• Journal of Electrical Engineering and Technology
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• 제7권4호
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• pp.558-563
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• 2012

In this paper, a novel planar type magnetic levitation system without other assistant devices is proposed and it can move with 6 degree of freedom (X, Y, Z, ${\theta}_X$, ${\theta}_Y$, ${\theta}_Z$) in wafer size as well as in nano scale positioning.The mover is composed with 2-D Halbach permanent magnet array and the stator is composed with $10{\times}10$ coil arrays.It was composed in laboratory and tested with short stroke (4 [mm]) and long stroke (160 [mm])movements. The errors of short movement test is [X, Y, Z, ${\theta}_X$, ${\theta}_Y$, ${\theta}_Z$]${\leq}$ [${\pm}200nm$, ${\pm}200nm$, ${\pm}250nm$, ${\pm}3urad$, ${\pm}2urad$, ${\pm}1urad$]The errors of long stroke movement test is [X, Y, Z, ${\theta}_X$, ${\theta}_Y$, ${\theta}_Z$]${\leq}$ [${\pm}200nm$, ${\pm}200nm$, ${\pm}250nm$, ${\pm}1.5urad$, ${\pm}2urad$, ${\pm}0.5urad$].

• 산업기술연구
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• 제19권
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• pp.9-14
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• 1999

The voice coil actuator uses the Lorentz force between the magnetic field of the permanent magnets and the electromagnets to the motions and positioning. The small size, light weight and fast dynamic response of the these type actuators lead to admit them in the micro-positioning apparatus of the micro-machining systems. In this paper, the linear motion voice coil actuator is developed for the driving and positioning the rotating electrode of the electric discharge machine (EDM). The analyzed and measured results for the actuator are compared and discussed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.348-352
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• 2002

a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. This thesis represents optimal design on ultra-precision positioning with single plane X-Y stage and development of artificial control system for adequacy of industrial demand. Also, dynamic simulation on global stage is performed by using ADAMS (Automated Dynamic Analysis of Mechanical System) for the purpose of grasping dynamic characteristic on user designed X-Y global stage. The error between displacements from micro stage and from FEM(Finite Element Method) is 3.53% by verifications of stability on micro stage and control performance. As maximum Von-mises stress on hinge of micro stage is 5.981kg/mm$^2$ that is 1.5% of yield stress, stability on hinge is secured. Preparing previous results, optimal design of micro stage can be possible, and reliance of results with FEM can be secured.

• International Journal of Precision Engineering and Manufacturing
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• 제7권4호
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• pp.28-33
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• 2006

Various precision engineering studies have attempted to remove mechanical friction, which causes the performance of a system to deteriorate, from precision positioning devices. Since the classical fluid lubrication method has some disadvantages in clean environments, attention has been focused on magnetic bearings and contact-free systems with their pollution-free characteristics. In this paper, f electromagnets are modeled and analyzed, not only for magnetic bearings but also for contact-free electromagnetic actuators. Three types of electromagnets that are appropriate for various applications were considered using magnetic circuitry theory. The results were experimentally validated.

• Journal of Mechanical Science and Technology
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• 제17권5호
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• pp.708-717
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• 2003

With the development of precision manufacturing technologies, the importance of precision positioning devices is increasing. Conventional actuators, dual stage or mechanically contacting type, have limitation in coping with performance demands. As a possible solution, magnetic suspension technology was studied. Such a contact-free system has advantages in terms of high accuracy, low production cost and easy adaptability to high precision manufacturing processes. This paper deals with magnetically suspended multi-degrees of freedom actuator which can realize large linear motion. In this paper, the operating principle is explained with the magnetic force analysis, and the equations of motion are derived. Experimental results of the implemented system are also given.

• 한국전자파학회논문지
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• 제30권1호
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• pp.38-44
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• 2019

본 논문에서는 자기 공진형 무선전력전송 시스템에서 사용 가능한 핑거프린트 방식의 측위 기법을 제안하고 성능을 검증하였다. 측위를 위해 3축 방향의 자기장 신호 측정이 가능한 소형 직교 보조코일을 가지는 수신기 코일 설계 방안을 제시하고, 제안한 코일을 이용해 획득한 3축의 기전력의 크기와 위상 특성을 추출하였다. 측정 지점에서 획득된 값을 이용하여 위치를 측정하기 위해 LUT(Look-up Table)를 이용하는 기법과 기계학습 방식 중 LDA(Linear Discriminant Analysis)을 이용하는 기법을 제안하고, 각 기법별 측위 정확도 및 계산 속도를 비교 제시하였다. 6.78 MHz 무선전력전송시스템에서 75개의 지점을 측위하는 실험에서 제안하는 코일과 기전력 특성을 이용한 LUT 기법을 적용하여 측위 정확도 97.33%를 달성하였다. LDA 기법의 경우, 기전력과 위상을 이용하여 측위하는 경우 LUT 기법에 비해 계산 속도가 늘어나지만 정확도를 향상시킬 수 있었다.

• 소음진동
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• 제5권1호
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• pp.49-57
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• 1995

An electronic circuit device is developed such that the displacement between an electromagnet and a moving target can be estimated from the coil current measurement, and then applied to an active magnetic bearing system. In order to levitate the shaft without using displacement sensor the stable control gains are obtained from the linearized model which includes the gap estimation circuit. Experimental results show that the shaft, by the estimated gap feedback, can be levitated within $\pm$6 ${\mu}m$ positioning error.

• 한국정밀공학회지
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• 제24권2호
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• pp.86-94
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• 2007

In this paper, a dual stage servo mechanism has been developed for image tracking system to improve control performances such as small rise time, small overshoot, small settling time, small stabilization error etc. A secondary stage, a platform, actuated by a pair of electro-magnets is mounted on a conventional elevation gimbal. In this mechanism, the gimbal provides large range but slow motion and the platform provides small range but fast positioning. A sliding mode control is applied to the platform positioning to attain robust performances and stability in the presence of the disturbance related to dynamic coupling of the gimbal and the platform. Results from experiments illustrate that the suggested dual stage mechanism controlled by the sliding mode control is effective in improving responses and attenuating the disturbance response related with dynamic coupling.

• 한국소음진동공학회논문집
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• 제15권3호
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• pp.364-370
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• 2005

The active magnetic bearing (AMB) systems mounted in moving vehicles are exposed to the disturbances due to the base motion, often leading to malfunction or damage as well as inaccurate positioning of the systems. Thus, in the controller design of such AMB systems, robustness to base disturbances becomes an essential requirement. In this study, effective control schemes are proposed for the homo-polar AMB system, which uses permanent magnets for generation of bias magnetic flux, when it is subject to base motion, and its control performance is experimentally evaluated. The base motion of AMB system is modeled as the dynamic disturbances in the gravity and base excitation forces. To effectively compensate for the disturbances, the angle feed-forward controller based on the inverse dynamic model and the acceleration feed-forward controller based on the normalized filtered-X LMS algorithm are proposed. The performance test of the prototype AMB system is carried out, when the system is mounted on rate table. The experimental results show that the performance of the proposed controllers for the AMB system is satisfactory in compensating for the disturbances due to the base motion.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 추계학술대회논문집
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• pp.486-489
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• 2004

The active magnetic bearing (AMB) systems mounted in moving vehicles are exposed to the disturbances due to the base motion, often leading to malfunction or damage as well as inaccurate positioning of the systems. Thus, in the controller design of such AMB systems, robustness to base disturbances becomes an essential requirement. In this study, effective control schemes are proposed for the homo-polar AMB system, which uses permanent magnets for generation of bias magnetic flux, when it is subject to base motion, and its control performance is experimentally evaluated. The base motion of AMB system is modeled as the dynamic disturbances in the gravity and base excitation forces. To effectively compensate for the disturbances, the angle feed-forward controller based on the inverse dynamic model and the acceleration feed-forward controller based on the normalized filtered-X LMS algorithm are proposed. The performance test of the prototype AMB system is carried out, when the system is mounted on rate table. The experimental results show that the performance of the proposed controllers for the AMB system is satisfactory in compensating for the disturbances due to the base motion.