without $p^+$ isolation dam adjacent to the center current electrode. The results for both type show a more high sensitivity than the former's 2-dimensional vertical Hall devices and a good linearity. The measured non-linearity is about 0.8%. The sensitivity of type J and type K are about 66 V/AT and 200 V/AT, respectively. This sensor's behavior can be explained by the similar J-FET model.

• 한국자기공명학회논문지
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• 제1권2호
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• pp.103-111
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• 1997

Proper pulse sequences and experimental optimization for the 3D 15N edited TOCSY and NOESY spectra were described. Using sensitivity enhancement approach with coherent selection by pulsed field gradients described by Kay and co-workers, an considerable gain in sensitivity was achieved. The sensitivity was also improved by minimal water saturation using water flip-back pulse. Among the three types of TOCSY mixing pulse, named MLEV-17, DIPSI-2rc, DIPSI-2rc sequence gave the most sensitive spectrum. These results suggest an appropriate pulse sequence for for those 3D experiments for large proteins.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1992년도 하계학술대회 논문집 B
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• pp.567-569
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• 1992

Design sensitivity analysis is proposed for the optimal shape design of three dimensional magnetostatic problems. The direct differentiation method is introduced for design sensitivity analysis and the boundary element method with reduced magnetic scalar potential as the state variable is used to analyze the magnetic characteristics. In the direct differentiation method, the design sensitivity, defined as the total derivative of the objective function with respect to the design variables, is calculated based on the variation of the state variable with respect to the design variable. And the variation of He state variable is calculated by differentiating the both sides of the system matrix equation obtained by applying boundary element method. Through the numerical example with simple electromagnet, the usefullness is proved.

• 대한전기학회논문지
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• 제41권8호
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• pp.850-857
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• 1992

Design sensitivity analysis is proposed for the optimal shape design of three-dimensional magnetostatic problems. The direct differentiation method is introduced for design sensitivity analysis and the boundary element method with reduced magnetic scalar potential as the state variable is used to analyze the magnetic characteristics. In the direct differentiation method, the design sensitivity, defined as the total derivative of the objective function with respect to the design variables, is calculated based on the variation of the state variable with respect to the design variable. And the variation of the state variable is calculated by differetiating the both sides of the system matrix equation obtained by applying boundary element method. Through the numerical example with simple electromagnet, the usefulness is proved.

• Transactions on Electrical and Electronic Materials
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• 제6권3호
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• pp.110-114
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• 2005

We present a micro fluxgate magnetic sensor having solenoid coils and racetrack shaped magnetic core, which was designed to decrease the .operating power and magnetic flux leakage. Electroplated copper coils of $6\;{\mu}m$ thickness and the core of $3\;{\mu}m$ thickness were separated by benzocyclobutane (BCB) having a high insulation and good planarization characters. Permalloy $(Ni_{0.8}Fe_{0.2})$ as a magnetic core was also electroplated under 2000 gauss to induce the magnetic anisotropy. The core had the high DC effective permeability of $\~1,300$ and coercive field of $\~0.1$ Oe. The fabricated fluxgate sensor had the very small actual size of $3.0\times1.7\;mm^2$. The fluxgate sensor with a racetrack shaped core had the high sensitivity .of $\~350$ V/T at excitation condition of 3 $V_{P-P}$ and 2 MHz square wave. When two fluxgates were perpendicularly aligned in terrestrial field, their two-axis output signals were very useful to commercialize an electronic azimuth compass for the portable navigation system.

• 한국자기공명학회논문지
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• 제22권2호
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• pp.34-39
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• 2018

The Nuclear Magnetic Resonance (NMR) technique using Dynamic Nuclear Polarization (DNP) procedures is one of the promising techniques that enable overcoming low sensitivity problems in NMR spectroscopy. We constructed an ODNP-NMR system using a commercial benchtop EPR spectrometer. The $^1H$ NMR peak area of water in aqueous solutions of 4-hydroxy-TEMPO was enhanced more than 95 times in the ODNP-NMR experiments. Our signal enhancement results were about 55% of the previously reported result. This could be due to non-uniform microwave power over a sample and unwanted sample heating by microwave. However, this portable ODNP-NMR spectrometer will be eventually useful for site-specific detection with nano-scale spatial resolutions and molecular dynamics studies with significantly improved signal sensitivity.