• Proceedings of the KIEE Conference
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• 1992.07b
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• pp.649-652
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• 1992

ECR(Electron Cyclotron Resonance) occure at ${\omega}_c$=${\omega}$, ${\omega}_c$:electron cycltron frequency, ${\omega}$:electromagnetic wave frequency. ECR system have several merit, 1) power transefer efficiency 2) low neutral gas pressure (below 1 mTorr) 3) high plasma density($10^{12}$ $cm^{-3}$). It is applicated variously in the field of semiconductor and new materials as the manufacturing equipment. Magnetic field in ECR system contruct resonance layer (${\omega}$=2.45GHz, $B_z$=875 Gauss) and control plasma. Plasma is almost generated at resonance layer. If the distance between substrate and resonance layer is short, uniformity of plasma is related with profile of resonance layer. Plasma have the property "Cold in Field", so directonality of magnetic field is one of the control factors of anisotropic etching. In this study, we calculate B field and flux line distribution, optimize geometry and submagnet current and improve of magnetic field directionality (99.9%) near substrate. For the purpose of calculation, vector potential A(r,z) and magnetic field B(r,z), green function and numerical integration is used. Object function for submagnet optimization is magnetic field directionality on the substrate and Powell method is used as optimization skim.

• Proceedings of the KSME Conference
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• 2000.04a
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• pp.433-439
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• 2000

Lots of semi-active control devices have been developed in recent years because they have the best features of passive and active system. Especially, controllable magneto-rheological(MR) fluid devices have received significant attention in these area of research. The MR fluid is the material that reversibly changes from a free-flowing, linear viscous fluid to a semisolid with a controllable yield strength in milliseconds when exposed to a magnetic field. If the magnetic field is induced by moving a permanent magnet instead of applying current to a solenoid, it is possible to design a MR damper consuming low power because the power consumption is reduced at steady state. This paper proposes valve mode MR damper using permanent magnetic circuit that has wide range of operation with low power consumption and small size. To design a MR damper that has a large maximum dissipating torque and a low damping coefficient, a design parameter is adopted. The magnetic circuit, material of choke and choke type are selected experimentally with the design parameter. The behaviors of the damper are examined and torque tracking control using PID feedback controller is performed for step, ramp and sinusoidal trajectories.

• Journal of Power Electronics
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• v.19 no.3
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• pp.625-636
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• 2019

This paper proposes an active leakage magnetic field (LMF) suppression scheme, which uses the dual-transmitter (DT) topology, for EV wireless charging systems (EVWCS). The two transmitter coils are coplanar, concentric and driven by separate inverters. The LMF components generated by the three coils cancel each other out to reduce the total field strength. This paper gives a detailed theoretical analysis on the operating principles of the proposed scheme. Finite element analysis is used to simulate the LMF distribution patterns. Experimental results show that when there is no coil misalignment, 97% of the LMF strength can be suppressed in a 1kW prototype. These results also show that the impact on efficiency is small. The trade-off between LMF suppression and efficiency is revealed, and a control strategy to balance these two objectives is presented.

• Journal of Power Electronics
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• v.9 no.1
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• pp.68-73
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• 2009

Automotive inverters may require current sensors for motor torque control, especially, in applications of hybrid electric vehicles or fuel cell vehicles. In this paper, to achieve a compact, integrated and low cost current sensor, a hall current sensor without magnetic core is introduced for integrating an automotive inverter. The compactness of the current sensor is possible by using integrated magnetic concentrators based on the Hall effect. Magnetic fields caused by three-phase currents are analyzed and a magnetic shield design is proposed for decoupling the cross-coupled field. It offers galvanic isolation, wide bandwidth (>100kHz), and accuracy(< 1%). Using 2D FEM analysis, its performance is demonstrated with design parameters at a U-shaped magnetic shield. The proposed coreless current sensor is tested with rated current to validate the linearity and accuracy.

• Journal of the Semiconductor & Display Technology
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• v.17 no.1
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• pp.21-26
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• 2018

In this paper, a multiple coupling inductor with expandable-integrated magnetic structure was proposed to enable miniaturization of external switched mode power supply (SMPS) for a large display. Inductance formula of the proposed inductor structure was derived through magnetic circuit analysis for a simple inductance designing process. The proposed inductor was applied into a 1kW class interleaved bridgeless power factor correction circuit which requires four inductors, and experimental steady state result of the circuit was compared. According to the experimental result, it was found that the proposed multiple coupling inductor shows the electrical characteristics that can replace the conventional separated inductors and is suitable for miniaturization of the SMPS since the circuit configuration is possible with one shared inductor.

• Journal of the Korean Society of Industry Convergence
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• v.22 no.1
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• pp.29-37
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• 2019

A new permanent magnet biased hybrid maglev actuator is developed. Compared to the classical hybrid maglev actuators, the new maglev has unique flux paths such that bias fluxes are separated with control flux paths. The control flux paths have minimum reluctances only developed by air gaps, so the currents to produce control fluxes can be minimized. The consumed power to operate this maglev system can also be minimized. The gravity load can be compensated with the static magnetic forces developed by the permanent magnet bias fluxes while external disturbances are controlled with the bidirectional AC magnetic forces developed by control fluxes by currents. 1-D circuit model is developed for this model such that the flux densities and magnetic forces are extensively analyzed. 3-D finite element model is also developed to analyze the performances of the maglev actuator.

• Journal of Magnetics
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• v.22 no.2
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• pp.203-213
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• 2017

Magnetically suspended control & sensitive gyroscope (MSCSG) is a novel type of gyroscope with the integration of attitude control and attitude angular measurement. To improve the precision and reduce the power consumption of Lorentz Force-type Magnetic Bearing (LFMB), the air gap flux density distribution of LFMB has been studied. The uniformity of air gap flux density is defined to qualify the uniform degree of the air gap flux density distribution. Considering the consumption, the average value of flux density is defined as well. Some optimal designs and analyses of LFMB are carried out by finite element simulation. The strength of the permanent magnet is taken into consideration during the machining process. To verify the design and simulation, a high-precision instrument is employed to measure the 3-dimensional magnetic flux density of LFMB. After measurement and calculation, the uniform degree of magnetic flux density distribution reaches 0.978 and the average value of the flux density is 0.482T. Experimental results show that the optimal design is effective and some useful advice can be obtained for further research.

• Journal of Power System Engineering
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• v.14 no.1
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• pp.65-70
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• 2010

Magnetic levitation system is nonlinear and inherently unstable, so it is difficult to control. Analog control circuit was widly used as the controller of magnetic levitation system, but digital controller is now substituted for analog controller according to development of digital electronics. In this study, Atmel AVR series, ATmega 128 which is a kind of $\mu$-processor for digital controller is used because the chip is cheap and popular. We designed and made ATmega 128 one-board controller and aimed to verify validity through the experiance of levitation response.

• Proceedings of the KIPE Conference
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• 2007.07a
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• pp.418-420
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• 2007

When the magnetic levitation system(MAGLEV) initially rise, The MAGLEV has a weak point that is very large variation of the electric current. In this paper, The author applied the multi-loop-control to stably control the magnetic levitation system(MAGLEV). The gains of the control algorithm were selected based on pole locations formulated from a prototype Bessel transfer function model. The design incorporate tradeoffs in DC-to-DC converter hard-ware para-meters and pole locations. In order to confirm the superiority of the proposed pole selection and controller, MATLAB simulation and experiment results are presented.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.51 no.9
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• pp.515-521
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• 2002

This paper presents the scheme that improves control responsibility and stability of the controlled-PM electromagnet levitation system with zero Power controller. A magnetically levitation system is used widely because friction can almost be disappeared. But it is difficult to control due to restraint of controllable area and nonlinear characteristics of electromagnetic force, which is proportioned to a square of the magnetic flux density and is in inverse proportion to a square of the air-gap. So, the application of observer theory in which the levitation system is considered to be a linear dynamic model has resulted in omitting the time dependence on mover's speed. Consequently, the performance of the observer is quite poor during transients. Therefore, this paper proposed the controlled-PM electro-magnetic levitation control method in which the variable load is estimated by using the reduced order extended luenverger observer and its system is controlled at a new zero power equilibrium air-gap position. It is also verified that the proposed control method improve the control performance through simulation and experiment.